SG11202100316UA - Chromatic confocal area sensor - Google Patents
Chromatic confocal area sensorInfo
- Publication number
- SG11202100316UA SG11202100316UA SG11202100316UA SG11202100316UA SG11202100316UA SG 11202100316U A SG11202100316U A SG 11202100316UA SG 11202100316U A SG11202100316U A SG 11202100316UA SG 11202100316U A SG11202100316U A SG 11202100316UA SG 11202100316U A SG11202100316U A SG 11202100316UA
- Authority
- SG
- Singapore
- Prior art keywords
- area sensor
- chromatic confocal
- confocal area
- chromatic
- sensor
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/026—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring distance between sensor and object
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/28—Measuring arrangements characterised by the use of optical techniques for measuring areas
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/04—Measuring microscopes
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/0004—Microscopes specially adapted for specific applications
- G02B21/002—Scanning microscopes
- G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
- G02B21/0052—Optical details of the image generation
- G02B21/0064—Optical details of the image generation multi-spectral or wavelength-selective arrangements, e.g. wavelength fan-out, chromatic profiling
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/0025—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for optical correction, e.g. distorsion, aberration
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B2210/00—Aspects not specifically covered by any group under G01B, e.g. of wheel alignment, caliper-like sensors
- G01B2210/50—Using chromatic effects to achieve wavelength-dependent depth resolution
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B2210/00—Aspects not specifically covered by any group under G01B, e.g. of wheel alignment, caliper-like sensors
- G01B2210/56—Measuring geometric parameters of semiconductor structures, e.g. profile, critical dimensions or trench depth
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201862702894P | 2018-07-24 | 2018-07-24 | |
| US16/513,091 US10866092B2 (en) | 2018-07-24 | 2019-07-16 | Chromatic confocal area sensor |
| PCT/US2019/042897 WO2020023427A1 (en) | 2018-07-24 | 2019-07-23 | Chromatic confocal area sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| SG11202100316UA true SG11202100316UA (en) | 2021-02-25 |
Family
ID=69177890
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SG11202100316UA SG11202100316UA (en) | 2018-07-24 | 2019-07-23 | Chromatic confocal area sensor |
Country Status (9)
| Country | Link |
|---|---|
| US (1) | US10866092B2 (en) |
| EP (1) | EP3807591A4 (en) |
| JP (1) | JP7232895B2 (en) |
| KR (2) | KR20210024675A (en) |
| CN (1) | CN112469961B (en) |
| PH (1) | PH12021550169A1 (en) |
| SG (1) | SG11202100316UA (en) |
| TW (1) | TWI821338B (en) |
| WO (1) | WO2020023427A1 (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111487038B (en) * | 2020-04-23 | 2022-04-08 | 华侨大学 | Integrated micro-dispersion lens array panel and parallel chromatic confocal measurement system |
| CN112648926B (en) * | 2021-01-13 | 2023-03-28 | 宁波五维检测科技有限公司 | Line-focusing color confocal three-dimensional surface height measuring device and method |
| KR102562630B1 (en) * | 2021-04-13 | 2023-08-02 | 조선대학교산학협력단 | Apparatus of vision chromatic confocal sensor based on a geometrical phase lens |
| DE102022207032A1 (en) | 2022-07-11 | 2024-01-11 | Micro-Epsilon Optronic Gmbh | Device, device and method for confocal-chromatic distance and/or thickness measurement |
| US20240090110A1 (en) * | 2022-09-14 | 2024-03-14 | Kla Corporation | Confocal Chromatic Metrology for EUV Source Condition Monitoring |
Family Cites Families (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0526635A (en) * | 1991-07-25 | 1993-02-02 | Sumitomo Cement Co Ltd | Confocal laser scanning microscope for cross section observation |
| US5248876A (en) | 1992-04-21 | 1993-09-28 | International Business Machines Corporation | Tandem linear scanning confocal imaging system with focal volumes at different heights |
