SU1662866A1 - Method for setting-up string-type cutting tool - Google Patents

Abstract

The invention relates to chemical engineering and can be used in the processing of crystals. The purpose of the invention is to improve the accuracy of the setting. The tool setting and tension control is performed by setting on the display 5 of the technological device the operating force of the spring 8 of the pusher 6 selected less than the critical force. Then, the pusher 6 is pressed with the working force on the strings 3 and the sag of the strings is measured from the initial position of the tension of the strings, and then the sag is compared with the sag corresponding to the critical breaking force. 3 il.

Description

FIG. 2

The invention relates to chemical engineering and can be used in the processing of crystals.

The purpose of the invention is to increase your customization.

The way of the troika of the cutting string instrument includes a winding with tension along the slots of the fasteners of the string with fastening of its ends, and control of the tension. In this case, a critical breaking force and elasticity of individual tools with a tool in the plane of cutting are determined by measuring the amount of slack with a tool using an indicator, and the control of the stress force is performed by measuring the amount of slack of the strings comparing the amount of slack with a large 4 slacks corresponding to the critical breaking force.

FIG. 1 shows a string instrument with a controlling instrument; in fig. 2 - the same section; on fig.Z to, top view

The working tool used by the method is structurally made 5 in the form of two rollers 1 fixed in the cassette 2, with strings 3 parallel to it, One of the ropes 1 (by adjusting the pin) can be progressively moved relative to the other nat guiva

strings "During operation with such a working tool, strings with abrasive plastered on them in a cassette move along the plane of an object made in the form of a semiconductor crystal, and the object goes slowly up to the strings, ensuring a depth of cut. The method of setting up the working tool is carried out using an uncomplicated device whose structure consists of a support 4S on which a cartridge 2 with strings 3r of the indicator 5S is attached, containing a pusher 6 with a rod 7 and a spring 8, a scale 9 with an arrow 10. On the rod 7 there is a risk 119 fixing critical pusher effort 6.

The method for setting the working tool, made in the form of parallel-tensioned strings 3, is as follows.

The string 3 or the rad string is pressed with the pusher b and its deflection is fixed by the arrow 10 according to the indicator 5 At an equal force pressure, provide

0

five

d

0

five

readable by a spring 8 and fixed by a risk 11 on the rod 7 of the pusher 6, mark and compare the readings on a scale 9 of the indicator 5 in a different period of time. The force of the spring 8 selects the outcome from the critical force equal to the breaking of the string 3 and takes it slightly less, i.e. with such a force that, when working, the pusher 6 of the indicator 5 could not break the string 3 and at the same time the force should be sufficient to create the greatest force on the string. Consequently, the working force is first set on the string 3, fixing it in the process of measuring by the indicator lowering level, i.e. position of the rim of the indicator relative to the risks 11 on the rod 7 of the pusher 6, and notice by the arrow | 0 the initial reading on the scale 9 of the indicator 5. And then with a constant force of pressure on the string 3 (or string 3) 5 lowering the frame of the indicator 5 to the risks, take readout on scale 9 of indicator 5 and compare it with the initial reading. When the strings 3 are sagging, the instruments pull one of the rollers to achieve zero counting “

The object which is cut by such an instrument was taken from a semiconductor crystal, for example, from germanium, 20x4 to 0.13 mm in size. The strings 3 in cassette 2 were taken in a diameter of 0.01-0.05 mm, the number of strings in the cassette was 100-200. The accuracy of cutting a crystal was: over the depth of cutting across the entire area of the crystal, not more than 0.002 mm, across the width of cutting into squares 0.003 mm, i.e. cutting in mutually perpendicular directions, leaving the undercut crystal thickness in the range of 0.005-0.010 mm. Compliance with this cutting precision is necessary to obtain high quality semiconductor parameters. The weakening of the strings causes unequal depth of cutting of the crystal over the entire area, non-parallelism of the slots in the crystal, their unequal width. The increase in the accuracy of tuning by the proposed method is increased by 3-4 times.

Claims (1)

Invention Formula The method of setting the cutting stringed instrument, including winding tensioning the fasteners of the string along the grooves with fastening of its ends, tension control, characterized in that, in order to increase the tuning accuracy, the critical breaking force and elasticity of the individual are determined tool strings in the cutting plane by measuring the sag of the strings with the help of an indicator, and the tension control is measured by measuring the sag of the strings and comparing this sag with the sag corresponding to the critical breaking force. Schig.1 Fig.Z