SG30321A1 - Heat treatment method and device - Google Patents

Heat treatment method and device

Info

Publication number
SG30321A1
SG30321A1 SG1995000159A SG1995000159A SG30321A1 SG 30321 A1 SG30321 A1 SG 30321A1 SG 1995000159 A SG1995000159 A SG 1995000159A SG 1995000159 A SG1995000159 A SG 1995000159A SG 30321 A1 SG30321 A1 SG 30321A1
Authority
SG
Singapore
Prior art keywords
heat treatment
treatment method
heat
treatment
Prior art date
Application number
SG1995000159A
Inventor
Hiroyuki Iwai
Hisashi Kikuchi
Keiji Takano
Ken Nakao
Shingo Watanabe
Tetsu Ohsawa
Tsutomu Haraoka
Original Assignee
Tokyo Electron Ltd
Tokyo Electron Tohoku Kabushik
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP8240094A external-priority patent/JP3273694B2/en
Application filed by Tokyo Electron Ltd, Tokyo Electron Tohoku Kabushik filed Critical Tokyo Electron Ltd
Priority to SG1995000159A priority Critical patent/SG30321A1/en
Publication of SG30321A1 publication Critical patent/SG30321A1/en

Links

SG1995000159A 1994-03-29 1995-03-24 Heat treatment method and device SG30321A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
SG1995000159A SG30321A1 (en) 1994-03-29 1995-03-24 Heat treatment method and device

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP8240094A JP3273694B2 (en) 1994-03-29 1994-03-29 Processing device and processing method
SG1995000159A SG30321A1 (en) 1994-03-29 1995-03-24 Heat treatment method and device

Publications (1)

Publication Number Publication Date
SG30321A1 true SG30321A1 (en) 1996-06-01

Family

ID=26423429

Family Applications (1)

Application Number Title Priority Date Filing Date
SG1995000159A SG30321A1 (en) 1994-03-29 1995-03-24 Heat treatment method and device

Country Status (1)

Country Link
SG (1) SG30321A1 (en)

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