SG11201610400UA - Encapsulated composite backing plate - Google Patents
Encapsulated composite backing plateInfo
- Publication number
- SG11201610400UA SG11201610400UA SG11201610400UA SG11201610400UA SG11201610400UA SG 11201610400U A SG11201610400U A SG 11201610400UA SG 11201610400U A SG11201610400U A SG 11201610400UA SG 11201610400U A SG11201610400U A SG 11201610400UA SG 11201610400U A SG11201610400U A SG 11201610400UA
- Authority
- SG
- Singapore
- Prior art keywords
- backing plate
- composite backing
- encapsulated composite
- encapsulated
- plate
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
- C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
- B23K20/02—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating by means of a press ; Diffusion bonding
- B23K20/023—Thermo-compression bonding
- B23K20/026—Thermo-compression bonding with diffusion of soldering material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
- B23K20/22—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating taking account of the properties of the materials to be welded
- B23K20/233—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating taking account of the properties of the materials to be welded without ferrous layer
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
- B23K20/24—Preliminary treatment
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K31/00—Processes relevant to this subclass, specially adapted for particular articles or purposes, but not covered by only one of the preceding main groups
- B23K31/02—Processes relevant to this subclass, specially adapted for particular articles or purposes, but not covered by only one of the preceding main groups relating to soldering or welding
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3411—Constructional aspects of the reactor
- H01J37/3435—Target holders (includes backing plates and endblocks)
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2101/00—Articles made by soldering, welding or cutting
- B23K2101/34—Coated articles, e.g. plated or painted; Surface treated articles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2101/00—Articles made by soldering, welding or cutting
- B23K2101/36—Electric or electronic devices
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201462039694P | 2014-08-20 | 2014-08-20 | |
US14/820,336 US20160053365A1 (en) | 2014-08-20 | 2015-08-06 | Encapsulated composite backing plate |
PCT/US2015/045449 WO2016028657A1 (en) | 2014-08-20 | 2015-08-17 | Encapsulated composite backing plate |
Publications (1)
Publication Number | Publication Date |
---|---|
SG11201610400UA true SG11201610400UA (en) | 2017-03-30 |
Family
ID=55347796
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG11201610400UA SG11201610400UA (en) | 2014-08-20 | 2015-08-17 | Encapsulated composite backing plate |
Country Status (7)
Country | Link |
---|---|
US (1) | US20160053365A1 (en) |
EP (1) | EP3183744A4 (en) |
JP (1) | JP2017525846A (en) |
KR (1) | KR20170042589A (en) |
CN (1) | CN106663605A (en) |
SG (1) | SG11201610400UA (en) |
WO (1) | WO2016028657A1 (en) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6649245B2 (en) * | 2016-12-28 | 2020-02-19 | 株式会社コベルコ科研 | Repair method of backing plate for sputtering target and repaired backing plate |
CN107974656B (en) * | 2017-11-15 | 2019-10-22 | 西北工业大学 | It is a kind of to take into account that titanium alloy is wear-resisting, preparation method of anti-fatigue performance Cr-Zr-Ti solid solution layer |
KR102559553B1 (en) * | 2020-12-08 | 2023-07-26 | (주)지오엘리먼트 | Sputtering target with upper-side reinforcement region and method for manufacturing the same sputtering target |
KR102559547B1 (en) * | 2020-12-08 | 2023-07-26 | (주)지오엘리먼트 | Sputtering target with reinforcement region and method for manufacturing the same sputtering target |
Family Cites Families (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5593082A (en) * | 1994-11-15 | 1997-01-14 | Tosoh Smd, Inc. | Methods of bonding targets to backing plate members using solder pastes and target/backing plate assemblies bonded thereby |
