SU1366411A1 - Method of working semiconductor materials with diamond tool - Google Patents

Method of working semiconductor materials with diamond tool

Info

Publication number
SU1366411A1
SU1366411A1 SU854022912A SU4022912A SU1366411A1 SU 1366411 A1 SU1366411 A1 SU 1366411A1 SU 854022912 A SU854022912 A SU 854022912A SU 4022912 A SU4022912 A SU 4022912A SU 1366411 A1 SU1366411 A1 SU 1366411A1
Authority
SU
USSR - Soviet Union
Prior art keywords
semiconductor materials
diamond tool
working semiconductor
working
diamond
Prior art date
Application number
SU854022912A
Other languages
Russian (ru)
Inventor
Vladimir V Bubnov
Anatolij G Elizarov
Vladimir E Alalykin
Oleg M Chigrinskij
Stanislav V Ptichnikov
Yurij N Zimitskij
Original Assignee
Vladimir V Bubnov
Anatolij G Elizarov
Vladimir E Alalykin
Oleg M Chigrinskij
Stanislav V Ptichnikov
Yurij N Zimitskij
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vladimir V Bubnov, Anatolij G Elizarov, Vladimir E Alalykin, Oleg M Chigrinskij, Stanislav V Ptichnikov, Yurij N Zimitskij filed Critical Vladimir V Bubnov
Priority to SU854022912A priority Critical patent/SU1366411A1/en
Application granted granted Critical
Publication of SU1366411A1 publication Critical patent/SU1366411A1/en

Links

SU854022912A 1985-12-09 1985-12-09 Method of working semiconductor materials with diamond tool SU1366411A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
SU854022912A SU1366411A1 (en) 1985-12-09 1985-12-09 Method of working semiconductor materials with diamond tool

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SU854022912A SU1366411A1 (en) 1985-12-09 1985-12-09 Method of working semiconductor materials with diamond tool

Publications (1)

Publication Number Publication Date
SU1366411A1 true SU1366411A1 (en) 1988-01-15

Family

ID=21221859

Family Applications (1)

Application Number Title Priority Date Filing Date
SU854022912A SU1366411A1 (en) 1985-12-09 1985-12-09 Method of working semiconductor materials with diamond tool

Country Status (1)

Country Link
SU (1) SU1366411A1 (en)

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