SG11201911484XA - High resolution surface particle detector - Google Patents
High resolution surface particle detectorInfo
- Publication number
- SG11201911484XA SG11201911484XA SG11201911484XA SG11201911484XA SG11201911484XA SG 11201911484X A SG11201911484X A SG 11201911484XA SG 11201911484X A SG11201911484X A SG 11201911484XA SG 11201911484X A SG11201911484X A SG 11201911484XA SG 11201911484X A SG11201911484X A SG 11201911484XA
- Authority
- SG
- Singapore
- Prior art keywords
- high resolution
- particle detector
- surface particle
- resolution surface
- detector
- Prior art date
Links
- 239000002245 particle Substances 0.000 title 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N35/00—Automatic analysis not limited to methods or materials provided for in any single one of groups G01N1/00 - G01N33/00; Handling materials therefor
- G01N35/00584—Control arrangements for automatic analysers
- G01N35/00722—Communications; Identification
- G01N35/00732—Identification of carriers, materials or components in automatic analysers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/02—Investigating particle size or size distribution
- G01N15/0205—Investigating particle size or size distribution by optical means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/06—Investigating concentration of particle suspensions
- G01N15/065—Investigating concentration of particle suspensions using condensation nuclei counters
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67253—Process monitoring, e.g. flow or thickness monitoring
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/02—Devices for withdrawing samples
- G01N1/22—Devices for withdrawing samples in the gaseous state
- G01N1/24—Suction devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/06—Investigating concentration of particle suspensions
- G01N15/075—Investigating concentration of particle suspensions by optical means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/02—Devices for withdrawing samples
- G01N1/22—Devices for withdrawing samples in the gaseous state
- G01N2001/2285—Details of probe structures
- G01N2001/2291—Movable probes, e.g. swivelling, swinging
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N2015/0042—Investigating dispersion of solids
- G01N2015/0046—Investigating dispersion of solids in gas, e.g. smoke
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/10—Investigating individual particles
- G01N15/14—Optical investigation techniques, e.g. flow cytometry
- G01N2015/1486—Counting the particles
Landscapes
- Chemical & Material Sciences (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Pathology (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Health & Medical Sciences (AREA)
- Immunology (AREA)
- Dispersion Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Sampling And Sample Adjustment (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201762522611P | 2017-06-20 | 2017-06-20 | |
| US16/000,499 US10712355B2 (en) | 2017-06-20 | 2018-06-05 | High resolution surface particle detector |
| PCT/US2018/036287 WO2018236584A1 (en) | 2017-06-20 | 2018-06-06 | HIGH RESOLUTION SURFACE PARTICLE DETECTOR |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| SG11201911484XA true SG11201911484XA (en) | 2020-01-30 |
Family
ID=64657987
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SG11201911484XA SG11201911484XA (en) | 2017-06-20 | 2018-06-06 | High resolution surface particle detector |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US10712355B2 (zh) |
| EP (1) | EP3642588A4 (zh) |
| JP (1) | JP6932792B2 (zh) |
| KR (1) | KR102312658B1 (zh) |
| CN (1) | CN111094930A (zh) |
| SG (1) | SG11201911484XA (zh) |
| TW (2) | TWM574238U (zh) |