| CA2341359A1 (en) * | 1998-08-21 | 2000-03-02 | Ian Walton | Novel optical architectures for microvolume laser-scanning cytometers |
| US20060012872A1 (en) * | 2002-09-30 | 2006-01-19 | Terutake Hayashi | Confocal microscope, fluorescence measuring method and polarized light measuring method using cofocal microscope |
| JP2005221451A (en) * | 2004-02-09 | 2005-08-18 | Mitsutoyo Corp | Laser displacement gauge |
| JP2006133499A (en) | 2004-11-05 | 2006-05-25 | Shimadzu Corp | Confocal scanner and confocal microscope |
| TWI439684B (en) * | 2005-07-06 | 2014-06-01 | Nanometrics Inc | Photoluminescence imaging with preferential detection of photoluminescence signals emitted from a specified material layer of a wafer or other workpiece |
| DE102005043627B4 (en) * | 2005-09-13 | 2012-06-14 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Optical sensor and method for optical distance and / or color measurement |
| CN101821659B (en) | 2007-10-11 | 2014-09-24 | 3M创新有限公司 | Chromatic confocal sensor |
| CZ2009133A3 (en) * | 2009-03-03 | 2009-07-08 | Witrins S.R.O. | Measuring device and method for measuring outer dimensions of tested product and use of this device |
| TWI490444B (en) * | 2009-01-23 | 2015-07-01 | Univ Nat Taipei Technology | Slit-scan microscopic system and method using the same |
| DE102012009836A1 (en) * | 2012-05-16 | 2013-11-21 | Carl Zeiss Microscopy Gmbh | Light microscope and method for image acquisition with a light microscope |
| US10007109B2 (en) * | 2013-06-20 | 2018-06-26 | The University Of North Carolina At Charlotte | Wavelength discriminating imaging systems and methods |
| DE102013016368A1 (en) | 2013-09-30 | 2015-04-02 | Carl Zeiss Microscopy Gmbh | Light microscope and microscopy method for examining a microscopic sample |
| EP3146291A2 (en) * | 2014-05-18 | 2017-03-29 | ADOM Advanced Optical Technologies Ltd. | System for tomography and/or topography measurements of a layered object |
| JP6503221B2 (en) * | 2015-05-13 | 2019-04-17 | オリンパス株式会社 | Three-dimensional information acquisition apparatus and three-dimensional information acquisition method |
| US10495446B2 (en) * | 2015-06-29 | 2019-12-03 | Kla-Tencor Corporation | Methods and apparatus for measuring height on a semiconductor wafer |
| DE102016000415A1 (en) | 2016-01-19 | 2017-07-20 | DüRR DENTAL AG | Device for the three-dimensional detection of a surface structure |
| EP3222965B1 (en) * | 2016-03-25 | 2020-01-15 | Fogale Nanotech | Chromatic confocal device and method for 2d/3d inspection of an object such as a wafer with variable spatial resolution |
| US20190101489A1 (en) * | 2017-09-29 | 2019-04-04 | Michael John Darwin | Method and Apparatus for Simultaneously Measuring 3Dimensional Structures and Spectral Content of Said Structures |
-
2019
- 2019-07-16 US US16/513,091 patent/US10866092B2/en active Active
- 2019-07-23 WO PCT/US2019/042897 patent/WO2020023427A1/en unknown
- 2019-07-23 KR KR1020217005472A patent/KR20210024675A/en not_active IP Right Cessation
- 2019-07-23 SG SG11202100316UA patent/SG11202100316UA/en unknown
- 2019-07-23 CN CN201980048978.6A patent/CN112469961B/en active Active
- 2019-07-23 KR KR1020237026308A patent/KR20230119255A/en active Application Filing
- 2019-07-23 JP JP2021503834A patent/JP7232895B2/en active Active
- 2019-07-23 EP EP19842149.7A patent/EP3807591A4/en active Pending
- 2019-07-24 TW TW108126097A patent/TWI821338B/en active
-
2021
- 2021-01-22 PH PH12021550169A patent/PH12021550169A1/en unknown
Also Published As
| Publication number | Publication date |
|---|---|
| EP3807591A4 (en) | 2022-03-16 |
| TW202011124A (en) | 2020-03-16 |
| JP7232895B2 (en) | 2023-03-03 |
| KR20230119255A (en) | 2023-08-16 |
| JP2021530714A (en) | 2021-11-11 |
| KR20210024675A (en) | 2021-03-05 |
| CN112469961A (en) | 2021-03-09 |
| US20200033121A1 (en) | 2020-01-30 |
| EP3807591A1 (en) | 2021-04-21 |
| PH12021550169A1 (en) | 2021-10-11 |
| CN112469961B (en) | 2022-06-07 |
| TWI821338B (en) | 2023-11-11 |
| WO2020023427A1 (en) | 2020-01-30 |
| US10866092B2 (en) | 2020-12-15 |
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