SG97896A1 - Method and system for preventing deposition on an optical component in a spectroscopic sensor - Google Patents

Method and system for preventing deposition on an optical component in a spectroscopic sensor

Info

Publication number
SG97896A1
SG97896A1 SG200004043A SG200004043A SG97896A1 SG 97896 A1 SG97896 A1 SG 97896A1 SG 200004043 A SG200004043 A SG 200004043A SG 200004043 A SG200004043 A SG 200004043A SG 97896 A1 SG97896 A1 SG 97896A1
Authority
SG
Singapore
Prior art keywords
optical component
spectroscopic sensor
preventing deposition
deposition
preventing
Prior art date
Application number
SG200004043A
Other languages
English (en)
Inventor
J F Mcandrew James
Jurcik Benjamin
Schnepper Carol
Inman Ronald
Znamensky Dmitry
Jacksier Tracey
Original Assignee
Air Liquide
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Air Liquide filed Critical Air Liquide
Publication of SG97896A1 publication Critical patent/SG97896A1/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/42—Absorption spectrometry; Double beam spectrometry; Flicker spectrometry; Reflection spectrometry
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B17/00—Methods preventing fouling
    • B08B17/02—Preventing deposition of fouling or of dust
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0256—Compact construction
    • G01J3/0259—Monolithic
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/44—Raman spectrometry; Scattering spectrometry ; Fluorescence spectrometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G01N21/15—Preventing contamination of the components of the optical system or obstruction of the light path
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/0006—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 with means to keep optical surfaces clean, e.g. by preventing or removing dirt, stains, contamination, condensation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G01N21/15—Preventing contamination of the components of the optical system or obstruction of the light path
    • G01N2021/151—Gas blown

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Optics & Photonics (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Optical Measuring Cells (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
SG200004043A 1999-07-19 2000-07-19 Method and system for preventing deposition on an optical component in a spectroscopic sensor SG97896A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US14418199P 1999-07-19 1999-07-19
US09/613,806 US6421127B1 (en) 1999-07-19 2000-07-11 Method and system for preventing deposition on an optical component in a spectroscopic sensor

Publications (1)

Publication Number Publication Date
SG97896A1 true SG97896A1 (en) 2003-08-20

Family

ID=26841753

Family Applications (1)

Application Number Title Priority Date Filing Date
SG200004043A SG97896A1 (en) 1999-07-19 2000-07-19 Method and system for preventing deposition on an optical component in a spectroscopic sensor

Country Status (5)

Country Link
US (1) US6421127B1 (de)
EP (1) EP1070943A1 (de)
JP (1) JP2001153793A (de)
SG (1) SG97896A1 (de)
TW (1) TW496955B (de)

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US7708859B2 (en) * 2004-04-30 2010-05-04 Lam Research Corporation Gas distribution system having fast gas switching capabilities
DE102004028420B3 (de) * 2004-06-04 2006-02-09 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Vorrichtung und Verfahren zur optischen Detektion von in Abgasen chemischer Prozesse enthaltenen Stoffen
US7586114B2 (en) * 2004-09-28 2009-09-08 Honeywell International Inc. Optical cavity system having an orthogonal input
US7902534B2 (en) * 2004-09-28 2011-03-08 Honeywell International Inc. Cavity ring down system having a common input/output port
FR2889204B1 (fr) * 2005-07-26 2007-11-30 Sidel Sas Appareil pour le depot pecvd d'une couche barriere interne sur un recipient, comprenant une ligne de gaz isolee par electrovanne
JP4842582B2 (ja) * 2005-08-04 2011-12-21 トヨタ自動車株式会社 ガス分析装置
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US20070246512A1 (en) * 2006-04-20 2007-10-25 Shahabudin Kazi Use of tunable diode lasers for controlling a brazing processes
US7649189B2 (en) * 2006-12-04 2010-01-19 Honeywell International Inc. CRDS mirror for normal incidence fiber optic coupling
US7612885B2 (en) 2006-12-22 2009-11-03 Honeywell International Inc Spectroscopy method and apparatus for detecting low concentration gases
KR100877491B1 (ko) 2008-04-29 2009-01-07 오희범 항온항습 기능을 구비하는 적외선 가스 감지기
US20090323055A1 (en) * 2008-06-25 2009-12-31 Honeywell International Inc. Crds brewster gas cell
US7663756B2 (en) * 2008-07-21 2010-02-16 Honeywell International Inc Cavity enhanced photo acoustic gas sensor
US8198590B2 (en) * 2008-10-30 2012-06-12 Honeywell International Inc. High reflectance terahertz mirror and related method
US7864326B2 (en) 2008-10-30 2011-01-04 Honeywell International Inc. Compact gas sensor using high reflectance terahertz mirror and related system and method
DE102009035789A1 (de) * 2009-07-31 2010-11-25 Carl Zeiss Laser Optics Gmbh Optisches System
US8267896B2 (en) 2009-12-18 2012-09-18 Tyco Healthcare Group Lp Surgical instrument cleaning arrangement
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FR2966931B1 (fr) * 2010-10-27 2012-11-16 Commissariat Energie Atomique Cellule de caracterisation pour analyse de fumee
US9625374B2 (en) * 2011-09-21 2017-04-18 Hewlett-Packard Development Company, L.P. Image forming apparatus having optical sensor system, optical sensor system having shields, and method thereof
US9759597B2 (en) 2013-02-21 2017-09-12 Golder Associates Ltd. Methods for calibrating a fugitive emission rate measurement
US9335257B2 (en) * 2013-06-20 2016-05-10 Rosemount Analytical Inc. Tunable diode laser absorption spectroscopy with water vapor determination
JP5973969B2 (ja) * 2013-07-31 2016-08-23 国立大学法人徳島大学 インライン型濃度計及び濃度検出方法
JP5563132B2 (ja) * 2013-08-05 2014-07-30 三菱重工業株式会社 ガス分析装置
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ITUB20153087A1 (it) * 2015-08-12 2017-02-12 Bofor S R L Sistema di monitoraggio per la salvaguardia degli stampi nelle macchine di stampaggio.
US9709491B1 (en) * 2016-03-28 2017-07-18 The United States Of America System and method for measuring aerosol or trace species
US10307803B2 (en) * 2016-07-20 2019-06-04 The United States Of America As Represented By Secretary Of The Navy Transmission window cleanliness for directed energy devices
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JP7387618B2 (ja) 2017-12-01 2023-11-28 エムケーエス インスツルメンツ，インコーポレイテッド ラジカルガス及び短寿命分子に対する複センサガスサンプリング検出システム及び使用方法
FR3086705B1 (fr) * 2018-09-27 2020-10-23 Pfeiffer Vacuum Pompe a vide primaire de type seche et procede de controle de l'injection d'un gaz de purge
CN112956128A (zh) * 2018-10-03 2021-06-11 麻省理工学院 通过吹扫气体防止沉积
CN111122442A (zh) * 2018-10-31 2020-05-08 高利通科技（深圳）有限公司 便于清洗的光谱气体测量池
DE102018221190A1 (de) * 2018-12-07 2020-06-10 Carl Zeiss Smt Gmbh Verfahren zum Bilden von Nanostrukturen an einer Oberfläche und Wafer-Inspektionssystem
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CN116879174A (zh) * 2023-07-10 2023-10-13 江苏大学 一种高温气体辅助自疏水防液体飞溅试验观测装置及方法

