SG11201501993QA - Method for forming dense silicic film - Google Patents

Method for forming dense silicic film

Info

Publication number
SG11201501993QA
SG11201501993QA SG11201501993QA SG11201501993QA SG11201501993QA SG 11201501993Q A SG11201501993Q A SG 11201501993QA SG 11201501993Q A SG11201501993Q A SG 11201501993QA SG 11201501993Q A SG11201501993Q A SG 11201501993QA SG 11201501993Q A SG11201501993Q A SG 11201501993QA
Authority
SG
Singapore
Prior art keywords
forming dense
silicic film
film
dense silicic
forming
Prior art date
Application number
SG11201501993QA
Inventor
Yuki Ozaki
Takaaki Sakurai
Masakazu Kobayashi
Ozaki Yuki
Sakurai Takaaki
Kobayashi Masakazu
Original Assignee
Az Electronic Materials Luxembourg Sarl
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Az Electronic Materials Luxembourg Sarl filed Critical Az Electronic Materials Luxembourg Sarl
Publication of SG11201501993QA publication Critical patent/SG11201501993QA/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J7/00—Chemical treatment or coating of shaped articles made of macromolecular substances
    • C08J7/04—Coating
    • C08J7/048—Forming gas barrier coatings
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
    • B05D3/06—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to radiation
    • B05D3/061—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to radiation using U.V.
    • B05D3/065—After-treatment
    • B05D3/067—Curing or cross-linking the coating
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00—Nitrogen; Compounds thereof
    • C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
    • C01B21/068—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with silicon
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J7/00—Chemical treatment or coating of shaped articles made of macromolecular substances
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J7/00—Chemical treatment or coating of shaped articles made of macromolecular substances
    • C08J7/04—Coating
    • C08J7/0427—Coating with only one layer of a composition containing a polymer binder
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J7/00—Chemical treatment or coating of shaped articles made of macromolecular substances
    • C08J7/12—Chemical modification
    • C08J7/123—Treatment by wave energy or particle radiation
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D183/00—Coating compositions based on macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon, with or without sulfur, nitrogen, oxygen, or carbon only; Coating compositions based on derivatives of such polymers
    • C09D183/16—Coating compositions based on macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon, with or without sulfur, nitrogen, oxygen, or carbon only; Coating compositions based on derivatives of such polymers in which all the silicon atoms are connected by linkages other than oxygen atoms
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/02—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition
    • C23C18/12—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material
    • C23C18/1204—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material inorganic material, e.g. non-oxide and non-metallic such as sulfides, nitrides based compounds
    • C23C18/122—Inorganic polymers, e.g. silanes, polysilazanes, polysiloxanes
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/02—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition
    • C23C18/12—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material
    • C23C18/1229—Composition of the substrate
    • C23C18/1233—Organic substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/02—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition
    • C23C18/12—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material
    • C23C18/1229—Composition of the substrate
    • C23C18/1241—Metallic substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/02—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition
    • C23C18/12—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material
    • C23C18/1229—Composition of the substrate
    • C23C18/1245—Inorganic substrates other than metallic
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/14—Decomposition by irradiation, e.g. photolysis, particle radiation or by mixed irradiation sources
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J2483/00—Characterised by the use of macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon with or without sulfur, nitrogen, oxygen, or carbon only; Derivatives of such polymers
    • C08J2483/16—Characterised by the use of macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon with or without sulfur, nitrogen, oxygen, or carbon only; Derivatives of such polymers in which all the silicon atoms are connected by linkages other than oxygen atoms

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • General Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Inorganic Chemistry (AREA)
  • Thermal Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Polymers & Plastics (AREA)
  • Medicinal Chemistry (AREA)
  • Plasma & Fusion (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Wood Science & Technology (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Paints Or Removers (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Electroluminescent Light Sources (AREA)
SG11201501993QA 2012-10-11 2013-10-09 Method for forming dense silicic film SG11201501993QA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2012226078A JP6017256B2 (en) 2012-10-11 2012-10-11 Method for forming silicon dense film
PCT/JP2013/077487 WO2014057980A1 (en) 2012-10-11 2013-10-09 Method for forming dense silicic film

