SG11202102387SA - Cleaning liquid composition - Google Patents
Cleaning liquid compositionInfo
- Publication number
- SG11202102387SA SG11202102387SA SG11202102387SA SG11202102387SA SG11202102387SA SG 11202102387S A SG11202102387S A SG 11202102387SA SG 11202102387S A SG11202102387S A SG 11202102387SA SG 11202102387S A SG11202102387S A SG 11202102387SA SG 11202102387S A SG11202102387S A SG 11202102387SA
- Authority
- SG
- Singapore
- Prior art keywords
- cleaning liquid
- liquid composition
- composition
- cleaning
- liquid
- Prior art date
Links
- 238000004140 cleaning Methods 0.000 title 1
- 239000007788 liquid Substances 0.000 title 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
- C11D3/16—Organic compounds
- C11D3/20—Organic compounds containing oxygen
- C11D3/2096—Heterocyclic compounds
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D1/00—Detergent compositions based essentially on surface-active compounds; Use of these compounds as a detergent
- C11D1/02—Anionic compounds
- C11D1/12—Sulfonic acids or sulfuric acid esters; Salts thereof
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D1/00—Detergent compositions based essentially on surface-active compounds; Use of these compounds as a detergent
- C11D1/02—Anionic compounds
- C11D1/12—Sulfonic acids or sulfuric acid esters; Salts thereof
- C11D1/16—Sulfonic acids or sulfuric acid esters; Salts thereof derived from divalent or polyvalent alcohols
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D17/00—Detergent materials or soaps characterised by their shape or physical properties
- C11D17/08—Liquid soap, e.g. for dispensers; capsuled
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
- C11D3/0005—Other compounding ingredients characterised by their effect
- C11D3/0042—Reducing agents
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
- C11D3/16—Organic compounds
- C11D3/37—Polymers
- C11D3/3746—Macromolecular compounds obtained by reactions only involving carbon-to-carbon unsaturated bonds
- C11D3/378—(Co)polymerised monomers containing sulfur, e.g. sulfonate
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
- C11D7/02—Inorganic compounds
- C11D7/04—Water-soluble compounds
- C11D7/08—Acids
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
- C11D7/22—Organic compounds
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
- C11D7/22—Organic compounds
- C11D7/26—Organic compounds containing oxygen
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
- C11D7/22—Organic compounds
- C11D7/26—Organic compounds containing oxygen
- C11D7/261—Alcohols; Phenols
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
- C11D7/22—Organic compounds
- C11D7/26—Organic compounds containing oxygen
- C11D7/265—Carboxylic acids or salts thereof
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
- C11D7/22—Organic compounds
- C11D7/26—Organic compounds containing oxygen
- C11D7/266—Esters or carbonates
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
- C11D7/22—Organic compounds
- C11D7/26—Organic compounds containing oxygen
- C11D7/267—Heterocyclic compounds
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
- C11D7/22—Organic compounds
- C11D7/32—Organic compounds containing nitrogen
- C11D7/3209—Amines or imines with one to four nitrogen atoms; Quaternized amines
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
- C11D7/50—Solvents
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02041—Cleaning
- H01L21/02057—Cleaning during device manufacture
- H01L21/02068—Cleaning during device manufacture during, before or after processing of conductive layers, e.g. polysilicon or amorphous silicon layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02041—Cleaning
- H01L21/02057—Cleaning during device manufacture
- H01L21/02068—Cleaning during device manufacture during, before or after processing of conductive layers, e.g. polysilicon or amorphous silicon layers
- H01L21/02074—Cleaning during device manufacture during, before or after processing of conductive layers, e.g. polysilicon or amorphous silicon layers the processing being a planarization of conductive layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D2111/00—Cleaning compositions characterised by the objects to be cleaned; Cleaning compositions characterised by non-standard cleaning or washing processes
- C11D2111/10—Objects to be cleaned
- C11D2111/14—Hard surfaces
- C11D2111/22—Electronic devices, e.g. PCBs or semiconductors
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Life Sciences & Earth Sciences (AREA)
- Organic Chemistry (AREA)
- Wood Science & Technology (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Emergency Medicine (AREA)
- Health & Medical Sciences (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Physics & Mathematics (AREA)
- Inorganic Chemistry (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Detergent Compositions (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018176376A JP7220040B2 (en) | 2018-09-20 | 2018-09-20 | cleaning liquid composition |
PCT/JP2019/036709 WO2020059782A1 (en) | 2018-09-20 | 2019-09-19 | Cleaning liquid composition |
Publications (1)
Publication Number | Publication Date |
---|---|
SG11202102387SA true SG11202102387SA (en) | 2021-04-29 |
Family
ID=69888504
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG11202102387SA SG11202102387SA (en) | 2018-09-20 | 2019-09-19 | Cleaning liquid composition |
