SG11202000982UA - Method of decreasing sheet resistance in an article coated with a transparent conductive oxide - Google Patents

Method of decreasing sheet resistance in an article coated with a transparent conductive oxide

Info

Publication number
SG11202000982UA
SG11202000982UA SG11202000982UA SG11202000982UA SG11202000982UA SG 11202000982U A SG11202000982U A SG 11202000982UA SG 11202000982U A SG11202000982U A SG 11202000982UA SG 11202000982U A SG11202000982U A SG 11202000982UA SG 11202000982U A SG11202000982U A SG 11202000982UA
Authority
SG
Singapore
Prior art keywords
transparent conductive
sheet resistance
conductive oxide
article coated
decreasing sheet
Prior art date
Application number
SG11202000982UA
Inventor
Ashtosh Ganjoo
Sudarshan Narayanan
Original Assignee
Vitro Flat Glass Llc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vitro Flat Glass Llc filed Critical Vitro Flat Glass Llc
Publication of SG11202000982UA publication Critical patent/SG11202000982UA/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • A—HUMAN NECESSITIES
    • A47—FURNITURE; DOMESTIC ARTICLES OR APPLIANCES; COFFEE MILLS; SPICE MILLS; SUCTION CLEANERS IN GENERAL
    • A47F—SPECIAL FURNITURE, FITTINGS, OR ACCESSORIES FOR SHOPS, STOREHOUSES, BARS, RESTAURANTS OR THE LIKE; PAYING COUNTERS
    • A47F3/00—Show cases or show cabinets
    • A47F3/04—Show cases or show cabinets air-conditioned, refrigerated
    • A47F3/0404—Cases or cabinets of the closed type
    • A47F3/0426—Details
    • A47F3/0434—Glass or transparent panels
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/001—General methods for coating; Devices therefor
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
    • C03C17/23—Oxides
    • C03C17/245—Oxides by deposition from the vapour phase
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/3411—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
    • C03C17/3417—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials all coatings being oxide coatings
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C23C14/081—Oxides of aluminium, magnesium or beryllium
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C23C14/086—Oxides of zinc, germanium, cadmium, indium, tin, thallium or bismuth
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/58—After-treatment
    • C23C14/5806—Thermal treatment
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/90—Other aspects of coatings
    • C03C2217/94—Transparent conductive oxide layers [TCO] being part of a multilayer coating
    • C03C2217/944—Layers comprising zinc oxide
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/90—Other aspects of coatings
    • C03C2217/94—Transparent conductive oxide layers [TCO] being part of a multilayer coating
    • C03C2217/948—Layers comprising indium tin oxide [ITO]
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00—Methods for coating glass
    • C03C2218/10—Deposition methods
    • C03C2218/15—Deposition methods from the vapour phase
    • C03C2218/154—Deposition methods from the vapour phase by sputtering
    • C03C2218/156—Deposition methods from the vapour phase by sputtering by magnetron sputtering
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00—Methods for coating glass
    • C03C2218/30—Aspects of methods for coating glass not covered above
    • C03C2218/32—After-treatment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02—Details
    • H01L31/0216—Coatings
    • H01L31/02161—Coatings for devices characterised by at least one potential jump barrier or surface barrier
    • H01L31/02167—Coatings for devices characterised by at least one potential jump barrier or surface barrier for solar cells
SG11202000982UA 2017-08-04 2018-08-02 Method of decreasing sheet resistance in an article coated with a transparent conductive oxide SG11202000982UA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US15/669,276 US20190040523A1 (en) 2017-08-04 2017-08-04 Method of Decreasing Sheet Resistance in an Article Coated with a Transparent Conductive Oxide
PCT/US2018/045066 WO2019028290A1 (en) 2017-08-04 2018-08-02 Method of decreasing sheet resistance in an article coated with a transparent conductive oxide

Publications (1)

Publication Number Publication Date
SG11202000982UA true SG11202000982UA (en) 2020-02-27

