SG11201908613YA - Wafer accommodation container - Google Patents

Wafer accommodation container

Info

Publication number
SG11201908613YA
SG11201908613YA SG11201908613YA SG11201908613YA SG 11201908613Y A SG11201908613Y A SG 11201908613YA SG 11201908613Y A SG11201908613Y A SG 11201908613YA SG 11201908613Y A SG11201908613Y A SG 11201908613YA
Authority
SG
Singapore
Prior art keywords
cover
container body
container
engagement
opening
Prior art date
Application number
Inventor
Masayuki Nishijima
Kenichi Hirose
Original Assignee
Achilles Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Achilles Corp filed Critical Achilles Corp
Publication of SG11201908613YA publication Critical patent/SG11201908613YA/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67373—Closed carriers characterised by locking systems
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/12—Mountings, e.g. non-detachable insulating substrates
    • H01L23/13—Mountings, e.g. non-detachable insulating substrates characterised by the shape
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67376—Closed carriers characterised by sealing arrangements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67379—Closed carriers characterised by coupling elements, kinematic members, handles or elements to be externally gripped
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/02—Containers; Seals
    • H01L23/04—Containers; Seals characterised by the shape of the container or parts, e.g. caps, walls
    • H01L23/043—Containers; Seals characterised by the shape of the container or parts, e.g. caps, walls the container being a hollow construction and having a conductive base as a mounting as well as a lead for the semiconductor body
    • H01L23/051—Containers; Seals characterised by the shape of the container or parts, e.g. caps, walls the container being a hollow construction and having a conductive base as a mounting as well as a lead for the semiconductor body another lead being formed by a cover plate parallel to the base plate, e.g. sandwich type

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Packaging Frangible Articles (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Stackable Containers (AREA)

Abstract

A wafer accommodation container (1) includes: a container body having one end that is provided with an opening (11) and another end that is provided with a mount element (12) on which wafers are stacked, the mount element (12) facing the opening 5 (11); a cover (20) to cover the opening (11); and a connection mechanism (30) to detachably connect the container body (10) and the cover (20), wherein the connection mechanism (30) includes: at least two engagement members (32) each extending from the other end of the container body (10) to the one end of the container body (10) and each having one end that is provided with an engagement nail (31); and at least two 10 engagement holes (33) included in the cover (20) and configured to be each fitted to the corresponding engagement nail (31), and the cover (20) includes guide members (40) each disposed on corresponding one of cover side wall portions (21) and configured to guide the container body (10) and the cover (20) while the guide members (40) are coming into contact with the corresponding engagement members (32) with the container 15 body (10) kept concentric with the cover (20) when the cover (20) is attached to the container body (10).
SG11201908613Y 2017-03-31 2018-03-19 Wafer accommodation container SG11201908613YA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2017069918A JP6767297B2 (en) 2017-03-31 2017-03-31 Wafer storage container
PCT/JP2018/010906 WO2018180733A1 (en) 2017-03-31 2018-03-19 Wafer accommodation container

Publications (1)

Publication Number Publication Date
SG11201908613YA true SG11201908613YA (en) 2019-10-30

Family

ID=63675513

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11201908613Y SG11201908613YA (en) 2017-03-31 2018-03-19 Wafer accommodation container

Country Status (9)

Country Link
US (1) US11335615B2 (en)
EP (1) EP3605596B1 (en)
JP (1) JP6767297B2 (en)
KR (1) KR102308107B1 (en)
CN (1) CN110431658B (en)
MY (1) MY202425A (en)
SG (1) SG11201908613YA (en)
TW (1) TWI661985B (en)
WO (1) WO2018180733A1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6767297B2 (en) 2017-03-31 2020-10-14 アキレス株式会社 Wafer storage container
CN117157742A (en) * 2022-03-30 2023-12-01 阿基里斯株式会社 Semiconductor wafer handling container

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11214475A (en) * 1998-01-20 1999-08-06 Nikon Corp Substrate transporting apparatus and apparatus for measuring pattern position, using the same
US6988620B2 (en) 2002-09-06 2006-01-24 E.Pak International, Inc. Container with an adjustable inside dimension that restricts movement of items within the container
US6988621B2 (en) * 2003-06-17 2006-01-24 Illinois Tool Works Inc. Reduced movement wafer box
KR20100080503A (en) 2007-10-12 2010-07-08 피크 플라스틱 앤 메탈 프로덕츠 (인터내셔널) 리미티드 Wafer container with staggered wall structure
JP4880646B2 (en) * 2008-06-30 2012-02-22 信越ポリマー株式会社 Substrate storage container
US20170372931A1 (en) * 2014-12-08 2017-12-28 Entegris, Inc. Horizontal substrate container with integral corner spring for substrate containment
JP6514603B2 (en) * 2015-08-07 2019-05-15 アキレス株式会社 Substrate storage container
JP6540439B2 (en) 2015-10-02 2019-07-10 トヨタ自動車株式会社 Wireless communication method and wireless communication device
JP6767297B2 (en) 2017-03-31 2020-10-14 アキレス株式会社 Wafer storage container

Also Published As

Publication number Publication date
CN110431658A (en) 2019-11-08
JP2018174177A (en) 2018-11-08
US20200105632A1 (en) 2020-04-02
EP3605596B1 (en) 2022-04-13
KR102308107B1 (en) 2021-10-01
US11335615B2 (en) 2022-05-17
CN110431658B (en) 2023-07-07
KR20190117663A (en) 2019-10-16
TW201841808A (en) 2018-12-01
WO2018180733A1 (en) 2018-10-04
EP3605596A1 (en) 2020-02-05
EP3605596A4 (en) 2020-04-01
JP6767297B2 (en) 2020-10-14
MY202425A (en) 2024-04-29
TWI661985B (en) 2019-06-11

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