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US4443072A (en) * 1982-04-05 1984-04-17 The United States Of America As Represented By The United States Department Of Energy Purged window apparatus utilizing heated purge gas
EP0596605A1 (de) * 1992-11-06 1994-05-11 Nicolet Instrument Corporation Präzisionsgasküvette für Infrarot-Spektrometer und dergleichen
US5360980A (en) * 1993-02-26 1994-11-01 High Yield Technology Structure and method for providing a gas purge for a vacuum particle sensor installed in a corrosive or coating environment
US5565985A (en) * 1993-07-08 1996-10-15 Applied Materials, Inc. Particle monitoring sensor
EP0768521A1 (de) * 1995-10-10 1997-04-16 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Vieleckige, ebene Zelle mit Mehrfachdurchgang, eine solche enthaltendes System und Gerät, und Anwendungsverfahren
EP0768525A2 (de) * 1995-10-10 1997-04-16 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude System zur Überwachung von Kammerabgasen mittels Absorptionsspektroskopie, und damit ausgerüstetes Halbleiterverarbeitungssystem
WO1999002969A1 (en) * 1997-07-10 1999-01-21 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude In-line cell for absorption spectroscopy

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JPS616429Y2 (de) * 1979-02-13 1986-02-26
JPS59120825A (ja) 1982-12-27 1984-07-12 Shimadzu Corp 分光光度計のガスパ−ジ機構
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Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4443072A (en) * 1982-04-05 1984-04-17 The United States Of America As Represented By The United States Department Of Energy Purged window apparatus utilizing heated purge gas
EP0596605A1 (de) * 1992-11-06 1994-05-11 Nicolet Instrument Corporation Präzisionsgasküvette für Infrarot-Spektrometer und dergleichen
US5360980A (en) * 1993-02-26 1994-11-01 High Yield Technology Structure and method for providing a gas purge for a vacuum particle sensor installed in a corrosive or coating environment
US5565985A (en) * 1993-07-08 1996-10-15 Applied Materials, Inc. Particle monitoring sensor
EP0768521A1 (de) * 1995-10-10 1997-04-16 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Vieleckige, ebene Zelle mit Mehrfachdurchgang, eine solche enthaltendes System und Gerät, und Anwendungsverfahren
EP0768525A2 (de) * 1995-10-10 1997-04-16 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude System zur Überwachung von Kammerabgasen mittels Absorptionsspektroskopie, und damit ausgerüstetes Halbleiterverarbeitungssystem
WO1999002969A1 (en) * 1997-07-10 1999-01-21 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude In-line cell for absorption spectroscopy

Also Published As

Publication number Publication date
JP2001153793A (ja) 2001-06-08
US6421127B1 (en) 2002-07-16
TW496955B (en) 2002-08-01
EP1070943A1 (de) 2001-01-24

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