Country Status (8)
Country | Link |
---|---|
US (1) | US11905490B2 (en) |
EP (1) | EP3854865A4 (en) |
JP (1) | JP7220040B2 (en) |
KR (1) | KR20210060454A (en) |
CN (1) | CN112639068A (en) |
SG (1) | SG11202102387SA (en) |
TW (1) | TWI832902B (en) |
WO (1) | WO2020059782A1 (en) |
Family Cites Families (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005101479A (en) * | 2002-11-08 | 2005-04-14 | Sumitomo Chemical Co Ltd | Cleaning liquid for semiconductor substrate |
TW200413522A (en) | 2002-11-08 | 2004-08-01 | Sumitomo Chemical Co | Washing liquid for semiconductor substrate |
KR101102800B1 (en) * | 2004-08-31 | 2012-01-05 | 산요가세이고교 가부시키가이샤 | Surfactant |
US7922823B2 (en) | 2005-01-27 | 2011-04-12 | Advanced Technology Materials, Inc. | Compositions for processing of semiconductor substrates |
WO2006127885A1 (en) | 2005-05-26 | 2006-11-30 | Advanced Technology Materials, Inc. | Copper passivating post-chemical mechanical polishing cleaning composition and method of use |
TWI450052B (en) | 2008-06-24 | 2014-08-21 | Dynaloy Llc | Stripper solutions effective for back-end-of-line operations |
US8765653B2 (en) | 2009-07-07 | 2014-07-01 | Air Products And Chemicals, Inc. | Formulations and method for post-CMP cleaning |
EP2828371A4 (en) | 2012-03-18 | 2015-10-14 | Entegris Inc | Post-cmp formulation having improved barrier layer compatibility and cleaning performance |
TW201404877A (en) | 2012-05-18 | 2014-02-01 | Advanced Tech Materials | Aqueous clean solution with low copper etch rate for organic residue removal improvement |
JP6203525B2 (en) | 2013-04-19 | 2017-09-27 | 関東化學株式会社 | Cleaning liquid composition |
KR102256773B1 (en) * | 2013-11-08 | 2021-05-27 | 후지 필름 일렉트로닉 머트리얼즈 가부시키가이샤 | Cleaning agent for semiconductor substrates and method for processing semiconductor substrate surface |
JP2015165562A (en) * | 2014-02-06 | 2015-09-17 | 三菱化学株式会社 | Substrate cleaning liquid for semiconductor devices and method for cleaning substrate for semiconductor devices |
JP6488740B2 (en) * | 2014-02-06 | 2019-03-27 | 三菱ケミカル株式会社 | Substrate cleaning liquid for semiconductor device and method for cleaning semiconductor device |
JP2017005050A (en) | 2015-06-08 | 2017-01-05 | 信越化学工業株式会社 | Polishing composition and method for producing the same, and polishing method |
JP6112329B1 (en) * | 2016-05-10 | 2017-04-12 | Jsr株式会社 | Semiconductor cleaning composition and cleaning method |
JP2018026461A (en) | 2016-08-10 | 2018-02-15 | 株式会社荏原製作所 | Substrate cleaning technique after chemical mechanical polishing |
JP6689991B2 (en) * | 2016-08-31 | 2020-04-28 | 富士フイルム株式会社 | Treatment liquid, substrate cleaning method, and semiconductor device manufacturing method |
JP6847657B2 (en) * | 2016-12-28 | 2021-03-24 | 花王株式会社 | Cleaning agent composition for substrates for semiconductor devices |
WO2018169016A1 (en) * | 2017-03-17 | 2018-09-20 | 三菱ケミカル株式会社 | Cleaning agent composition for substrate for semiconductor devices, method for cleaning substrate for semiconductor devices, method for producing substrate for semiconductor devices, and substrate for semiconductor devices |
-
2018
- 2018-09-20 JP JP2018176376A patent/JP7220040B2/en active Active
-
2019
- 2019-09-19 CN CN201980054513.1A patent/CN112639068A/en active Pending
- 2019-09-19 WO PCT/JP2019/036709 patent/WO2020059782A1/en unknown
- 2019-09-19 EP EP19861841.5A patent/EP3854865A4/en not_active Withdrawn
- 2019-09-19 SG SG11202102387SA patent/SG11202102387SA/en unknown
- 2019-09-19 KR KR1020217006692A patent/KR20210060454A/en unknown
- 2019-09-19 US US17/275,629 patent/US11905490B2/en active Active
- 2019-09-20 TW TW108133961A patent/TWI832902B/en active
Also Published As
Publication number | Publication date |
---|---|
US20220033744A1 (en) | 2022-02-03 |
TW202034394A (en) | 2020-09-16 |
JP2020045453A (en) | 2020-03-26 |
KR20210060454A (en) | 2021-05-26 |
JP7220040B2 (en) | 2023-02-09 |
TWI832902B (en) | 2024-02-21 |
EP3854865A4 (en) | 2022-05-25 |
WO2020059782A1 (en) | 2020-03-26 |
US11905490B2 (en) | 2024-02-20 |
CN112639068A (en) | 2021-04-09 |
EP3854865A1 (en) | 2021-07-28 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
SG11202009247YA (en) | Liquid detergent composition | |
ZA202100956B (en) | Detergent composition | |
IL276372A (en) | Wipe dispensing | |
EP3605590A4 (en) | Cleaning solution composition | |
IL272498A (en) | Cleaning compositions | |
GB201819374D0 (en) | Cleaning liquid | |
ZA202100927B (en) | Detergent composition | |
ZA201906728B (en) | Liquid personal cleansing composition | |
ZA202100821B (en) | Foamable cleaning composition | |
ZA202101184B (en) | Detergent composition | |
EP3409616C0 (en) | Wiper kit for cleaning | |
ZA201703292B (en) | Liquid cleaning composition | |
PL3502222T3 (en) | Liquid hand dishwashing detergent composition | |
IL277275A (en) | Cleaning compositions | |
SG11202105592XA (en) | Botulinum toxin-stabilizing liquid composition | |
GB2579876B (en) | Laundry liquid composition | |
SG11201913843WA (en) | Liquid detergent composition for hard surfaces | |
ZA202101463B (en) | Wipe | |
GB202009385D0 (en) | Cleaning liquid | |
SG11202012307VA (en) | Resin composition for cleaning use | |
PT3517010T (en) | Cleaning unit | |
EP3564985A4 (en) | Cleaning liquid composition | |
ZA201902304B (en) | Liquid detergent composition | |
GB201804504D0 (en) | Personal cleaning composition | |
GB201704127D0 (en) | Cleaning composition |