SG82606A1 - A method to prevent dishing in chemical mechanical polishing - Google Patents

A method to prevent dishing in chemical mechanical polishing

Info

Publication number
SG82606A1
SG82606A1 SG9901594A SG1999001594A SG82606A1 SG 82606 A1 SG82606 A1 SG 82606A1 SG 9901594 A SG9901594 A SG 9901594A SG 1999001594 A SG1999001594 A SG 1999001594A SG 82606 A1 SG82606 A1 SG 82606A1
Authority
SG
Singapore
Prior art keywords
mechanical polishing
chemical mechanical
prevent dishing
dishing
prevent
Prior art date
Application number
SG9901594A
Inventor
Wong Harianto
Original Assignee
Chartered Semiconductor Mfg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US09/104,304 external-priority patent/US6076761A/en
Application filed by Chartered Semiconductor Mfg filed Critical Chartered Semiconductor Mfg
Publication of SG82606A1 publication Critical patent/SG82606A1/en

Links

SG9901594A 1998-06-24 1999-03-31 A method to prevent dishing in chemical mechanical polishing SG82606A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/104,304 US6076761A (en) 1997-06-24 1998-06-24 Apparatus for severing a paper web

Publications (1)

Publication Number Publication Date
SG82606A1 true SG82606A1 (en) 2001-08-21

Family

ID=22299773

Family Applications (1)

Application Number Title Priority Date Filing Date
SG9901594A SG82606A1 (en) 1998-06-24 1999-03-31 A method to prevent dishing in chemical mechanical polishing

Country Status (1)

Country Link
SG (1) SG82606A1 (en)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4957881A (en) * 1988-10-20 1990-09-18 Sgs-Thomson Microelectronics S.R.L. Formation of self-aligned contacts
US4962064A (en) * 1988-05-12 1990-10-09 Advanced Micro Devices, Inc. Method of planarization of topologies in integrated circuit structures
US5362669A (en) * 1993-06-24 1994-11-08 Northern Telecom Limited Method of making integrated circuits

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4962064A (en) * 1988-05-12 1990-10-09 Advanced Micro Devices, Inc. Method of planarization of topologies in integrated circuit structures
US4957881A (en) * 1988-10-20 1990-09-18 Sgs-Thomson Microelectronics S.R.L. Formation of self-aligned contacts
US5362669A (en) * 1993-06-24 1994-11-08 Northern Telecom Limited Method of making integrated circuits

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