SG11201811751VA - Light alignment control method and light alignment device - Google Patents

Light alignment control method and light alignment device

Info

Publication number
SG11201811751VA
SG11201811751VA SG11201811751VA SG11201811751VA SG11201811751VA SG 11201811751V A SG11201811751V A SG 11201811751VA SG 11201811751V A SG11201811751V A SG 11201811751VA SG 11201811751V A SG11201811751V A SG 11201811751VA SG 11201811751V A SG11201811751V A SG 11201811751VA
Authority
SG
Singapore
Prior art keywords
light alignment
light
control method
alignment
angle
Prior art date
Application number
SG11201811751VA
Inventor
Chang Zhou
Wen Luo
Shucun Zhu
Original Assignee
Shanghai Micro Electronics Equipment Group Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shanghai Micro Electronics Equipment Group Co Ltd filed Critical Shanghai Micro Electronics Equipment Group Co Ltd
Publication of SG11201811751VA publication Critical patent/SG11201811751VA/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
    • G02F1/13378—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation
    • G02F1/133788—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation by light irradiation, e.g. linearly polarised light photo-polymerisation
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers

Abstract

Provided are a light alignment control method and a light alignment device. The light alignment control method acquires a dynamically weighted light polarizing axle angle error of a substrate () by detecting a yaw angle of a motion stage (130) with respect to a polarizing illumination device (110), to further control a rotation angle of a rotary table (120) which drives the substrate (200) to rotate, thereby effectively improving the control accuracy of the light polarizing axle angle during the light alignment process, ensuring the accuracy of an alignment angle formed in an alignment film.. 38
SG11201811751VA 2016-06-30 2017-06-29 Light alignment control method and light alignment device SG11201811751VA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN201610510439.8A CN107561784B (en) 2016-06-30 2016-06-30 Optical alignment control method and optical alignment equipment
PCT/CN2017/090747 WO2018001298A1 (en) 2016-06-30 2017-06-29 Light alignment control method and light alignment device

Publications (1)

Publication Number Publication Date
SG11201811751VA true SG11201811751VA (en) 2019-01-30

Family

ID=60786489

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11201811751VA SG11201811751VA (en) 2016-06-30 2017-06-29 Light alignment control method and light alignment device

Country Status (7)

Country Link
US (1) US10788716B2 (en)
JP (1) JP6742453B2 (en)
KR (1) KR102192203B1 (en)
CN (1) CN107561784B (en)
SG (1) SG11201811751VA (en)
TW (1) TWI634374B (en)
WO (1) WO2018001298A1 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110554536A (en) * 2018-05-31 2019-12-10 上海微电子装备（集团）股份有限公司 Optical alignment equipment and replacement method of lamp tube in optical alignment equipment
CN108957863B (en) * 2018-06-29 2021-10-15 武汉华星光电技术有限公司 Optical alignment equipment
CN112946957B (en) * 2019-11-26 2023-06-02 上海微电子装备（集团）股份有限公司 Optical alignment device, double optical alignment device, optical alignment method and optical alignment system
CN113741100A (en) * 2021-08-05 2021-12-03 信利（惠州）智能显示有限公司 Photo-alignment device and photo-alignment method
CN113739913B (en) * 2021-08-27 2022-03-11 长春理工大学 Intelligent haze-penetrating optical imaging detection device and use method thereof

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003141665A (en) 2001-10-31 2003-05-16 Sogo Keibi Hosho Co Ltd Monitor, monitoring method, and program for executing the method by computer
JP2005227019A (en) 2004-02-10 2005-08-25 Yamatake Corp Measuring method and measuring instrument for polarization axis
JP2013007781A (en) * 2011-06-22 2013-01-10 Citizen Holdings Co Ltd Liquid crystal device
JP5105567B1 (en) 2012-04-19 2012-12-26 信越エンジニアリング株式会社 Photo-alignment irradiation device
JP5554849B1 (en) 2013-01-23 2014-07-23 岩崎電気株式会社 Light irradiation device
JP6206944B2 (en) 2013-03-07 2017-10-04 株式会社ブイ・テクノロジー Polarized light irradiation device for photo-alignment
JP5862616B2 (en) * 2013-07-17 2016-02-16 ウシオ電機株式会社 Polarizing light irradiation apparatus for photo-alignment and polarized light irradiation method for photo-alignment
JP5831575B2 (en) 2014-03-05 2015-12-09 岩崎電気株式会社 Polarized light irradiation device
KR102166261B1 (en) * 2014-03-25 2020-10-15 도시바 라이텍쿠 가부시키가이샤 Polarized light irradiation apparatus
JP5958491B2 (en) 2014-03-31 2016-08-02 ウシオ電機株式会社 Polarized light irradiation device
CN104390586B (en) * 2014-11-12 2017-04-19 广东工业大学 Device and method for detecting geometric errors of single-axis motions of machine tool

Also Published As

Publication number Publication date
KR102192203B1 (en) 2020-12-16
US20190227388A1 (en) 2019-07-25
CN107561784A (en) 2018-01-09
TW201804229A (en) 2018-02-01
KR20190020815A (en) 2019-03-04
US10788716B2 (en) 2020-09-29
WO2018001298A1 (en) 2018-01-04
JP2019527378A (en) 2019-09-26
TWI634374B (en) 2018-09-01
CN107561784B (en) 2021-08-20
JP6742453B2 (en) 2020-08-19

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