SG112822A1 - Method and apparatus for selective removal of material - Google Patents

Method and apparatus for selective removal of material

Info

Publication number
SG112822A1
SG112822A1 SG200200661A SG200200661A SG112822A1 SG 112822 A1 SG112822 A1 SG 112822A1 SG 200200661 A SG200200661 A SG 200200661A SG 200200661 A SG200200661 A SG 200200661A SG 112822 A1 SG112822 A1 SG 112822A1
Authority
SG
Singapore
Prior art keywords
selective removal
selective
removal
Prior art date
Application number
SG200200661A
Inventor
Qiong Chen
Emmanuel P Alvarez Romeo
Hong Qui
Xincai Wang
Gnian Cher Lim
Hongyu Zheng
Original Assignee
Advanced Systems Automation
Advanpack Solutions Pte Ltd
Gintic Inst Of Mfg Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advanced Systems Automation, Advanpack Solutions Pte Ltd, Gintic Inst Of Mfg Technology filed Critical Advanced Systems Automation
Priority to SG200200661A priority Critical patent/SG112822A1/en
Publication of SG112822A1 publication Critical patent/SG112822A1/en

Links

SG200200661A 2002-02-04 2002-02-04 Method and apparatus for selective removal of material SG112822A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
SG200200661A SG112822A1 (en) 2002-02-04 2002-02-04 Method and apparatus for selective removal of material

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SG200200661A SG112822A1 (en) 2002-02-04 2002-02-04 Method and apparatus for selective removal of material

Publications (1)

Publication Number Publication Date
SG112822A1 true SG112822A1 (en) 2005-07-28

Family

ID=34882386

Family Applications (1)

Application Number Title Priority Date Filing Date
SG200200661A SG112822A1 (en) 2002-02-04 2002-02-04 Method and apparatus for selective removal of material

Country Status (1)

Country Link
SG (1) SG112822A1 (en)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5114834A (en) * 1987-10-23 1992-05-19 Yehuda Nachshon Photoresist removal
JPH079182A (en) * 1993-06-29 1995-01-13 Sumitomo Heavy Ind Ltd Method and device for laser beam machining
WO1995007152A1 (en) * 1993-09-08 1995-03-16 Uvtech Systems, Inc. Surface processing
US5403627A (en) * 1993-06-04 1995-04-04 Xerox Corporation Process and apparatus for treating a photoreceptor coating
US5643472A (en) * 1988-07-08 1997-07-01 Cauldron Limited Partnership Selective removal of material by irradiation

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5114834A (en) * 1987-10-23 1992-05-19 Yehuda Nachshon Photoresist removal
US5643472A (en) * 1988-07-08 1997-07-01 Cauldron Limited Partnership Selective removal of material by irradiation
US5403627A (en) * 1993-06-04 1995-04-04 Xerox Corporation Process and apparatus for treating a photoreceptor coating
JPH079182A (en) * 1993-06-29 1995-01-13 Sumitomo Heavy Ind Ltd Method and device for laser beam machining
WO1995007152A1 (en) * 1993-09-08 1995-03-16 Uvtech Systems, Inc. Surface processing

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