SG67381A1 - Self-aligned unlanded via metallization - Google Patents

Self-aligned unlanded via metallization

Info

Publication number
SG67381A1
SG67381A1 SG1997000928A SG1997000928A SG67381A1 SG 67381 A1 SG67381 A1 SG 67381A1 SG 1997000928 A SG1997000928 A SG 1997000928A SG 1997000928 A SG1997000928 A SG 1997000928A SG 67381 A1 SG67381 A1 SG 67381A1
Authority
SG
Singapore
Prior art keywords
aligned
self
via metallization
unlanded via
unlanded
Prior art date
Application number
SG1997000928A
Inventor
Shih-Wei Sun
Original Assignee
United Microelectronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by United Microelectronics Corp filed Critical United Microelectronics Corp
Priority to SG1997000928A priority Critical patent/SG67381A1/en
Publication of SG67381A1 publication Critical patent/SG67381A1/en

Links

SG1997000928A 1997-03-25 1997-03-25 Self-aligned unlanded via metallization SG67381A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
SG1997000928A SG67381A1 (en) 1997-03-25 1997-03-25 Self-aligned unlanded via metallization

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SG1997000928A SG67381A1 (en) 1997-03-25 1997-03-25 Self-aligned unlanded via metallization

Publications (1)

Publication Number Publication Date
SG67381A1 true SG67381A1 (en) 1999-09-21

Family

ID=20429605

Family Applications (1)

Application Number Title Priority Date Filing Date
SG1997000928A SG67381A1 (en) 1997-03-25 1997-03-25 Self-aligned unlanded via metallization

Country Status (1)

Country Link
SG (1) SG67381A1 (en)

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