SG87933A1 - Post metal etch photoresist strip method - Google Patents

Post metal etch photoresist strip method

Info

Publication number
SG87933A1
SG87933A1 SG200103326A SG200103326A SG87933A1 SG 87933 A1 SG87933 A1 SG 87933A1 SG 200103326 A SG200103326 A SG 200103326A SG 200103326 A SG200103326 A SG 200103326A SG 87933 A1 SG87933 A1 SG 87933A1
Authority
SG
Singapore
Prior art keywords
metal etch
strip method
photoresist strip
post metal
etch photoresist
Prior art date
Application number
SG200103326A
Inventor
Jun Liu Wen
Chooi Simon
Zhou Mei-Sheng
Joy Raymond
Original Assignee
Chartered Semiconductor Mfg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Chartered Semiconductor Mfg filed Critical Chartered Semiconductor Mfg
Publication of SG87933A1 publication Critical patent/SG87933A1/en

Links

SG200103326A 2000-06-26 2001-06-04 Post metal etch photoresist strip method SG87933A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US40650000P 2000-06-26 2000-06-26

Publications (1)

Publication Number Publication Date
SG87933A1 true SG87933A1 (en) 2002-04-16

Family

ID=23608247

Family Applications (1)

Application Number Title Priority Date Filing Date
SG200103326A SG87933A1 (en) 2000-06-26 2001-06-04 Post metal etch photoresist strip method

Country Status (1)

Country Link
SG (1) SG87933A1 (en)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4732658A (en) * 1986-12-03 1988-03-22 Honeywell Inc. Planarization of silicon semiconductor devices
US5792672A (en) * 1996-03-20 1998-08-11 Chartered Semiconductor Manufacturing Ltd. Photoresist strip method
US5824604A (en) * 1996-01-23 1998-10-20 Mattson Technology, Inc. Hydrocarbon-enhanced dry stripping of photoresist

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4732658A (en) * 1986-12-03 1988-03-22 Honeywell Inc. Planarization of silicon semiconductor devices
US5824604A (en) * 1996-01-23 1998-10-20 Mattson Technology, Inc. Hydrocarbon-enhanced dry stripping of photoresist
US5792672A (en) * 1996-03-20 1998-08-11 Chartered Semiconductor Manufacturing Ltd. Photoresist strip method

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