SG135026A1 - A nozzle source for thermal evaporation process - Google Patents

A nozzle source for thermal evaporation process

Info

Publication number
SG135026A1
SG135026A1 SG200401521-0A SG2004015210A SG135026A1 SG 135026 A1 SG135026 A1 SG 135026A1 SG 2004015210 A SG2004015210 A SG 2004015210A SG 135026 A1 SG135026 A1 SG 135026A1
Authority
SG
Singapore
Prior art keywords
thermal evaporation
evaporation process
nozzle source
nozzle
source
Prior art date
Application number
SG200401521-0A
Inventor
Kwang-Ho Jeong
Original Assignee
Yas Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to TW093105443A priority Critical patent/TWI256419B/en
Application filed by Yas Co Ltd filed Critical Yas Co Ltd
Priority to SG200401521-0A priority patent/SG135026A1/en
Publication of SG135026A1 publication Critical patent/SG135026A1/en

Links

SG200401521-0A 2002-11-18 2004-03-03 A nozzle source for thermal evaporation process SG135026A1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
TW093105443A TWI256419B (en) 2002-11-18 2004-03-02 A nozzle source for a thermal evaporation process
SG200401521-0A SG135026A1 (en) 2004-03-03 2004-03-03 A nozzle source for thermal evaporation process

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SG200401521-0A SG135026A1 (en) 2004-03-03 2004-03-03 A nozzle source for thermal evaporation process

Publications (1)

Publication Number Publication Date
SG135026A1 true SG135026A1 (en) 2007-09-28

Family

ID=38800862

Family Applications (1)

Application Number Title Priority Date Filing Date
SG200401521-0A SG135026A1 (en) 2002-11-18 2004-03-03 A nozzle source for thermal evaporation process

Country Status (1)

Country Link
SG (1) SG135026A1 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114075649A (en) * 2020-12-24 2022-02-22 广东聚华印刷显示技术有限公司 Crucible nozzle structure, crucible device, and evaporation device
CN115768916A (en) * 2020-06-29 2023-03-07 应用材料公司 Nozzle assembly, evaporation source and deposition system and method for depositing evaporated material onto a substrate

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2248852A (en) * 1990-10-16 1992-04-22 Secr Defence Vapour deposition
JPH0598425A (en) * 1991-10-04 1993-04-20 Mitsubishi Electric Corp Thin film forming device
RU2031187C1 (en) * 1991-06-06 1995-03-20 Индивидуальное частное предприятие "Электрон-Вега" Evaporator
JPH07232992A (en) * 1994-02-17 1995-09-05 Mitsubishi Electric Corp Film forming device, its vaporization source crucible and formation of thin film of sublimable vaporization material
KR20040043361A (en) * 2002-11-18 2004-05-24 주식회사 야스 Circular nozzle source for thermal evaporation process

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2248852A (en) * 1990-10-16 1992-04-22 Secr Defence Vapour deposition
RU2031187C1 (en) * 1991-06-06 1995-03-20 Индивидуальное частное предприятие "Электрон-Вега" Evaporator
JPH0598425A (en) * 1991-10-04 1993-04-20 Mitsubishi Electric Corp Thin film forming device
JPH07232992A (en) * 1994-02-17 1995-09-05 Mitsubishi Electric Corp Film forming device, its vaporization source crucible and formation of thin film of sublimable vaporization material
KR20040043361A (en) * 2002-11-18 2004-05-24 주식회사 야스 Circular nozzle source for thermal evaporation process

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115768916A (en) * 2020-06-29 2023-03-07 应用材料公司 Nozzle assembly, evaporation source and deposition system and method for depositing evaporated material onto a substrate
CN114075649A (en) * 2020-12-24 2022-02-22 广东聚华印刷显示技术有限公司 Crucible nozzle structure, crucible device, and evaporation device
CN114075649B (en) * 2020-12-24 2023-12-19 广东聚华印刷显示技术有限公司 Crucible nozzle structure, crucible device and evaporation device

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