SG169300A1 - Polishing body and related manufacturing method - Google Patents

Polishing body and related manufacturing method

Info

Publication number
SG169300A1
SG169300A1 SG201006154-7A SG2010061547A SG169300A1 SG 169300 A1 SG169300 A1 SG 169300A1 SG 2010061547 A SG2010061547 A SG 2010061547A SG 169300 A1 SG169300 A1 SG 169300A1
Authority
SG
Singapore
Prior art keywords
matrix resin
polishing
polishing body
related manufacturing
interconnected
Prior art date
Application number
SG201006154-7A
Inventor
Okuda Kazuhiro
Original Assignee
Noritake Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Noritake Co Ltd filed Critical Noritake Co Ltd
Publication of SG169300A1 publication Critical patent/SG169300A1/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/24—Lapping pads for working plane surfaces characterised by the composition or properties of the pad materials
    • B24B37/245—Pads with fixed abrasives

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Polishing Bodies And Polishing Tools (AREA)

Abstract

A polishing body formed in a circular disc, has a matrix resin and multiple polishing particles, for use in polishing work in CMP method, the matrix resin including a plurality of interconnected pores containing the polishing particles respectively, and a plurality of interconnected pores and the matrix resin with a cross sectional area of the large-size pore in one cross section greater than that of the interconnected pore.
SG201006154-7A 2009-08-25 2010-08-24 Polishing body and related manufacturing method SG169300A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009194753A JP5511266B2 (en) 2009-08-25 2009-08-25 Abrasive body manufacturing method

Publications (1)

Publication Number Publication Date
SG169300A1 true SG169300A1 (en) 2011-03-30

Family

ID=43571239

Family Applications (1)

Application Number Title Priority Date Filing Date
SG201006154-7A SG169300A1 (en) 2009-08-25 2010-08-24 Polishing body and related manufacturing method

Country Status (3)

Country Link
JP (1) JP5511266B2 (en)
DE (1) DE102010039714A1 (en)
SG (1) SG169300A1 (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11745303B2 (en) 2016-07-12 2023-09-05 Noritake Co., Limited Polishing body and manufacturing method therefor
JP6914216B2 (en) * 2018-02-21 2021-08-04 株式会社ノリタケカンパニーリミテド Polishing pad laminate
JP6976282B2 (en) * 2019-03-29 2021-12-08 株式会社ノリタケカンパニーリミテド Glass body polishing method and glass body polishing equipment
USD1029602S1 (en) 2022-01-04 2024-06-04 Noritake Co., Limited Polishing pad dresser
JPWO2023176315A1 (en) 2022-03-17 2023-09-21
WO2024195369A1 (en) * 2023-03-22 2024-09-26 ノリタケ株式会社 Polishing pad and method for manufacturing same

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002103234A (en) * 2000-09-28 2002-04-09 Jsr Corp Porous polishing body
JP2003311604A (en) * 2002-04-26 2003-11-05 Chiyoda Kk Polishing pad
JP4266579B2 (en) * 2002-06-28 2009-05-20 株式会社ノリタケカンパニーリミテド Polishing body and method for producing the same
JP2004358584A (en) * 2003-06-03 2004-12-24 Fuji Spinning Co Ltd Abrasive cloth and polishing method
JP2006116617A (en) * 2004-10-19 2006-05-11 Hitachi Maxell Ltd Stationary abrasive grain grinding and polishing tool, manufacturing method thereof, and polishing method for body to be polished using the stationary abrasive grain grinding and polishing tool

Also Published As

Publication number Publication date
JP5511266B2 (en) 2014-06-04
JP2011049256A (en) 2011-03-10
DE102010039714A1 (en) 2011-03-17

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