SG113894G - Method of fabricating a flat wafer - Google Patents

Method of fabricating a flat wafer

Info

Publication number
SG113894G
SG113894G SG113894A SG113894A SG113894G SG 113894 G SG113894 G SG 113894G SG 113894 A SG113894 A SG 113894A SG 113894 A SG113894 A SG 113894A SG 113894 G SG113894 G SG 113894G
Authority
SG
Singapore
Prior art keywords
fabricating
flat wafer
wafer
flat
Prior art date
Application number
SG113894A
Inventor
Jeffrey T Koze
Anton Johann Miller
Original Assignee
At & T Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US07/290,653 external-priority patent/US4874463A/en
Application filed by At & T Corp filed Critical At & T Corp
Priority to SG113894A priority Critical patent/SG113894G/en
Publication of SG113894G publication Critical patent/SG113894G/en

Links

SG113894A 1988-12-23 1994-08-13 Method of fabricating a flat wafer SG113894G (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
SG113894A SG113894G (en) 1988-12-23 1994-08-13 Method of fabricating a flat wafer

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US07/290,653 US4874463A (en) 1988-12-23 1988-12-23 Integrated circuits from wafers having improved flatness
SG113894A SG113894G (en) 1988-12-23 1994-08-13 Method of fabricating a flat wafer

Publications (1)

Publication Number Publication Date
SG113894G true SG113894G (en) 1994-11-25

Family

ID=26664188

Family Applications (1)

Application Number Title Priority Date Filing Date
SG113894A SG113894G (en) 1988-12-23 1994-08-13 Method of fabricating a flat wafer

Country Status (1)

Country Link
SG (1) SG113894G (en)

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