SG32468A1 - Dual cylindrical target magnetron with multiple anodes - Google Patents

Dual cylindrical target magnetron with multiple anodes

Info

Publication number
SG32468A1
SG32468A1 SG1995001193A SG1995001193A SG32468A1 SG 32468 A1 SG32468 A1 SG 32468A1 SG 1995001193 A SG1995001193 A SG 1995001193A SG 1995001193 A SG1995001193 A SG 1995001193A SG 32468 A1 SG32468 A1 SG 32468A1
Authority
SG
Singapore
Prior art keywords
cylindrical target
multiple anodes
target magnetron
dual cylindrical
dual
Prior art date
Application number
SG1995001193A
Inventor
Peter A Sieck
Original Assignee
Boc Group Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Boc Group Inc filed Critical Boc Group Inc
Priority to SG1995001193A priority Critical patent/SG32468A1/en
Publication of SG32468A1 publication Critical patent/SG32468A1/en

Links

SG1995001193A 1994-09-06 1995-08-22 Dual cylindrical target magnetron with multiple anodes SG32468A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
SG1995001193A SG32468A1 (en) 1994-09-06 1995-08-22 Dual cylindrical target magnetron with multiple anodes

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US30111494A 1994-09-06 1994-09-06
SG1995001193A SG32468A1 (en) 1994-09-06 1995-08-22 Dual cylindrical target magnetron with multiple anodes

Publications (1)

Publication Number Publication Date
SG32468A1 true SG32468A1 (en) 1996-08-13

Family

ID=26664826

Family Applications (1)

Application Number Title Priority Date Filing Date
SG1995001193A SG32468A1 (en) 1994-09-06 1995-08-22 Dual cylindrical target magnetron with multiple anodes

Country Status (1)

Country Link
SG (1) SG32468A1 (en)

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