| WO (1) | WO2018236584A1 (zh) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10782219B2 (en) * | 2017-12-22 | 2020-09-22 | Industrial Technology Research Institute | Particle counting method and device |
| KR20210052506A (ko) * | 2018-09-04 | 2021-05-10 | 파티클 머슈어링 시스템즈, 인크. | 생산 장비 및 표면에서 나노입자 검출 |
| EP4257948A1 (en) | 2022-04-04 | 2023-10-11 | Nederlandse Organisatie voor toegepast-natuurwetenschappelijk Onderzoek TNO | Method and system for inspecting a surface |
Family Cites Families (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4746215A (en) | 1986-04-24 | 1988-05-24 | Pacific Scientific Company | Particle counter air inlet assembly |
| US5253538A (en) | 1991-04-26 | 1993-10-19 | Dryden Engineering Co., Inc. | Method and device for quantifying particles on a surface |
| US7010991B2 (en) | 2000-09-13 | 2006-03-14 | Pentagon Technologies Group, Inc. | Surface particle detector |
| US6639671B1 (en) * | 2002-03-01 | 2003-10-28 | Msp Corporation | Wide-range particle counter |
| JP4180952B2 (ja) * | 2003-03-31 | 2008-11-12 | エムエスピー・コーポレーション | ワイドレンジ粒子カウンター |
| US20060263925A1 (en) | 2005-05-10 | 2006-11-23 | Chandler David L | Ethernet-powered particle counting system |
| US7880874B2 (en) | 2007-08-21 | 2011-02-01 | Lighthouse Worldwide Solutions, Inc. | Surface particle counter |
| FR2930675B1 (fr) | 2008-04-24 | 2010-08-20 | Alcatel Lucent | Station de mesure de la contamination en particules d'une enceinte de transport pour le convoyage et le stockage atmospherique de substrats semi-conducteurs et procede de mesure correspondant |
| US8561486B2 (en) | 2009-07-13 | 2013-10-22 | Enertechnix, Inc | Particle interrogation devices and methods |
| EP2470876B1 (en) | 2009-08-24 | 2017-04-05 | Particle Measuring Systems, Inc. | Flow monitored particle sensor |
| US9541475B2 (en) | 2010-10-29 | 2017-01-10 | The University Of British Columbia | Methods and apparatus for detecting particles entrained in fluids |
| US8875589B1 (en) * | 2012-05-17 | 2014-11-04 | The United States Of America As Represented By The Secretary Of The Army | Sampling and counting system |
| JP5851534B2 (ja) * | 2013-07-17 | 2016-02-03 | シャープ株式会社 | 微粒子測定装置 |
| KR101490328B1 (ko) * | 2014-09-23 | 2015-02-16 | 대한민국 | 입자 개수 농도 측정 장치 |
| CN205317863U (zh) | 2015-09-26 | 2016-06-15 | 华北电力大学（保定） | 一种脉冲喷射式粉尘荷电量检测装置 |
| KR101683433B1 (ko) * | 2016-10-28 | 2016-12-07 | 주식회사 동일그린시스 | 초미세 입경 및 미세 입경을 갖는 부유 입자상 물질 측정 장치 |
| CN106769707B (zh) | 2016-11-25 | 2023-03-21 | 中国科学院合肥物质科学研究院 | 一种势阱电压可调的颗粒物粒径谱测量装置及其测量方法 |
-
2018
- 2018-06-05 US US16/000,499 patent/US10712355B2/en active Active
- 2018-06-06 CN CN201880041767.5A patent/CN111094930A/zh active Pending
- 2018-06-06 SG SG11201911484XA patent/SG11201911484XA/en unknown
- 2018-06-06 JP JP2019570368A patent/JP6932792B2/ja active Active
- 2018-06-06 WO PCT/US2018/036287 patent/WO2018236584A1/en unknown
- 2018-06-06 KR KR1020207001677A patent/KR102312658B1/ko active IP Right Grant
- 2018-06-06 EP EP18820003.4A patent/EP3642588A4/en not_active Withdrawn
- 2018-06-12 TW TW107212221U patent/TWM574238U/zh not_active IP Right Cessation
- 2018-06-12 TW TW107120193A patent/TWI710769B/zh active
Also Published As
| Publication number | Publication date |
|---|---|
| JP6932792B2 (ja) | 2021-09-08 |
| JP2020524280A (ja) | 2020-08-13 |
| WO2018236584A1 (en) | 2018-12-27 |
| TW201905465A (zh) | 2019-02-01 |
| EP3642588A4 (en) | 2021-03-24 |
| US10712355B2 (en) | 2020-07-14 |
| EP3642588A1 (en) | 2020-04-29 |
| KR20200017517A (ko) | 2020-02-18 |
| TWM574238U (zh) | 2019-02-11 |
| KR102312658B1 (ko) | 2021-10-15 |
| CN111094930A (zh) | 2020-05-01 |
| US20180364266A1 (en) | 2018-12-20 |
| TWI710769B (zh) | 2020-11-21 |
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