SG50723A1 - X-ray exposure apparatus - Google Patents

X-ray exposure apparatus

Info

Publication number
SG50723A1
SG50723A1 SG1996009700A SG1996009700A SG50723A1 SG 50723 A1 SG50723 A1 SG 50723A1 SG 1996009700 A SG1996009700 A SG 1996009700A SG 1996009700 A SG1996009700 A SG 1996009700A SG 50723 A1 SG50723 A1 SG 50723A1
Authority
SG
Singapore
Prior art keywords
exposure apparatus
ray exposure
ray
exposure
Prior art date
Application number
SG1996009700A
Inventor
Naota Abe
Ryuichi Ebinuma
Hasegawa Takayuki
Kazuyuki Kasumi
Original Assignee
Canon Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP03278373A external-priority patent/JP3135315B2/en
Priority claimed from JP28362791A external-priority patent/JP3441742B2/en
Priority claimed from JP03289171A external-priority patent/JP3138027B2/en
Priority claimed from JP3289274A external-priority patent/JPH05100094A/en
Priority claimed from JP03311836A external-priority patent/JP3143505B2/en
Application filed by Canon Kk filed Critical Canon Kk
Publication of SG50723A1 publication Critical patent/SG50723A1/en

Links

SG1996009700A 1991-09-30 1992-09-30 X-ray exposure apparatus SG50723A1 (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP03278373A JP3135315B2 (en) 1991-09-30 1991-09-30 SR-X-ray mirror positioning device
JP28362791A JP3441742B2 (en) 1991-10-03 1991-10-03 SR-X-ray mirror unit
JP03289171A JP3138027B2 (en) 1991-10-08 1991-10-08 SR-X-ray mirror positioning device
JP3289274A JPH05100094A (en) 1991-10-08 1991-10-08 Sr-x-ray mirror unit
JP03311836A JP3143505B2 (en) 1991-10-30 1991-10-30 X-ray exposure equipment

Publications (1)

Publication Number Publication Date
SG50723A1 true SG50723A1 (en) 1998-07-20

Family

ID=27530655

Family Applications (1)

Application Number Title Priority Date Filing Date
SG1996009700A SG50723A1 (en) 1991-09-30 1992-09-30 X-ray exposure apparatus

Country Status (1)

Country Link
SG (1) SG50723A1 (en)

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