SG125973A1 - Integrated mask - Google Patents

Integrated mask

Info

Publication number
SG125973A1
SG125973A1 SG200501482A SG200501482A SG125973A1 SG 125973 A1 SG125973 A1 SG 125973A1 SG 200501482 A SG200501482 A SG 200501482A SG 200501482 A SG200501482 A SG 200501482A SG 125973 A1 SG125973 A1 SG 125973A1
Authority
SG
Singapore
Prior art keywords
integrated mask
gap
pillar
substrate
wall surface
Prior art date
Application number
SG200501482A
Inventor
Zhaohong Huang
Guojun Qi
Xianting Zeng
Original Assignee
Agency Science Tech & Res
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency Science Tech & Res filed Critical Agency Science Tech & Res
Priority to SG200501482A priority Critical patent/SG125973A1/en
Priority to PCT/SG2006/000051 priority patent/WO2006096138A1/en
Publication of SG125973A1 publication Critical patent/SG125973A1/en

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10—Deposition of organic active material
    • H10K71/16—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
    • H10K71/166—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering using selective deposition, e.g. using a mask

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Electron Beam Exposure (AREA)
  • Pressure Sensors (AREA)
  • Electroluminescent Light Sources (AREA)

Abstract

An integrated mask structure for a substrate, the structure comprising a pillar structure formed on the substrate, and at least one gap structure extending along the pillar structure, wherein a portion of a wall surface of each gap structure is not in a line of sight from outside of the gap structure, said portion of the wall surface extending along the pillar structure.
SG200501482A 2005-03-09 2005-03-09 Integrated mask SG125973A1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
SG200501482A SG125973A1 (en) 2005-03-09 2005-03-09 Integrated mask
PCT/SG2006/000051 WO2006096138A1 (en) 2005-03-09 2006-03-09 Integrated mask

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SG200501482A SG125973A1 (en) 2005-03-09 2005-03-09 Integrated mask

Publications (1)

Publication Number Publication Date
SG125973A1 true SG125973A1 (en) 2006-10-30

Family

ID=36953657

Family Applications (1)

Application Number Title Priority Date Filing Date
SG200501482A SG125973A1 (en) 2005-03-09 2005-03-09 Integrated mask

Country Status (2)

Country Link
SG (1) SG125973A1 (en)
WO (1) WO2006096138A1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108962953B (en) * 2018-07-20 2020-11-27 武汉华星光电半导体显示技术有限公司 OLED display panel and OLED display

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6596598B1 (en) * 2000-02-23 2003-07-22 Advanced Micro Devices, Inc. T-shaped gate device and method for making
TW461228B (en) * 2000-04-26 2001-10-21 Ritdisplay Corp Method to manufacture the non-photosensitive polyimide pixel definition layer of organic electro-luminescent display panel
US6407408B1 (en) * 2001-03-12 2002-06-18 Universal Display Corporation Method for patterning devices
US6824278B2 (en) * 2002-03-15 2004-11-30 Memx, Inc. Self-shadowing MEM structures

Also Published As

Publication number Publication date
WO2006096138A1 (en) 2006-09-14

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