US5522535A (en) * | 1994-11-15 | 1996-06-04 | Tosoh Smd, Inc. | Methods and structural combinations providing for backing plate reuse in sputter target/backing plate assemblies |
JPH093641A (en) * | 1995-06-23 | 1997-01-07 | Sony Corp | Backing plate and its manufacture |
US6039848A (en) * | 1995-07-10 | 2000-03-21 | Cvc Products, Inc. | Ultra-high vacuum apparatus and method for high productivity physical vapor deposition. |
JPH11102827A (en) * | 1997-09-26 | 1999-04-13 | Hitachi Metals Ltd | Saturable reactor core and magnetic amplifier mode high output switching regulator using the same, and computer using the same |
EP0933343B1 (en) * | 1998-01-29 | 2003-06-25 | Coi Ceramics, Inc. | Method for producing sized, coated ceramic fibers |
JP2000226650A (en) * | 1999-02-08 | 2000-08-15 | Mitsubishi Materials Corp | Reinforcement ring for preventing deformation of backing plate, backing plate with the reinforcement ring, sputtering target, and their use |
US6596139B2 (en) * | 2000-05-31 | 2003-07-22 | Honeywell International Inc. | Discontinuous high-modulus fiber metal matrix composite for physical vapor deposition target backing plates and other thermal management applications |
JP4820508B2 (en) * | 2000-08-30 | 2011-11-24 | 株式会社東芝 | Sputtering target and manufacturing method thereof, sputtering apparatus, thin film manufacturing method, electronic component manufacturing method |
US6376281B1 (en) * | 2000-10-27 | 2002-04-23 | Honeywell International, Inc. | Physical vapor deposition target/backing plate assemblies |
JP2002161361A (en) * | 2000-11-21 | 2002-06-04 | Taiheiyo Cement Corp | Backing plate for sputtering target |
TWI232241B (en) * | 2001-03-13 | 2005-05-11 | Ind Tech Res Inst | Method of regenerating a phase change sputtering target for optical storage media |
US20040222090A1 (en) * | 2003-05-07 | 2004-11-11 | Tim Scott | Carbon fiber and copper support for physical vapor deposition target assemblies |
US7485210B2 (en) * | 2004-10-07 | 2009-02-03 | International Business Machines Corporation | Sputtering target fixture |
JP4803716B2 (en) * | 2005-12-09 | 2011-10-26 | 株式会社アルバック | Backing plate and manufacturing method thereof |
DE112006003537B4 (en) * | 2005-12-28 | 2017-07-06 | Plansee Se | Method of making a sputtering target assembly |
US7815782B2 (en) * | 2006-06-23 | 2010-10-19 | Applied Materials, Inc. | PVD target |
JP5272361B2 (en) * | 2006-10-20 | 2013-08-28 | 豊田合成株式会社 | Sputter deposition apparatus and backing plate for sputter deposition apparatus |
US8968536B2 (en) * | 2007-06-18 | 2015-03-03 | Applied Materials, Inc. | Sputtering target having increased life and sputtering uniformity |
US7901552B2 (en) * | 2007-10-05 | 2011-03-08 | Applied Materials, Inc. | Sputtering target with grooves and intersecting channels |
US8182870B1 (en) * | 2008-05-29 | 2012-05-22 | The United States Of America As Represented By The United States Department Of Energy | Method for generating small and ultra small apertures, slits, nozzles and orifices |
US8133368B2 (en) * | 2008-10-31 | 2012-03-13 | Applied Materials, Inc. | Encapsulated sputtering target |
US8968537B2 (en) * | 2011-02-09 | 2015-03-03 | Applied Materials, Inc. | PVD sputtering target with a protected backing plate |
JP5779491B2 (en) * | 2011-12-13 | 2015-09-16 | 株式会社アルバック | Target device, sputtering device, and method of manufacturing target device |
-
2015
- 2015-08-06 US US14/820,336 patent/US20160053365A1/en not_active Abandoned
- 2015-08-17 KR KR1020177004043A patent/KR20170042589A/en unknown
- 2015-08-17 WO PCT/US2015/045449 patent/WO2016028657A1/en active Application Filing
- 2015-08-17 SG SG11201610400UA patent/SG11201610400UA/en unknown
- 2015-08-17 CN CN201580035983.5A patent/CN106663605A/en active Pending
- 2015-08-17 EP EP15834511.6A patent/EP3183744A4/en not_active Withdrawn
- 2015-08-17 JP JP2016575795A patent/JP2017525846A/en active Pending
Also Published As
Publication number | Publication date |
---|---|
CN106663605A (en) | 2017-05-10 |
US20160053365A1 (en) | 2016-02-25 |
EP3183744A4 (en) | 2018-03-14 |
JP2017525846A (en) | 2017-09-07 |
WO2016028657A1 (en) | 2016-02-25 |
KR20170042589A (en) | 2017-04-19 |
EP3183744A1 (en) | 2017-06-28 |
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