SG114893G - Negative photoresist compositions and processes for preparing thermally stable, negative images using them - Google Patents

Negative photoresist compositions and processes for preparing thermally stable, negative images using them

Info

Publication number
SG114893G
SG114893G SG114893A SG114893A SG114893G SG 114893 G SG114893 G SG 114893G SG 114893 A SG114893 A SG 114893A SG 114893 A SG114893 A SG 114893A SG 114893 G SG114893 G SG 114893G
Authority
SG
Singapore
Prior art keywords
negative
processes
thermally stable
photoresist compositions
preparing thermally
Prior art date
Application number
SG114893A
Inventor
Wayne E Feely
Original Assignee
Rohm & Haas
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rohm & Haas filed Critical Rohm & Haas
Priority to SG114893A priority Critical patent/SG114893G/en
Publication of SG114893G publication Critical patent/SG114893G/en

Links

SG114893A 1986-01-13 1993-10-18 Negative photoresist compositions and processes for preparing thermally stable, negative images using them SG114893G (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
SG114893A SG114893G (en) 1986-01-13 1993-10-18 Negative photoresist compositions and processes for preparing thermally stable, negative images using them

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US81843086A 1986-01-13 1986-01-13
SG114893A SG114893G (en) 1986-01-13 1993-10-18 Negative photoresist compositions and processes for preparing thermally stable, negative images using them

Publications (1)

Publication Number Publication Date
SG114893G true SG114893G (en) 1994-06-10

Family

ID=26664198

Family Applications (1)

Application Number Title Priority Date Filing Date
SG114893A SG114893G (en) 1986-01-13 1993-10-18 Negative photoresist compositions and processes for preparing thermally stable, negative images using them

Country Status (1)

Country Link
SG (1) SG114893G (en)

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