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Priority to SU3916848/04ApriorityCriticalpatent/SU1314835A1/en
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Применение соединений ряда фталоцианина общей формулыгде R= R= R= H (I);R= R= H, R-трет-Bu (II);R= R= H, R= Rh (III);R= R= H, R= ME (IV);R= R= H, R= Rh (V);R= R= H, R= Me (VI),в качестве вакуумного фоторезиста.The use of compounds of phthalocyanine series of the general formula where R = R = R = H (I); R = R = H, R-t-Bu (II); R = R = H, R = Rh (III); R = R = H , R = ME (IV); R = R = H, R = Rh (V); R = R = H, R = Me (VI), as a vacuum photoresist.