SU1462578A1 - METHOD OF OBTAINING ORGAN-ORGANIC COATINGS - Google Patents

METHOD OF OBTAINING ORGAN-ORGANIC COATINGS

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Publication number
SU1462578A1
SU1462578A1 SU4106868/05A SU4106868A SU1462578A1 SU 1462578 A1 SU1462578 A1 SU 1462578A1 SU 4106868/05 A SU4106868/05 A SU 4106868/05A SU 4106868 A SU4106868 A SU 4106868A SU 1462578 A1 SU1462578 A1 SU 1462578A1
Authority
SU
USSR - Soviet Union
Prior art keywords
organic coatings
coatings
obtaining organ
hexamethyldisiloxane
hexamethyldisilazane
Prior art date
Application number
SU4106868/05A
Other languages
Russian (ru)
Inventor
И.А. Айзенберг
И.А. Максимов
Original Assignee
Институт проблем и технологии микроэлектроники и особочистых материалов АН СССР
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Институт проблем и технологии микроэлектроники и особочистых материалов АН СССР filed Critical Институт проблем и технологии микроэлектроники и особочистых материалов АН СССР
Priority to SU4106868/05A priority Critical patent/SU1462578A1/en
Application granted granted Critical
Publication of SU1462578A1 publication Critical patent/SU1462578A1/en

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Abstract

Способ получения кремнийорганических покрытий путем нетермической активации паров кремнийорганического мономера в смеси с инертным газом, отличающийся тем, что, с целью улучшения качества покрытий, в качестве кремнийорганического мономера используют гексаметилдисилоксан или гексаметилдисилазан, нетермическую активацию проводят ультрафиолетовым излучением с длиной волны 160 - 195 нм при использовании гексаметилдисилоксана или с длиной волны 160 - 230 нм при использовании гексаметилдисилазана при давлении парогазовой смеси 6 · 10- 50 Торр и температуре 50 - 500C.A method of producing organosilicon coatings by non-thermal activation of organosilicon monomer vapors in a mixture with an inert gas, characterized in that, in order to improve the quality of coatings, hexamethyldisiloxane or hexamethyldisilazane is used as the organosilicon monomer using a wavelength of 160 to 195 nm hexamethyldisiloxane or with a wavelength of 160 - 230 nm using hexamethyldisilazane at a pressure of a vapor-gas mixture of 6 · 10-50 Torr, and t temperature 50 - 500C.

SU4106868/05A 1986-06-06 1986-06-06 METHOD OF OBTAINING ORGAN-ORGANIC COATINGS SU1462578A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
SU4106868/05A SU1462578A1 (en) 1986-06-06 1986-06-06 METHOD OF OBTAINING ORGAN-ORGANIC COATINGS

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SU4106868/05A SU1462578A1 (en) 1986-06-06 1986-06-06 METHOD OF OBTAINING ORGAN-ORGANIC COATINGS

Publications (1)

Publication Number Publication Date
SU1462578A1 true SU1462578A1 (en) 2000-02-27

Family

ID=60534535

Family Applications (1)

Application Number Title Priority Date Filing Date
SU4106868/05A SU1462578A1 (en) 1986-06-06 1986-06-06 METHOD OF OBTAINING ORGAN-ORGANIC COATINGS

Country Status (1)

Country Link
SU (1) SU1462578A1 (en)

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