SG11202001451XA - Valve and fluid supply line - Google Patents

Valve and fluid supply line

Info

Publication number
SG11202001451XA
SG11202001451XA SG11202001451XA SG11202001451XA SG11202001451XA SG 11202001451X A SG11202001451X A SG 11202001451XA SG 11202001451X A SG11202001451X A SG 11202001451XA SG 11202001451X A SG11202001451X A SG 11202001451XA SG 11202001451X A SG11202001451X A SG 11202001451XA
Authority
SG
Singapore
Prior art keywords
valve
supply line
fluid supply
fluid
line
Prior art date
Application number
SG11202001451XA
Inventor
Ryutaro TANNO
Kenji Aikawa
Akihiro Harada
Yuya Suzuki
Takahiro Matsuda
Katsunori Komehana
Masahiko Ochiishi
Tsutomu Shinohara
Original Assignee
Fujikin Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujikin Kk filed Critical Fujikin Kk
Publication of SG11202001451XA publication Critical patent/SG11202001451XA/en

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0623—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the set value given to the control element
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • G05D7/0641—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means using a plurality of throttling means
    • G05D7/0647—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means using a plurality of throttling means the plurality of throttling means being arranged in series
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/003—Housing formed from a plurality of the same valve elements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
    • F16K31/122—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston
    • F16K31/1225—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston with a plurality of pistons
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
    • F16K7/14—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat
    • F16K7/17—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat the diaphragm being actuated by fluid pressure
SG11202001451XA 2017-09-30 2018-08-28 Valve and fluid supply line SG11202001451XA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2017192269 2017-09-30
PCT/JP2018/031754 WO2019065048A1 (en) 2017-09-30 2018-08-28 Valve and fluid supply line

Publications (1)

Publication Number Publication Date
SG11202001451XA true SG11202001451XA (en) 2020-03-30

Family

ID=65903662

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11202001451XA SG11202001451XA (en) 2017-09-30 2018-08-28 Valve and fluid supply line

Country Status (7)

Country Link
US (1) US11243549B2 (en)
JP (1) JP7216422B2 (en)
KR (1) KR102268648B1 (en)
CN (1) CN111033104B (en)
SG (1) SG11202001451XA (en)
TW (1) TWI678489B (en)
WO (1) WO2019065048A1 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019126095A1 (en) 2017-12-21 2019-06-27 Swagelok Company Systems and methods for control and monitoring of actuated valves
WO2020171018A1 (en) * 2019-02-19 2020-08-27 株式会社フジキン Valve
JP7389461B2 (en) * 2019-10-31 2023-11-30 株式会社フジキン Valve devices and fluid control devices
JP7425462B2 (en) * 2019-10-31 2024-01-31 株式会社フジキン Fluid control equipment and semiconductor manufacturing equipment
JP2022029854A (en) * 2020-08-05 2022-02-18 株式会社堀場エステック Flow controller, flow control method and flow control program

Family Cites Families (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2877791A (en) * 1955-08-15 1959-03-17 Fisher Governor Co Flexible diaphragm flow control valve
JPS61116107A (en) * 1984-11-09 1986-06-03 Hitachi Ltd Actuator controller
US4702287A (en) * 1986-08-22 1987-10-27 Eagle-Picher Industries, Inc. Method and apparatus for controlling the automatic inflation of tires for testing
DE3730778A1 (en) 1987-09-12 1989-03-30 Wabco Westinghouse Fahrzeug RELAY VALVE DEVICE
JP3628767B2 (en) * 1994-12-19 2005-03-16 大阪瓦斯株式会社 Pressure control device
US5654885A (en) * 1995-03-28 1997-08-05 Virginia Valve Company Corporation Valve position controller
JP3859221B2 (en) * 1997-09-05 2006-12-20 シーケーディ株式会社 Open / close control valve for pneumatic drive
JP2000018419A (en) * 1998-07-06 2000-01-18 Techno Excel Co Ltd Electromagnetic proportional control valve and electromagnetic proportional control valve device
US6363958B1 (en) * 1999-05-10 2002-04-02 Parker-Hannifin Corporation Flow control of process gas in semiconductor manufacturing
KR100452318B1 (en) * 2002-01-17 2004-10-12 삼성전자주식회사 Pressure control system and pressure control method using the same
JP3917547B2 (en) 2003-04-18 2007-05-23 株式会社コガネイ Fluid pressure valve unit
JP4204400B2 (en) 2003-07-03 2009-01-07 忠弘 大見 Differential pressure type flow meter and differential pressure type flow control device
JP2007515726A (en) 2003-12-22 2007-06-14 グリーンライト パワー テクノロジーズ、インコーポレイテッド Process gas pressure decay control during shutdown
JP2006319190A (en) 2005-05-13 2006-11-24 Ckd Corp Gas supply integration unit, gas unit and module unit
JP4856905B2 (en) * 2005-06-27 2012-01-18 国立大学法人東北大学 Flow rate variable type flow control device
GB2437306B (en) * 2006-04-22 2010-07-07 Sam Mather Autonomous shut-off valve system
US20080149186A1 (en) * 2006-12-21 2008-06-26 Martin Ricky L Method and apparatus for emission management
JP2008292484A (en) * 2008-05-19 2008-12-04 Horiba Stec Co Ltd Fluid supply mechanism using integrated-type mass flow controller
JP4977669B2 (en) 2008-09-05 2012-07-18 忠弘 大見 Differential pressure type flow meter
US7770612B1 (en) * 2009-09-04 2010-08-10 Jimmy Earle Brown Pressure-actuated air gun
JP5250875B2 (en) * 2009-10-20 2013-07-31 Ｓｍｃ株式会社 Flow controller
JP5175965B2 (en) 2011-10-03 2013-04-03 国立大学法人東北大学 Flow rate variable type flow control device
JP6588237B2 (en) 2015-05-29 2019-10-09 株式会社フジキン Valve and fluid control device
US10768641B2 (en) 2015-08-26 2020-09-08 Fujikin Incorporated Flow dividing system
CN107013740A (en) 2017-05-11 2017-08-04 闫化存 A kind of magnetoresistive sensor

Also Published As

Publication number Publication date
CN111033104A (en) 2020-04-17
US20200225686A1 (en) 2020-07-16
JP7216422B2 (en) 2023-02-01
WO2019065048A1 (en) 2019-04-04
CN111033104B (en) 2021-12-03
TWI678489B (en) 2019-12-01
TW201915371A (en) 2019-04-16
US11243549B2 (en) 2022-02-08
KR20200024897A (en) 2020-03-09
KR102268648B1 (en) 2021-06-23
JPWO2019065048A1 (en) 2020-10-22

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