SG35508A1 - Device for applying thin layers to a substrate - Google Patents

Device for applying thin layers to a substrate

Info

Publication number
SG35508A1
SG35508A1 SG1996006636A SG1996006636A SG35508A1 SG 35508 A1 SG35508 A1 SG 35508A1 SG 1996006636 A SG1996006636 A SG 1996006636A SG 1996006636 A SG1996006636 A SG 1996006636A SG 35508 A1 SG35508 A1 SG 35508A1
Authority
SG
Singapore
Prior art keywords
substrate
thin layers
applying thin
applying
layers
Prior art date
Application number
SG1996006636A
Inventor
Manfred Schuhmacher
Erwin Winter
Andreas Sauer
Dietmar Marquardt
Original Assignee
Leybold Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE19513691A external-priority patent/DE19513691A1/en
Application filed by Leybold Ag filed Critical Leybold Ag
Priority to SG1996006636A priority Critical patent/SG35508A1/en
Publication of SG35508A1 publication Critical patent/SG35508A1/en

Links

SG1996006636A 1995-04-11 1996-03-14 Device for applying thin layers to a substrate SG35508A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
SG1996006636A SG35508A1 (en) 1995-04-11 1996-03-14 Device for applying thin layers to a substrate

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19513691A DE19513691A1 (en) 1995-04-11 1995-04-11 Device for applying thin layers on a substrate
SG1996006636A SG35508A1 (en) 1995-04-11 1996-03-14 Device for applying thin layers to a substrate

Publications (1)

Publication Number Publication Date
SG35508A1 true SG35508A1 (en) 1997-02-01

Family

ID=26014329

Family Applications (1)

Application Number Title Priority Date Filing Date
SG1996006636A SG35508A1 (en) 1995-04-11 1996-03-14 Device for applying thin layers to a substrate

Country Status (1)

Country Link
SG (1) SG35508A1 (en)

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