SG30447A1 - Fluorine doped silicon oxide process - Google Patents

Fluorine doped silicon oxide process

Info

Publication number
SG30447A1
SG30447A1 SG1995001716A SG1995001716A SG30447A1 SG 30447 A1 SG30447 A1 SG 30447A1 SG 1995001716 A SG1995001716 A SG 1995001716A SG 1995001716 A SG1995001716 A SG 1995001716A SG 30447 A1 SG30447 A1 SG 30447A1
Authority
SG
Singapore
Prior art keywords
silicon oxide
doped silicon
fluorine doped
oxide process
fluorine
Prior art date
Application number
SG1995001716A
Inventor
Ravi Kumar Laxman
Arthur Kenneth Hochberg
David Allen Roberts
Original Assignee
Air Prod & Chem
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US08/345,158 external-priority patent/US5492736A/en
Application filed by Air Prod & Chem filed Critical Air Prod & Chem
Priority to SG1995001716A priority Critical patent/SG30447A1/en
Publication of SG30447A1 publication Critical patent/SG30447A1/en

Links

SG1995001716A 1994-11-28 1995-11-03 Fluorine doped silicon oxide process SG30447A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
SG1995001716A SG30447A1 (en) 1994-11-28 1995-11-03 Fluorine doped silicon oxide process

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/345,158 US5492736A (en) 1994-11-28 1994-11-28 Fluorine doped silicon oxide process
SG1995001716A SG30447A1 (en) 1994-11-28 1995-11-03 Fluorine doped silicon oxide process

Publications (1)

Publication Number Publication Date
SG30447A1 true SG30447A1 (en) 1996-06-01

Family

ID=26664922

Family Applications (1)

Application Number Title Priority Date Filing Date
SG1995001716A SG30447A1 (en) 1994-11-28 1995-11-03 Fluorine doped silicon oxide process

Country Status (1)

Country Link
SG (1) SG30447A1 (en)

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