Family

ID=63364159

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11202000982UA SG11202000982UA (en) 2017-08-04 2018-08-02 Method of decreasing sheet resistance in an article coated with a transparent conductive oxide

Country Status (12)

Country Link
US (1) US20190040523A1 (en)
EP (1) EP3661883A1 (en)
JP (2) JP2020529385A (en)
KR (1) KR20200037345A (en)
CN (1) CN111132944A (en)
AU (1) AU2018311053B2 (en)
BR (1) BR112020002333A2 (en)
CA (1) CA3071971A1 (en)
CO (1) CO2020002400A2 (en)
MX (1) MX2020001398A (en)
SG (1) SG11202000982UA (en)
WO (1) WO2019028290A1 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11155493B2 (en) * 2010-01-16 2021-10-26 Cardinal Cg Company Alloy oxide overcoat indium tin oxide coatings, coated glazings, and production methods
AU2017295478B2 (en) * 2016-07-13 2020-11-12 Lidl Stiftung & Co. Kg Temperature-controlled plate, use of a temperature-controlled plate and self-service dispensing shelf system comprising said temperature-controlled plate
US11220455B2 (en) * 2017-08-04 2022-01-11 Vitro Flat Glass Llc Flash annealing of silver coatings
KR20200093737A (en) * 2019-01-28 2020-08-06 삼성디스플레이 주식회사 Display device and method of manufacturing the same
US11454440B2 (en) 2019-07-12 2022-09-27 Cardinal Cg Company Bus bar connection and coating technology

Family Cites Families (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4716086A (en) 1984-12-19 1987-12-29 Ppg Industries, Inc. Protective overcoat for low emissivity coated article
US4786563A (en) 1985-12-23 1988-11-22 Ppg Industries, Inc. Protective coating for low emissivity coated articles
JP3068924B2 (en) * 1990-11-29 2000-07-24 旭硝子株式会社 Heat shielding film
US5344718A (en) 1992-04-30 1994-09-06 Guardian Industries Corp. High performance, durable, low-E glass
US5376455A (en) 1993-10-05 1994-12-27 Guardian Industries Corp. Heat-treatment convertible coated glass and method of converting same
MX9605356A (en) 1994-05-03 1997-12-31 Cardinal Ig Co Transparent article having protective silicon nitride film.
GB9417112D0 (en) 1994-08-24 1994-10-12 Glaverbel Coated substrate and process for its formation
US5532180A (en) 1995-06-02 1996-07-02 Ois Optical Imaging Systems, Inc. Method of fabricating a TFT with reduced channel length
JP2002249339A (en) * 2000-12-21 2002-09-06 Nippon Electric Glass Co Ltd Glass for potting semiconductor and outer tube for potting semiconductor
US20040241490A1 (en) * 2003-03-28 2004-12-02 Finley James J. Substrates coated with mixtures of titanium and aluminum materials, methods for making the substrates, and cathode targets of titanium and aluminum metal
KR101407805B1 (en) * 2006-01-03 2014-06-17 바스프 에스이 Photovoltaically active semiconductor material and photovoltaic cell
DE102006014796B4 (en) * 2006-03-29 2009-04-09 Saint-Gobain Glass Deutschland Gmbh Highly resilient low-E coating system for transparent substrates
FR2911130B1 (en) * 2007-01-05 2009-11-27 Saint Gobain THIN FILM DEPOSITION METHOD AND PRODUCT OBTAINED
JP5236405B2 (en) * 2008-09-12 2013-07-17 住友化学株式会社 Method for modifying transparent electrode film and method for producing substrate with transparent electrode film
EP2354107A1 (en) * 2010-02-10 2011-08-10 Saint-Gobain Glass France Method for producing a structured TCO protection layer
US8815059B2 (en) * 2010-08-31 2014-08-26 Guardian Industries Corp. System and/or method for heat treating conductive coatings using wavelength-tuned infrared radiation
US8834976B2 (en) * 2010-02-26 2014-09-16 Guardian Industries Corp. Articles including anticondensation and/or low-E coatings and/or methods of making the same
US8257561B2 (en) * 2010-03-30 2012-09-04 Primestar Solar, Inc. Methods of forming a conductive transparent oxide film layer for use in a cadmium telluride based thin film photovoltaic device
US20120160663A1 (en) * 2010-12-14 2012-06-28 Alliance For Sustainable Energy, Llc. Sputter Deposition and Annealing of High Conductivity Transparent Oxides
US10615297B2 (en) * 2013-02-22 2020-04-07 International Business Machines Corporation Electrode formation for heterojunction solar cells
JP6435597B2 (en) * 2013-09-13 2018-12-12 東ソー株式会社 Transparent conductive film and method for producing the same
FR3012133B1 (en) * 2013-10-17 2021-01-01 Saint Gobain PROCESS FOR OBTAINING A SUBSTRATE COATED BY A STACK CONTAINING A TRANSPARENT CONDUCTIVE OXIDE LAYER
EP3296277B1 (en) * 2015-05-11 2021-01-13 AGC Inc. Heat insulating glass unit for vehicle and manufacturing method thereof
US10011524B2 (en) * 2015-06-19 2018-07-03 Guardian Glass, LLC Coated article with sequentially activated low-E coating, and/or method of making the same

