SG11201407697RA - Overhead traveling vehicle system and control method for overhead traveling vehicle system - Google Patents

Overhead traveling vehicle system and control method for overhead traveling vehicle system

Info

Publication number
SG11201407697RA
SG11201407697RA SG11201407697RA SG11201407697RA SG11201407697RA SG 11201407697R A SG11201407697R A SG 11201407697RA SG 11201407697R A SG11201407697R A SG 11201407697RA SG 11201407697R A SG11201407697R A SG 11201407697RA SG 11201407697R A SG11201407697R A SG 11201407697RA
Authority
SG
Singapore
Prior art keywords
vehicle system
traveling vehicle
overhead traveling
control method
overhead
Prior art date
Application number
SG11201407697RA
Inventor
Tatsuji Ota
Original Assignee
Murata Machinery Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Machinery Ltd filed Critical Murata Machinery Ltd
Publication of SG11201407697RA publication Critical patent/SG11201407697RA/en

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B66HOISTING; LIFTING; HAULING
    • B66CCRANES; LOAD-ENGAGING ELEMENTS OR DEVICES FOR CRANES, CAPSTANS, WINCHES, OR TACKLES
    • B66C13/00Other constructional features or details
    • B66C13/18Control systems or devices
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02Storage devices
    • B65G1/04Storage devices mechanical
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67242Apparatus for monitoring, sorting or marking
    • H01L21/67288Monitoring of warpage, curvature, damage, defects or the like
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B66HOISTING; LIFTING; HAULING
    • B66CCRANES; LOAD-ENGAGING ELEMENTS OR DEVICES FOR CRANES, CAPSTANS, WINCHES, OR TACKLES
    • B66C19/00Cranes comprising trolleys or crabs running on fixed or movable bridges or gantries
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/6773Conveying cassettes, containers or carriers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67733Overhead conveying
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02Articles
    • B65G2201/0297Wafer cassette

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Automation & Control Theory (AREA)
  • Control And Safety Of Cranes (AREA)
  • Carriers, Traveling Bodies, And Overhead Traveling Cranes (AREA)
  • Warehouses Or Storage Devices (AREA)
SG11201407697RA 2012-07-26 2013-06-18 Overhead traveling vehicle system and control method for overhead traveling vehicle system SG11201407697RA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2012165563 2012-07-26
PCT/JP2013/066701 WO2014017222A1 (en) 2012-07-26 2013-06-18 Overhead traveling vehicle system and control method for overhead traveling vehicle system

Publications (1)

Publication Number Publication Date
SG11201407697RA true SG11201407697RA (en) 2015-04-29

Family

ID=49997038

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11201407697RA SG11201407697RA (en) 2012-07-26 2013-06-18 Overhead traveling vehicle system and control method for overhead traveling vehicle system

Country Status (8)

Country Link
US (1) US20150203333A1 (en)
EP (1) EP2878553A1 (en)
JP (1) JPWO2014017222A1 (en)
KR (1) KR20150016318A (en)
CN (1) CN104428217A (en)
SG (1) SG11201407697RA (en)
TW (1) TW201415574A (en)
WO (1) WO2014017222A1 (en)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
PT2620391E (en) * 2012-01-30 2014-08-26 Carefusion Germany 326 Gmbh Method for removing packets of medicine
TWI520258B (en) * 2013-09-27 2016-02-01 華亞科技股份有限公司 Lifting device and automatic handling system
CN104029996A (en) * 2014-05-15 2014-09-10 安徽珩业车轮有限公司 Feeding rack for cutting automobile wheel auxiliary plate
EP3159923B1 (en) * 2014-06-19 2021-06-16 Murata Machinery, Ltd. Carrier buffering device and buffering method
JP6048686B2 (en) * 2014-09-25 2016-12-21 村田機械株式会社 Temporary storage device, transport system and temporary storage method
JP6642577B2 (en) * 2015-08-14 2020-02-05 村田機械株式会社 Transport system
JP6471702B2 (en) * 2016-01-12 2019-02-20 株式会社ダイフク Article conveying device
FR3048227B1 (en) * 2016-02-25 2019-06-28 Airbus Operations UNIT FLOOR AND FRONT AIRCRAFT TIP COMPRISING SUCH A FLOOR AND METHOD FOR INTEGRATING SUCH FRONT POINT
WO2017199593A1 (en) * 2016-05-20 2017-11-23 村田機械株式会社 Transport vehicle and transport method
SG11202001297YA (en) * 2017-08-16 2020-03-30 Murata Machinery Ltd Overhead transport vehicle, overhead transport system, and control method for overhead transport vehicle
CN107720063A (en) * 2017-08-22 2018-02-23 舒城县东方红食品有限公司 A kind of dry automation gripping of vegetables, which is put, drives fly rack
US10622236B2 (en) 2017-08-30 2020-04-14 Taiwan Semiconductor Manufacturing Co., Ltd. Apparatus and method for handling wafer carrier doors
JP7040637B2 (en) * 2018-10-29 2022-03-23 村田機械株式会社 Ceiling vehicle, ceiling vehicle system, and obstacle detection method
EP4023568B1 (en) * 2019-08-28 2024-08-28 Murata Machinery, Ltd. Overhead carrier vehicle and overhead carrier vehicle system
CN113371614B (en) * 2020-03-10 2023-01-31 长鑫存储技术有限公司 Automatic crown block collision avoidance system and method
US20230202806A1 (en) * 2020-06-08 2023-06-29 Murata Machinery, Ltd. Overhead transport vehicle, and method of controlling raising/lowering of gripping unit
US11676841B2 (en) * 2021-04-16 2023-06-13 Taiwan Semiconductor Manufacturing Company, Ltd. Overhead hoist transport device and method of using the same
CN114906571B (en) * 2022-05-25 2024-03-19 广汽本田汽车有限公司 Engine conveying monitoring method and conveying line
WO2024034175A1 (en) * 2022-08-09 2024-02-15 村田機械株式会社 Overhead conveying vehicle

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0561106U (en) * 1992-01-27 1993-08-10 村田機械株式会社 Package detection system
JP2570302Y2 (en) * 1992-11-05 1998-05-06 四国計測工業株式会社 Crane rope deflection angle detection device
JP3086645B2 (en) * 1995-12-13 2000-09-11 富士変速機株式会社 Drive control device for lifting body
JP4702693B2 (en) * 2004-02-12 2011-06-15 ムラテックオートメーション株式会社 Transport cart and transport device
JP5380747B2 (en) * 2009-09-16 2014-01-08 株式会社日立製作所 Monitoring system and monitoring method under suspended load
JP5457322B2 (en) * 2010-09-30 2014-04-02 富士フイルム株式会社 Inspection method
JP5229363B2 (en) * 2010-11-04 2013-07-03 村田機械株式会社 Transport system and transport method

Also Published As

Publication number Publication date
TW201415574A (en) 2014-04-16
EP2878553A1 (en) 2015-06-03
WO2014017222A1 (en) 2014-01-30
US20150203333A1 (en) 2015-07-23
CN104428217A (en) 2015-03-18
JPWO2014017222A1 (en) 2016-07-07
KR20150016318A (en) 2015-02-11

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