SU1530962A1 - Device for inspecting the centering of optical parts - Google Patents

Abstract

The invention relates to instrumentation, in particular to optical instrumentation, and can be used in manufacturing to control the centering of optical components. The purpose of the invention is to improve the accuracy of centering and expand the functionality of the device. The light from the light source 1 illuminates the mark 3 and falls on the beam splitter 6. From the beam splitter, the light beam is divided into two directions and passes through the mirror 7 and the lens 8, the mirror 11 and the lens 12, respectively, projecting two marks into the foci of the lenses 8 and 12. When reflected from the surface of the test piece, two beams of rays pass separately the same optical elements, are connected by a beam splitter 6 and are projected through the lens 13 into the plane of the photodetector 19.

Description

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The invention relates to instrumentation, in particular, optical instrumentation, and can be used in manufacturing to control the centering of optical components.

The purpose of the invention is to improve the accuracy of centering and the expansion of functionality.

The drawing shows the optical layout of the device.

YcrpoviCTBO contains an illuminator made of light source 1 and condenser 2, a projection optical system including brand 3, diaphragm 4 and lens 5, in the focal plane of which a brand is installed, a beam splitter 6 installed at the intersection of the optical axes of the projection and receiving optical systems and dividing the beam of rays into two beams, one of which is directed to the mirror 7, the lens 8, whose focus is aligned with the point M of the spherical surface of the lens 9 that is mounted on the spindle 10, the mirror 11, the lens 12 that is Cuts the second beam of the beam splitter 6 onto the monitored surface of the optical system, the receiving optical system containing the splitter 6 common with the projection optical system and optical elements mounted in two branches between the beam splitter 6 and the controlled lens 9, lens 13, block 14 for measuring the transverse displacement of the image marks, a prism 15, which is provided with a translucent hypotenuse border, a grid 16, an eyepiece 17, a diaphragm 18 optically conjugated to mark 3, and a photodetector 19.

The device works as follows.

The light from the light source 1 illuminates the brand 3 with the help of condenser 2, passes through the diaphragm 4, leaves the lens 5 in parallel and falls onto the beam splitter 6. The beam of rays reflected from the last beam using mirror 7 and the lens 8, and a beam of rays passing through the beam splitter using the mirror 11. and lens 12 are projected by two brand images into the foci of these lenses, to the point lying at the intersection of their optical axes and the spherical surface of the tested part aligned with point M, which can

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the gate when the spindle 10 rotates around its axis of rotation. When they are reflected from the surface of the monitored part, two beams of rays in the reverse course pass separately the same optical elements, with which the two images of the mark are projected onto the surface of the part (lens 8 and mirror 7 in one branch and lens 12 and mirror 11 in the other ), and with the help of a beam splitter 6, the lens 13 of the receiving system is connected and parallel to each other. Using a lens 13 and a prism 15 with a translucent hypotenuse edge, the beams carrying the two images of the mark are projected into the plane of the grid 16 and into the plane of the photodetector 19. With the help of an ocular 17, an image of the mark is observed in the plane of the grid. A photodetector is a coordinate-sensitive transducer. Before measurements, the device is adjusted to align the intersection point of the optical axes of the lenses 8 and 12 with the point M of the surface of the test piece located on the spindle axis of rotation.

The center of curvature C of the spherical surface is laid out on the axis of rotation of the spindle, the central rays of the two light beams reflected from the lens surface coincide with the optical axes of objectives 8 and 12 and intersect the grid and the photodetector in the center. When the controlled spherical surface is centered, its center of curvature C does not coincide with the axis of rotation of the spindle and the MS normal at the point M of the lens surface is inclined with respect to the axis of the spindle by an angle G. The central rays of the two reflected light beams deviate from 12. The light beams are displaced in opposite directions relative to each other in the plane of the grid and the photodetector due to the fact that the number of reflections of the light beams in the two optical branches x between the beam splitter 6 and with lenses 8 and 12 being equal, the pentral rays of these beams intersect the grid plane at points 0 and 0 and the photodetector plane at points F, and F. During the rotation of the spindle with the lens, the maximum distance between the points F and F (and / or O and 0) is measured, which is proportional to the doubled angle j of the deviation of the normal of the de-centered surface of the controlled lens.

Claims (1)

Invention Formula I. Device for monitoring the centering of optical parts, including a light source, a projection optical system made in the form of a brand, aperture and lens mounted on its optical axis, and a receiving optical system made in the form of a lens and a brand image transverse displacement unit The optical axes of the lenses of both systems are set at equal angles to the normal to the surface of the test piece and intersect in 0 the space of the monitored optical part, characterized in that, in order to monitor the accuracy of the control, a splitter installed between the projection and receiving optical systems at the intersection of these systems, mirror elements installed in both systems between the lens and the splitter, and the number of reflecting surfaces of mirror elements placed in the projection system is equal to the number 5 of them in the receiving system. 2, The device according to claim., Characterized in that, in order to extend the functionality, in the receiving optical system 0 a mirror-prism element, an eye-piece and a grid were introduced.