Also Published As

Publication number Publication date
CN111132944A (en) 2020-05-08
WO2019028290A1 (en) 2019-02-07
AU2018311053A1 (en) 2020-02-20
US20190040523A1 (en) 2019-02-07
BR112020002333A2 (en) 2020-09-01
CO2020002400A2 (en) 2020-04-01
JP2020529385A (en) 2020-10-08
AU2018311053B2 (en) 2023-09-07
JP2024040172A (en) 2024-03-25
CA3071971A1 (en) 2019-02-07
EP3661883A1 (en) 2020-06-10
KR20200037345A (en) 2020-04-08
MX2020001398A (en) 2021-02-09

Similar Documents

Publication Publication Date Title
SG11202000982UA (en) Method of decreasing sheet resistance in an article coated with a transparent conductive oxide
EP3090446A4 (en) A metal thin film resistor and process
EP3223120A4 (en) Film touch sensor and manufacturing method therefor
EP3293744A4 (en) Electric shock-prevention element and electronic device provided with same
SG11201707660VA (en) Articles coated with fluoro-annealed films
EP2989527A4 (en) User terminal device with pen and controlling method thereof
EP3239337A4 (en) Hpf molding member having excellent delamination resistance and manufacturing method therefor
EP3431284A4 (en) Liquid-repellent resin sheet and article using same
EP3299494A4 (en) Treated surface metal sheet and treated surface metal sheet coated with organic resin
EP3224042A4 (en) Fiber-metal laminate and its manufacturing method
EP3125086A4 (en) Transparent conductive laminated body and touch panel provided with transparent conductive laminated body
EP3437443A4 (en) Component embedding in thinner core using dielectric sheet
ZA201601734B (en) Znaimg ¿ coated metal sheet with improved flexibility and corresponding manufacturing process
PT3178294T (en) Transparent pane with an electrical heating layer, method for its production and its use
EP3193340A4 (en) Thin film resistive body and production method for same
EP3147919A4 (en) Metal foil with conductive layer and method for manufacturing same
EP3006527A4 (en) Silicone coating composition and coated article
PL3178295T3 (en) Transparent pane with an electrical heating layer, method for its production and its use
EP3154780A4 (en) Coated substrate and articles made therefrom
EP3846584A4 (en) Article with conductive sheet and method for producing same
EP3346511A4 (en) Light-emitting element having zno transparent electrode and method for manufacturing same
EP3543219A4 (en) Borosilicate glass with high chemical resistance and application thereof
PL3174940T3 (en) Ultraviolet-curable coating agent with improved sunlight resistance
EP3350275A4 (en) An adhesive composition and an article manufactured therefrom
EP3085672A4 (en) Glass sheet manufacturing method and glass sheet