SG87933A1 - Post metal etch photoresist strip method - Google Patents
Post metal etch photoresist strip methodInfo
- Publication number
- SG87933A1 SG87933A1 SG200103326A SG200103326A SG87933A1 SG 87933 A1 SG87933 A1 SG 87933A1 SG 200103326 A SG200103326 A SG 200103326A SG 200103326 A SG200103326 A SG 200103326A SG 87933 A1 SG87933 A1 SG 87933A1
- Authority
- SG
- Singapore
- Prior art keywords
- metal etch
- strip method
- photoresist strip
- post metal
- etch photoresist
- Prior art date
Links
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US40650000P | 2000-06-26 | 2000-06-26 |
Publications (1)
Publication Number | Publication Date |
---|---|
SG87933A1 true SG87933A1 (en) | 2002-04-16 |
Family
ID=23608247
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG200103326A SG87933A1 (en) | 2000-06-26 | 2001-06-04 | Post metal etch photoresist strip method |
Country Status (1)
Country | Link |
---|---|
SG (1) | SG87933A1 (en) |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4732658A (en) * | 1986-12-03 | 1988-03-22 | Honeywell Inc. | Planarization of silicon semiconductor devices |
US5792672A (en) * | 1996-03-20 | 1998-08-11 | Chartered Semiconductor Manufacturing Ltd. | Photoresist strip method |
US5824604A (en) * | 1996-01-23 | 1998-10-20 | Mattson Technology, Inc. | Hydrocarbon-enhanced dry stripping of photoresist |
-
2001
- 2001-06-04 SG SG200103326A patent/SG87933A1/en unknown
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4732658A (en) * | 1986-12-03 | 1988-03-22 | Honeywell Inc. | Planarization of silicon semiconductor devices |
US5824604A (en) * | 1996-01-23 | 1998-10-20 | Mattson Technology, Inc. | Hydrocarbon-enhanced dry stripping of photoresist |
US5792672A (en) * | 1996-03-20 | 1998-08-11 | Chartered Semiconductor Manufacturing Ltd. | Photoresist strip method |
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