SG33637A1 - Cylindrical magnetron shield structure - Google Patents

Cylindrical magnetron shield structure

Info

Publication number
SG33637A1
SG33637A1 SG1995002356A SG1995002356A SG33637A1 SG 33637 A1 SG33637 A1 SG 33637A1 SG 1995002356 A SG1995002356 A SG 1995002356A SG 1995002356 A SG1995002356 A SG 1995002356A SG 33637 A1 SG33637 A1 SG 33637A1
Authority
SG
Singapore
Prior art keywords
shield structure
cylindrical magnetron
magnetron shield
cylindrical
shield
Prior art date
Application number
SG1995002356A
Inventor
Peter A Siek
James G Rietzel
Norman E Allen
Original Assignee
Boc Group Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US08/376,859 external-priority patent/US5527439A/en
Application filed by Boc Group Inc filed Critical Boc Group Inc
Priority to SG1995002356A priority Critical patent/SG33637A1/en
Publication of SG33637A1 publication Critical patent/SG33637A1/en

Links

SG1995002356A 1995-01-23 1995-12-27 Cylindrical magnetron shield structure SG33637A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
SG1995002356A SG33637A1 (en) 1995-01-23 1995-12-27 Cylindrical magnetron shield structure

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/376,859 US5527439A (en) 1995-01-23 1995-01-23 Cylindrical magnetron shield structure
SG1995002356A SG33637A1 (en) 1995-01-23 1995-12-27 Cylindrical magnetron shield structure

Publications (1)

Publication Number Publication Date
SG33637A1 true SG33637A1 (en) 1996-10-18

Family

ID=26664962

Family Applications (1)

Application Number Title Priority Date Filing Date
SG1995002356A SG33637A1 (en) 1995-01-23 1995-12-27 Cylindrical magnetron shield structure

Country Status (1)

Country Link
SG (1) SG33637A1 (en)

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