SG91930A1 - Endpoint detection in chemical-mechanical polishing of cloisonne structures - Google Patents

Endpoint detection in chemical-mechanical polishing of cloisonne structures

Info

Publication number
SG91930A1
SG91930A1 SG200103424A SG200103424A SG91930A1 SG 91930 A1 SG91930 A1 SG 91930A1 SG 200103424 A SG200103424 A SG 200103424A SG 200103424 A SG200103424 A SG 200103424A SG 91930 A1 SG91930 A1 SG 91930A1
Authority
SG
Singapore
Prior art keywords
cloisonne
structures
chemical
mechanical polishing
endpoint detection
Prior art date
Application number
SG200103424A
Inventor
James Lee Eric
A Martin Francisco
Wei Cong
Original Assignee
Ibm
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ibm filed Critical Ibm
Publication of SG91930A1 publication Critical patent/SG91930A1/en

Links

SG200103424A 2000-06-28 2001-06-09 Endpoint detection in chemical-mechanical polishing of cloisonne structures SG91930A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US57290000P 2000-06-28 2000-06-28

Publications (1)

Publication Number Publication Date
SG91930A1 true SG91930A1 (en) 2002-10-15

Family

ID=28042244

Family Applications (1)

Application Number Title Priority Date Filing Date
SG200103424A SG91930A1 (en) 2000-06-28 2001-06-09 Endpoint detection in chemical-mechanical polishing of cloisonne structures

Country Status (1)

Country Link
SG (1) SG91930A1 (en)

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