SG168403A1 - Sawjig clamper - Google Patents
Sawjig clamperInfo
- Publication number
- SG168403A1 SG168403A1 SG200401172-2A SG2004011722A SG168403A1 SG 168403 A1 SG168403 A1 SG 168403A1 SG 2004011722 A SG2004011722 A SG 2004011722A SG 168403 A1 SG168403 A1 SG 168403A1
- Authority
- SG
- Singapore
- Prior art keywords
- clamping
- substrate
- base plate
- sawjig
- clamper
- Prior art date
Links
Landscapes
- Sawing (AREA)
Abstract
A clamping assembly for relieving warpage of a substrate by clamping the substrate on a base plate is provided. A gripper loading the substrate onto the base plate is fitted with clamping releasing means operable to align with and release clamping means on the base plate. A system incorporating a plurality of said clamping assembly is also provided to improve sawing of an encapsulated substrate. Fig 3a-b
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SG200401172-2A SG168403A1 (en) | 2004-01-20 | 2004-01-20 | Sawjig clamper |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SG200401172-2A SG168403A1 (en) | 2004-01-20 | 2004-01-20 | Sawjig clamper |
Publications (1)
Publication Number | Publication Date |
---|---|
SG168403A1 true SG168403A1 (en) | 2011-02-28 |
Family
ID=43859910
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG200401172-2A SG168403A1 (en) | 2004-01-20 | 2004-01-20 | Sawjig clamper |
Country Status (1)
Country | Link |
---|---|
SG (1) | SG168403A1 (en) |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61100943A (en) * | 1984-10-24 | 1986-05-19 | Hitachi Ltd | Vacuum treatment equipment |
US5775000A (en) * | 1996-05-13 | 1998-07-07 | Ebara Corporation | Substrate gripper device for spin drying |
US6333858B1 (en) * | 1999-05-01 | 2001-12-25 | Mirae Corporation | Carrier module |
US6635516B1 (en) * | 1999-10-08 | 2003-10-21 | Nikon Corporation | Substrate dropping prevention mechanism and substrate inspection device provided therewith |
-
2004
- 2004-01-20 SG SG200401172-2A patent/SG168403A1/en unknown
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61100943A (en) * | 1984-10-24 | 1986-05-19 | Hitachi Ltd | Vacuum treatment equipment |
US5775000A (en) * | 1996-05-13 | 1998-07-07 | Ebara Corporation | Substrate gripper device for spin drying |
US6333858B1 (en) * | 1999-05-01 | 2001-12-25 | Mirae Corporation | Carrier module |
US6635516B1 (en) * | 1999-10-08 | 2003-10-21 | Nikon Corporation | Substrate dropping prevention mechanism and substrate inspection device provided therewith |
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