SG122781A1 - A method for making auto-self-aligned top electrodes for dram capacitors with improved capacitor-to-bit-line contact overlay margin - Google Patents

A method for making auto-self-aligned top electrodes for dram capacitors with improved capacitor-to-bit-line contact overlay margin

Info

Publication number
SG122781A1
SG122781A1 SG200300548A SG200300548A SG122781A1 SG 122781 A1 SG122781 A1 SG 122781A1 SG 200300548 A SG200300548 A SG 200300548A SG 200300548 A SG200300548 A SG 200300548A SG 122781 A1 SG122781 A1 SG 122781A1
Authority
SG
Singapore
Prior art keywords
bit
self
line contact
top electrodes
overlay margin
Prior art date
Application number
SG200300548A
Inventor
Kuo-Chi Tu
Original Assignee
Taiwan Semiconductor Mfg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from TW91102574A external-priority patent/TW521400B/en
Priority claimed from US10/146,450 external-priority patent/US6709919B2/en
Application filed by Taiwan Semiconductor Mfg filed Critical Taiwan Semiconductor Mfg
Publication of SG122781A1 publication Critical patent/SG122781A1/en

Links

SG200300548A 2002-02-15 2003-02-13 A method for making auto-self-aligned top electrodes for dram capacitors with improved capacitor-to-bit-line contact overlay margin SG122781A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
TW91102574A TW521400B (en) 2002-02-15 2002-02-15 Method for producing DRAM capacitor
US10/146,450 US6709919B2 (en) 2002-05-15 2002-05-15 Method for making auto-self-aligned top electrodes for DRAM capacitors with improved capacitor-to-bit-line-contact overlay margin

Publications (1)

Publication Number Publication Date
SG122781A1 true SG122781A1 (en) 2006-06-29

Family

ID=37909576

Family Applications (1)

Application Number Title Priority Date Filing Date
SG200300548A SG122781A1 (en) 2002-02-15 2003-02-13 A method for making auto-self-aligned top electrodes for dram capacitors with improved capacitor-to-bit-line contact overlay margin

Country Status (1)

Country Link
SG (1) SG122781A1 (en)

Similar Documents

Publication Publication Date Title
SG102698A1 (en) A method for an advanced mim capacitor
EP1526114A4 (en) Activated carbon, method for production thereof, polarized electrode and electrical double layer capacitor
EP1187153A4 (en) Polarizable electrode for electric double-layer capacitor
GB2349015B (en) A dram cell capacitor
EP1211702A4 (en) Activated carbon for electric double layer capacitor
AU2003238003A8 (en) Processes for making ethanol
EP1833065A4 (en) Polarizable electrode member, process for producing the same, and electrochemical capacitor utilizing the member
AU2003301909A8 (en) Active carbon, production method thereof and polarizable electrode
AU2003289764A1 (en) Method for forming a dielectric stack
AU2003269886A8 (en) Method of forming a raised contact for a substrate
TW200701405A (en) Dram having carbon stack capacitor
GB2336031B (en) A method for fabricating a dram cell capacitor
AU2003238857A8 (en) Electrochemical double layer capacitor having carbon powder electrodes
EP1229597A3 (en) Process for manufacturing electrode foils
GB2336033B (en) A method of fabricating a dram cell capacitor
AU2003289115A1 (en) Polarizable electrode for electric double layer capacitor, method for manufacturing same and electric double layer capacitor
EP1683168A4 (en) Solid electrolyte capacitor
GB2336942B (en) Method for fabricating a dram cell capacitor
AU2001277732A1 (en) Method for manufacturing tantalum sintered object for electrolytic capacitor
EP1580773A4 (en) Electrolytic capacitor
EP1699062A4 (en) Electrochemical capacitor, method for manufacturing electrode for electrochemical capacitor, and apparatus for manufacturing electrode for electrochemical capacitor
SG111176A1 (en) Method for forming a mim capacitor
PT1470292E (en) Process for manufacturing paper
AU2003280836A8 (en) Solid electrolytic capacitor
HK1073890A1 (en) Method for manufacturing a pdlc-device pdlc