SG2013062120A - A system and method for inspection - Google Patents
A system and method for inspectionInfo
- Publication number
- SG2013062120A SG2013062120A SG2013062120A SG2013062120A SG2013062120A SG 2013062120 A SG2013062120 A SG 2013062120A SG 2013062120 A SG2013062120 A SG 2013062120A SG 2013062120 A SG2013062120 A SG 2013062120A SG 2013062120 A SG2013062120 A SG 2013062120A
- Authority
- SG
- Singapore
- Prior art keywords
- inspection
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/9501—Semiconductor wafers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
Landscapes
- Chemical & Material Sciences (AREA)
- Biochemistry (AREA)
- Pathology (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Immunology (AREA)
- Analytical Chemistry (AREA)
- General Physics & Mathematics (AREA)
- General Health & Medical Sciences (AREA)
- Engineering & Computer Science (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Signal Processing (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SG2013062120A SG2013062120A (en) | 2013-08-14 | 2013-08-14 | A system and method for inspection |
PCT/SG2014/000381 WO2015023231A1 (en) | 2013-08-14 | 2014-08-13 | A system and method for inspection |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SG2013062120A SG2013062120A (en) | 2013-08-14 | 2013-08-14 | A system and method for inspection |
Publications (1)
Publication Number | Publication Date |
---|---|
SG2013062120A true SG2013062120A (en) | 2015-03-30 |
Family
ID=55167934
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG2013062120A SG2013062120A (en) | 2013-08-14 | 2013-08-14 | A system and method for inspection |
Country Status (2)
Country | Link |
---|---|
SG (1) | SG2013062120A (en) |
WO (1) | WO2015023231A1 (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN114153001B (en) * | 2021-12-30 | 2024-02-06 | 同方威视技术股份有限公司 | Inspection system and inspection method for inspecting frozen products in goods |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5172005A (en) * | 1991-02-20 | 1992-12-15 | Pressco Technology, Inc. | Engineered lighting system for tdi inspection comprising means for controlling lighting elements in accordance with specimen displacement |
US5909302A (en) * | 1996-08-02 | 1999-06-01 | Guissin; Rami | Staring scanner |
US6864498B2 (en) * | 2001-05-11 | 2005-03-08 | Orbotech Ltd. | Optical inspection system employing a staring array scanner |
-
2013
- 2013-08-14 SG SG2013062120A patent/SG2013062120A/en unknown
-
2014
- 2014-08-13 WO PCT/SG2014/000381 patent/WO2015023231A1/en active Application Filing
Also Published As
Publication number | Publication date |
---|---|
WO2015023231A1 (en) | 2015-02-19 |
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