SU1392344A1 - Method and apparatus for measuring thickness of material layer in process of its deposition by spraying - Google Patents

Abstract

The invention relates to a measuring technique and is aimed at improving the accuracy of measuring the thickness of a layer of material during its spraying process by stabilizing the sensitivity of a quartz resonator used as a witness sample. The method of measuring the thickness consists in directing the flow of the sprayed material to the quartz resonator through a diaphragm, which is made with an adjustable hole. With this diaphragm, the area of the sprayed area on the resonator is increased simultaneously with an increase in the thickness of the sprayed layer. During the sputtering process, the resonant frequency of the quartz resonator is measured, and the thickness of the applied layer is determined from the change. In the device implementing the method, the diaphragm is high in the form of two rotating petals with cuts in them located one opposite the other in the area where the quartz resonator is located. The axes of rotation of these petals are diametrically opposed on the casing, and the pins on their surface interact with the slots in the rotary bracket of the casing of the device having a serrated external surface designed to interact with the spraying process control mechanism. 2 Il. i (Л С

Description

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: The invention relates to a measurement technique and makes it possible to measure the thickness of the deposited layers during their spraying, as well as to measure the sputtering rate or the mass of the deposited material. ,

The purpose of the invention is to increase the accuracy of measuring the thickness of the layer of sputtered material during its deposition by stabilizing the sensitivity of the quartz resonator used as a sample — evidence.

FIG. I shows an apparatus 15 for carrying out the proposed method, a slit; in fig. 2 - the same, with a clear view, top view.

The device includes a housing 1 in which a witness sample is installed, 20 made in the form of a quartz resonator 2. Above the resonator is located on the diaphragm, made in the form of two rotary lobes 3 and 4 with cutout 5 and 6 in them, located one opposite the other in the placement area of the quartz resonator 2. The axes 7 and 8 of the petals 3 and A are diametrically opposed on the body, due to which the turning of the petals changes the area of their mutual overlap, and hence the area of the orifice of the diaphragm formed in it by the notches 5 and 6. The rotation of the petals 3 and A of the diaphragm is carried out 35 by means of screws 9 and 10 fastened to them, which fit into the corresponding grooves 11 and 12 on the periphery of the housing pivot arm 13, which has an axial hole 14 opposite cutouts 40 5 and 6 in the petals diaphragm, and also has an external serrated surface 15 designed to interact with the printing process control mechanism (not shown).

The method is carried out as follows.

A stream of sprayed material (shown in the drawing by arrows) is directed to working objects (not shown) 50 and to the sample — a witness, which is a quartz resonator. The sprayed material gets onto the resonator 2 through the hole 14 in the frame 13 or higher and the notches 5 and 6 in the rotary 55 petals 3 and 4, which form an area-adjustable hole in the process of the hole in the diaphragm. Increase

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the areas of this hole are made by rotating the zigzag 13, which allow the petals 3 and 4 to rotate using tongs 9 and 10, which interact with the grooves 11 and 12 in the lid 13. The lid 13 can be rotated to a minimum by one tooth division of its toothed surface 15 due to it interacts with the mechanism of controlling the vacuum press process and can occur, for example, with each opening of the door of the vacuum chamber. In the process of sputtering a layer of material, the resonant frequency of the Quartz resonator is measured, from the variation of which the thickness of the sprayed layer is determined. By increasing the area of the imprinted area on the quartz resonator, simultaneously with an increase in the thickness of the sprayed layer, the loss of sensitivity of the resonator as the degree of stagnation increases is compensated. This increases the measurement accuracy of the thickness of the sprayed layer.

Claims (2)

Invention Formula 1 o A method of measuring the thickness of a layer of material in the course of its deposition, which consists in directing the flow of the material to be printed through the diaphragm to the sample witness, using a quartz resonator as the chrome resonator, {measuring the resonant frequency of the quartz resonator and by changing this frequency thickness of the layer being pressed, that is, so that, in order to increase the accuracy by stabilizing the sensitivity of the quartz resonator, in the process of napa. with an increase in the thickness of the printed layer. 2. A device for measuring the thickness of a layer of material in the course of its deposition, comprising a housing, a quartz resonator mounted therein and a diaphragm placed opposite the resonator, characterized in that it is provided with a rotatable cap body having an axial bore, two grooves on the periphery and a gear an external surface designed to interact with the spraying process control mechanism, and the diaphragm is made in the form of two turning petals with cuts in them located one opposite the other in the quarters area evogo resonator, and with two pins to interact with the corresponding grooves of the cover, while the axis of rotation of the petals are fixed on the casing of the di-. Ametrically opposite. I I 1) 1 Editor A. Revin Fi9.2 Compiled by S. Skrypnik Tehred M. Didyk. Corrector V. Vut ha G2 YU W