SU1545829A1 - Ion excitation source - Google Patents

Ion excitation source

Info

Publication number
SU1545829A1
SU1545829A1 SU4434288/25A SU4434288A SU1545829A1 SU 1545829 A1 SU1545829 A1 SU 1545829A1 SU 4434288/25 A SU4434288/25 A SU 4434288/25A SU 4434288 A SU4434288 A SU 4434288A SU 1545829 A1 SU1545829 A1 SU 1545829A1
Authority
SU
USSR - Soviet Union
Prior art keywords
anode chamber
excitation source
ion beam
ion excitation
working material
Prior art date
Application number
SU4434288/25A
Other languages
Russian (ru)
Inventor
С.Ф. Белых
Р.Н. Евтухов
И.В. Редина
Original Assignee
Институт электроники им.У.А.Арифова
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Институт электроники им.У.А.Арифова filed Critical Институт электроники им.У.А.Арифова
Priority to SU4434288/25A priority Critical patent/SU1545829A1/en
Application granted granted Critical
Publication of SU1545829A1 publication Critical patent/SU1545829A1/en

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)

Abstract

FIELD: devices for physical investigations. SUBSTANCE: anode chamber 1 contains working material 2. Spiral-shaped cathode 3 is located in anode chamber. Electrons which are emitted by cathode evaporate working material. Anode chamber provides ionization and excitation of ions. Ion beam is accelerated by electrode 4 and is brought into focus by electrodes 5 and 6. EFFECT: increased ionization rate, increased brightness of ion beam. 1 dwg
SU4434288/25A 1988-06-02 1988-06-02 Ion excitation source SU1545829A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
SU4434288/25A SU1545829A1 (en) 1988-06-02 1988-06-02 Ion excitation source

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SU4434288/25A SU1545829A1 (en) 1988-06-02 1988-06-02 Ion excitation source

Publications (1)

Publication Number Publication Date
SU1545829A1 true SU1545829A1 (en) 1996-10-20

Family

ID=60528979

Family Applications (1)

Application Number Title Priority Date Filing Date
SU4434288/25A SU1545829A1 (en) 1988-06-02 1988-06-02 Ion excitation source

Country Status (1)

Country Link
SU (1) SU1545829A1 (en)

Similar Documents

Publication Publication Date Title
SE8801144D0 (en) IMPROVED WIRE ION PLASMA GUN
ATE406467T1 (en) PLASMA TREATMENT DEVICE WITH COMBINED ANODES/IONS SOURCE
ES2068890T3 (en) RESONANCE ION GENERATOR IN AN ELECTRONIC CYCLOTRON.
SE8700017D0 (en) ION PLASMA ELECTRON GUN
JPS57201527A (en) Ion implantation method
JPS53121454A (en) Electron source of thin film electric field emission type and its manufacture
SE8801145L (en) ION PLASMA ELECTRON CANNON WITH DOSRATE CONTROL DEVICE BY AMPLIT MODULATION OF THE PLASMA DISCHARGE
JPS57191950A (en) Charged-particle source
JPS57208029A (en) Electric power unit for ion source
SU1545829A1 (en) Ion excitation source
CA2220605A1 (en) Ion source block filament with labyrinth conductive path
JPS5760658A (en) Cathode ray tube for light source
JPS5246300A (en) Ionic source
GB829783A (en) Apparatus for producing beams of ions of a given element
Bel'Chenko et al. Negative ion production in surface-plasma sources with unclosed electron drift discharges
RU95110393A (en) Method of and device for ion beam production
JPS6453422A (en) Dry etching device
SU519066A1 (en) Ion source
RU2068597C1 (en) Method for atom ionization and device which implements said method
SU696556A2 (en) Ion source
Nikitinskii Source of Metal Ions.
JPS5641658A (en) X-ray tube
JPS5593644A (en) Method of yielding ion using ion source device
ATE103106T1 (en) STEAM AND ION SOURCE.
SU1396854A1 (en) Ion source