SG11201508481PA - Dome cooling using compliant material - Google Patents

Dome cooling using compliant material

Info

Publication number
SG11201508481PA
SG11201508481PA SG11201508481PA SG11201508481PA SG11201508481PA SG 11201508481P A SG11201508481P A SG 11201508481PA SG 11201508481P A SG11201508481P A SG 11201508481PA SG 11201508481P A SG11201508481P A SG 11201508481PA SG 11201508481P A SG11201508481P A SG 11201508481PA
Authority
SG
Singapore
Prior art keywords
compliant material
dome cooling
dome
cooling
compliant
Prior art date
Application number
SG11201508481PA
Other languages
English (en)
Inventor
Joseph M Ranish
Paul Brillhart
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Publication of SG11201508481PA publication Critical patent/SG11201508481PA/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67098—Apparatus for thermal treatment
    • H01L21/67115—Apparatus for thermal treatment mainly by radiation

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Chemical Vapour Deposition (AREA)
SG11201508481PA 2013-05-10 2014-04-15 Dome cooling using compliant material SG11201508481PA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201361821804P 2013-05-10 2013-05-10
PCT/US2014/034218 WO2014182405A1 (en) 2013-05-10 2014-04-15 Dome cooling using compliant material

Publications (1)

Publication Number Publication Date
SG11201508481PA true SG11201508481PA (en) 2015-11-27

Family

ID=51864857

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11201508481PA SG11201508481PA (en) 2013-05-10 2014-04-15 Dome cooling using compliant material

Country Status (6)

Country Link
US (2) US9711382B2 (zh)
KR (1) KR20160006778A (zh)
CN (1) CN105190851B (zh)
SG (1) SG11201508481PA (zh)
TW (2) TWI609981B (zh)
WO (1) WO2014182405A1 (zh)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5931769B2 (ja) * 2013-02-01 2016-06-08 アイシン高丘株式会社 赤外炉及び赤外線加熱方法
SG11201608404RA (en) * 2014-05-27 2016-12-29 Applied Materials Inc Window cooling using compliant material

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4489234A (en) * 1983-03-25 1984-12-18 General Electric Company Radiant-energy heating and/or cooking apparatus with honeycomb coverplate
US6016383A (en) * 1990-01-19 2000-01-18 Applied Materials, Inc. Rapid thermal heating apparatus and method including an infrared camera to measure substrate temperature
US5155336A (en) * 1990-01-19 1992-10-13 Applied Materials, Inc. Rapid thermal heating apparatus and method
US6108490A (en) * 1996-07-11 2000-08-22 Cvc, Inc. Multizone illuminator for rapid thermal processing with improved spatial resolution
US5937142A (en) * 1996-07-11 1999-08-10 Cvc Products, Inc. Multi-zone illuminator for rapid thermal processing
US6367410B1 (en) 1996-12-16 2002-04-09 Applied Materials, Inc. Closed-loop dome thermal control apparatus for a semiconductor wafer processing system
US6021844A (en) * 1998-06-03 2000-02-08 Batchelder; John Samuel Heat exchange apparatus
US6284051B1 (en) * 1999-05-27 2001-09-04 Ag Associates (Israel) Ltd. Cooled window
US6631726B1 (en) 1999-08-05 2003-10-14 Hitachi Electronics Engineering Co., Ltd. Apparatus and method for processing a substrate
JP2001176865A (ja) 1999-12-15 2001-06-29 Seiko Epson Corp 処理装置及び処理方法
US7429818B2 (en) 2000-07-31 2008-09-30 Luxim Corporation Plasma lamp with bulb and lamp chamber
US6856092B2 (en) 2000-12-06 2005-02-15 Itw, Inc. Electrodeless lamp
US7978964B2 (en) * 2006-04-27 2011-07-12 Applied Materials, Inc. Substrate processing chamber with dielectric barrier discharge lamp assembly
KR20080030713A (ko) * 2006-10-02 2008-04-07 삼성전자주식회사 기판 가공 장치
US7378618B1 (en) * 2006-12-14 2008-05-27 Applied Materials, Inc. Rapid conductive cooling using a secondary process plane
US7860379B2 (en) * 2007-01-15 2010-12-28 Applied Materials, Inc. Temperature measurement and control of wafer support in thermal processing chamber
US8314368B2 (en) 2008-02-22 2012-11-20 Applied Materials, Inc. Silver reflectors for semiconductor processing chambers
US8986454B2 (en) * 2010-06-08 2015-03-24 Applied Materials, Inc. Window assembly for use in substrate processing systems
US9748121B2 (en) * 2013-03-05 2017-08-29 Applied Materials, Inc. Thermal coupled quartz dome heat sink
US10872790B2 (en) * 2014-10-20 2020-12-22 Applied Materials, Inc. Optical system

Also Published As

Publication number Publication date
WO2014182405A1 (en) 2014-11-13
CN105190851A (zh) 2015-12-23
TWI652367B (zh) 2019-03-01
US9711382B2 (en) 2017-07-18
US20170316964A1 (en) 2017-11-02
CN105190851B (zh) 2018-03-16
TWI609981B (zh) 2018-01-01
TW201821635A (zh) 2018-06-16
US20140334806A1 (en) 2014-11-13
KR20160006778A (ko) 2016-01-19
TW201447010A (zh) 2014-12-16

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