Classifications

• • C—CHEMISTRY; METALLURGY
  • C07—ORGANIC CHEMISTRY
  • C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
  • C07C17/00—Preparation of halogenated hydrocarbons
  • C07C17/35—Preparation of halogenated hydrocarbons by reactions not affecting the number of carbon or of halogen atoms in the reaction
• • C—CHEMISTRY; METALLURGY
  • C07—ORGANIC CHEMISTRY
  • C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
  • C07C23/00—Compounds containing at least one halogen atom bound to a ring other than a six-membered aromatic ring
  • C07C23/02—Monocyclic halogenated hydrocarbons
  • C07C23/06—Monocyclic halogenated hydrocarbons with a four-membered ring
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
  • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
  • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
  • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
  • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
  • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
  • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
  • H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
  • H01L21/3065—Plasma etching; Reactive-ion etching
• • C—CHEMISTRY; METALLURGY
  • C07—ORGANIC CHEMISTRY
  • C07B—GENERAL METHODS OF ORGANIC CHEMISTRY; APPARATUS THEREFOR
  • C07B61/00—Other general methods

Applications Claiming Priority (2)

Publications (1)

Family

ID=70164534

Family Applications (1)

Country Status (7)

Families Citing this family (1)

Family Cites Families (4)

• 2018
  • 2018-10-09 JP JP2018190994A patent/JP6753443B2/en active Active
• 2019
  • 2019-10-08 RU RU2021137864A patent/RU2021137864A/en unknown
  • 2019-10-08 CN CN201980066353.2A patent/CN112912360A/en active Pending
  • 2019-10-08 KR KR1020217011885A patent/KR20210063381A/en not_active Application Discontinuation
  • 2019-10-08 WO PCT/JP2019/039726 patent/WO2020075729A1/en active Application Filing
  • 2019-10-08 SG SG11202103673UA patent/SG11202103673UA/en unknown
  • 2019-10-09 TW TW108136677A patent/TWI791907B/en active

Also Published As

Similar Documents