Publications (1)

Publication Number Publication Date
SG11201501993QA true SG11201501993QA (en) 2015-05-28

Family

ID=50477447

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11201501993QA SG11201501993QA (en) 2012-10-11 2013-10-09 Method for forming dense silicic film

Country Status (8)

Country Link
US (1) US9534145B2 (en)
EP (1) EP2907587B1 (en)
JP (1) JP6017256B2 (en)
KR (1) KR101935770B1 (en)
CN (1) CN104718030B (en)
SG (1) SG11201501993QA (en)
TW (1) TWI585161B (en)
WO (1) WO2014057980A1 (en)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2980394B1 (en) * 2011-09-26 2013-10-18 Commissariat Energie Atomique MULTILAYER STRUCTURE PROVIDING IMPROVED GAS SEALING
JP6003799B2 (en) * 2013-05-15 2016-10-05 コニカミノルタ株式会社 Method for producing gas barrier film
JP6295865B2 (en) * 2014-07-16 2018-03-20 コニカミノルタ株式会社 Gas barrier film
CN106987205B (en) * 2016-01-20 2019-05-21 富创国际顾问有限公司 Have the paint composite, preparation method and film and light-transmitting plate with heat-insulated anti-pollution paint constituent of heat-insulated anti-pollution
WO2017167779A1 (en) 2016-03-31 2017-10-05 Merck Patent Gmbh A color conversion sheet and an optical device
JP2017200861A (en) * 2016-05-02 2017-11-09 アーゼッド・エレクトロニック・マテリアルズ（ルクセンブルグ）ソシエテ・ア・レスポンサビリテ・リミテ Composition for dense siliceous film formation
KR102594867B1 (en) * 2016-09-20 2023-10-30 삼성디스플레이 주식회사 Window member, display apparatus including the same and manufacturing method of the window member
JP2018083736A (en) * 2016-11-24 2018-05-31 アーゼッド・エレクトロニック・マテリアルズ（ルクセンブルグ）ソシエテ・ア・レスポンサビリテ・リミテ Siloxazane compound, composition containing the same, and method for forming siliceous film using the same
US10647578B2 (en) * 2016-12-11 2020-05-12 L'Air Liquide, Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude N—H free and SI-rich per-hydridopolysilzane compositions, their synthesis, and applications
CN110139912A (en) 2016-12-20 2019-08-16 默克专利股份有限公司 Optical medium and optical device
JP6668287B2 (en) * 2017-04-04 2020-03-18 メルク、パテント、ゲゼルシャフト、ミット、ベシュレンクテル、ハフツングＭｅｒｃｋ Ｐａｔｅｎｔ ＧｍｂＨ Film forming composition and film forming method using the same
WO2019025392A1 (en) 2017-08-03 2019-02-07 Merck Patent Gmbh Quantum yield recovery
KR102192462B1 (en) 2017-12-14 2020-12-17 삼성에스디아이 주식회사 Composition for forming silica layer, silica layer, and electronic device
US11739220B2 (en) 2018-02-21 2023-08-29 L'Air Liquide, Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude Perhydropolysilazane compositions and methods for forming oxide films using same
CN109821485B (en) * 2019-04-11 2021-12-10 湖北科技学院 Preparation method of phase change heat storage capsule for thermal regulation of power lithium battery
US11724963B2 (en) 2019-05-01 2023-08-15 Corning Incorporated Pharmaceutical packages with coatings comprising polysilazane
CN110157332B (en) * 2019-05-23 2021-07-27 福建恒晶新材料科技有限公司 Polysilazane coating material, preparation method and application method
JP7356820B2 (en) * 2019-05-24 2023-10-05 東京応化工業株式会社 Film formation method
CN111822304A (en) * 2020-05-15 2020-10-27 江苏兴齐智能输电科技有限公司 Steel rod pipe surface treatment process
DE102020207380A1 (en) * 2020-06-15 2021-12-16 Joysonquin Automotive Systems Gmbh METHOD FOR MANUFACTURING A DECORATIVE PART AND DECORATIVE PART THAT CAN BE MANUFACTURED BY THIS METHOD
US20240261818A1 (en) 2021-05-28 2024-08-08 Mitsubishi Materials Corporation Method of manufacturing metal compound film

