SU1220759A1 - Arrangement for securing abrasive wheel - Google Patents

Description

The invention relates to grinding, in particular, to devices for fastening abrasive wheels on rotating mandrels, and can be used in cutting semiconductor wafers and other brittle materials.

The purpose of the invention is to increase the reliability of the attachment by imparting an additional torque to the circle due to the energy of motion of the fluid.

FIG. 1 shows a device, a longitudinal section; in fig. 2 shows section A-A in FIG. one; in fig. 3 shows a section BB in FIG. one; in fig. 4 is the same as an embodiment.

On the spindle 1 of the machine (not shown) on the tongue 2 there is a flange 3. Concentric to the flange 3 there is a flange 4. The ends of both flanges face each other. The flange 4 by means of fasteners 5 is pressed to the end of the sleeve 6 of the flange 3. Between the ends of the flanges 3 and 4 with axial gaps "in and on the sleeve 6 radial gap" g is located abrasive circle 7 with pockets 8 made on it in the form of, for example, holes, located on one concentric center hole of a circle. Pockets 8 can be made in the form of blind or through holes. Axial clearances "0 between flanges 3 and 4 and circle 7 are made corresponding to 1.1-4.0 thickness of the circle. Through-holes 9 are made in at least one of the flanges, connected to a system (not shown) for supplying fluid to the zone of the circle. The holes 9 are communicated with the annular groove 10, made at the end of the flange. At the end of the flange 4, at least two channels 11 are made, which annually communicate an annular groove with an atmosphere at the periphery of the flange 4 in the direction of rotation. Channels 11 are made in the form of logarithmic spiral segments or linear.

The device works as follows.

Simultaneously with the start of rotation, the spindle 1, through the holes 9, serves the fluid. The latter is distributed along the annular groove 10 and fills the gaps "c and" g

0

0 Q

respectively, between flanges 3 and 4 and circle 7 and sleeve 6 and circle, as well as pockets 8 and channels 11. After the mandrel picks up a predetermined rotational speed through the forces of the friction of the fluid acting as an intermediate element, and the ends of the flanges 3, 4 and circle 7 and their molecular bond, the torque is transmitted from the shpinddel 1 to the abrasive circle 7. The main fluid flow goes through the channels 11 under the action of centrifugal forces, since the sum of the friction forces in them is less than the friction forces in the gaps. Fluid flows, not displaced, that flow through channels 11, inform circle 7 of an additional torque, the magnitude of which is directly proportional to the speed of rotation of the spindle. The fluid filling the pockets 8 also increases the torque of the circle 7. The increase of the torque depends on the magnitude of the centrifugal forces that occur in the volumes of the fluid filling the pockets and receiving the torque due to the friction of the ends of the flanges 3 and 4.

The proposed device has been tested when cutting sapphire plates, polycore with the same diamond wheel and in the same modes. At the same time, the cut width of the treated plates reached 110 μm.

Thus, the use in the proposed device of channels on the flanges and pockets in the circle allows to increase the magnitude of the transmitted torque, increases the durability of the circle, provides a more reliable damping of the circle oscillations that occur during the cutting process, reduces the cut width of the processed plates, which increases the percentage of output suitable crystals.

Since the device operates at high speeds and creates a turbulent flow, the fluid moving through such channels provides more reliable penetration into the cutting zone, which in turn provides more reliable lubrication and cooling of the circle, as well as removal of sludge from the cutting zone.

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Claims (3)

(54 (1. DEVICE FOR FASTENING THE ABRASIVE CIRCLE, containing two mounted relative to the circle with axial and radial clearances of the flange, in at least one of which there are through holes connected to one side by a fluid source, and on the other - made on the end face of the flange facing the circle with an annular cavity and the indicated gaps, characterized in that, in order to increase the reliability of fastening, channels connected to the annular cavity are made at the ends of the flanges facing the circle with access to the periphery of the flange. 2. The device according to π. 1, characterized in that the channels are tangent to the annular cavity. 3. The device according to paragraphs. 1 and 2, characterized in that the channels are made in the form of segments of a logarithmic spiral.