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10279362A (en) * 1997-03-31 1998-10-20 Tonen Corp Formation of sio2 ceramic film
JP2004155834A (en) * 2002-11-01 2004-06-03 Clariant Internatl Ltd Polysilazane-containing coating liquid
CA2500321C (en) * 2002-11-01 2012-03-06 Clariant International Ltd Polysilazane-containing coating solution
TW200413204A (en) * 2003-01-29 2004-08-01 Taiwan Semiconductor Mfg A method and system for controlling overhead hoist transport
DE102005034817A1 (en) * 2005-07-26 2007-02-01 Clariant International Limited Process for producing a thin vitreous coating on substrates to reduce gas permeation
US8393396B2 (en) 2009-07-11 2013-03-12 Baker Hughes Incorporated Subterranean valve operated by string relative movement
JP5267467B2 (en) 2010-01-12 2013-08-21 コニカミノルタ株式会社 Barrier film, method for producing barrier film, organic photoelectric conversion element having barrier film, and solar cell having the element
WO2011086839A1 (en) * 2010-01-12 2011-07-21 コニカミノルタホールディングス株式会社 Gas barrier film, process for production of gas barrier film, organic photoelectric conversion element that has gas barrier film, and solar cell that has the element
JP5381734B2 (en) 2010-01-14 2014-01-08 コニカミノルタ株式会社 Barrier film and organic electronic device
WO2012026482A1 (en) * 2010-08-27 2012-03-01 コニカミノルタホールディングス株式会社 Method for forming ceramic film and ceramic film forming device
JP5691309B2 (en) * 2010-09-06 2015-04-01 コニカミノルタ株式会社 Gas barrier film and electronic device using the same
JP5691947B2 (en) * 2011-09-02 2015-04-01 コニカミノルタ株式会社 Gas barrier film and method for producing gas barrier film

Also Published As

Publication number Publication date
JP2014077082A (en) 2014-05-01
TWI585161B (en) 2017-06-01
EP2907587A4 (en) 2016-07-06
EP2907587B1 (en) 2017-06-21
EP2907587A1 (en) 2015-08-19
CN104718030A (en) 2015-06-17
US9534145B2 (en) 2017-01-03
TW201425482A (en) 2014-07-01
WO2014057980A1 (en) 2014-04-17
KR20150068986A (en) 2015-06-22
US20150252222A1 (en) 2015-09-10
KR101935770B1 (en) 2019-01-08
CN104718030B (en) 2017-03-08
JP6017256B2 (en) 2016-10-26

Similar Documents

Publication Publication Date Title
SG11201501993QA (en) Method for forming dense silicic film
TWI563114B (en) Film deposition apparatus
HK1204663A1 (en) Apparatus and method for film formation
ZA201501833B (en) Method for obtaining 1-kestone
EP2842989A4 (en) Method for manufacturing hard coating film
PT3006352T (en) Device for forming packaging units
PL3346708T3 (en) Method for encoding image
HK1185923A1 (en) Film formation device
TWI560309B (en) Film deposition method
EP2835265A4 (en) Image-forming method
EP2842761A4 (en) Image-forming method
EP2837432A4 (en) Coating film formation method
GB2498944B (en) Thin film formation
IL227985A0 (en) Method for forming insulating film
GB2499199B (en) Thin film formation
GB201222958D0 (en) Film
TWI563120B (en) Film forming apparatus
HK1201800A1 (en) Method for forming packages
EP2837619A4 (en) Method for producing beta -alkoxypropionamide
EP2902212A4 (en) Image formation method
GB201215579D0 (en) Thin film formation
EP2784555A4 (en) Method for manufacturing phase difference film
EP2824130A4 (en) Method for producing polydialkylsilane
GB201216722D0 (en) Metrology method
GB201222955D0 (en) Film