SG110064A1 - Resist developing composition - Google Patents

Resist developing composition

Info

Publication number
SG110064A1
SG110064A1 SG200304355A SG200304355A SG110064A1 SG 110064 A1 SG110064 A1 SG 110064A1 SG 200304355 A SG200304355 A SG 200304355A SG 200304355 A SG200304355 A SG 200304355A SG 110064 A1 SG110064 A1 SG 110064A1
Authority
SG
Singapore
Prior art keywords
developing composition
resist developing
resist
composition
developing
Prior art date
Application number
SG200304355A
Inventor
Matsubara Masahide
Maruyama Taketo
Sakurai Naoto
Original Assignee
Mitsubishi Gas Chemical Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Gas Chemical Co filed Critical Mitsubishi Gas Chemical Co
Priority to SG200304355A priority Critical patent/SG110064A1/en
Publication of SG110064A1 publication Critical patent/SG110064A1/en

Links

SG200304355A 2003-07-14 2003-07-14 Resist developing composition SG110064A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
SG200304355A SG110064A1 (en) 2003-07-14 2003-07-14 Resist developing composition

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SG200304355A SG110064A1 (en) 2003-07-14 2003-07-14 Resist developing composition

Publications (1)

Publication Number Publication Date
SG110064A1 true SG110064A1 (en) 2005-04-28

Family

ID=34699267

Family Applications (1)

Application Number Title Priority Date Filing Date
SG200304355A SG110064A1 (en) 2003-07-14 2003-07-14 Resist developing composition

Country Status (1)

Country Link
SG (1) SG110064A1 (en)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0605095A1 (en) * 1992-12-28 1994-07-06 Sumitomo Chemical Company, Limited Apparatus and method for preparing a developer solution
JPH08160634A (en) * 1994-12-08 1996-06-21 Tokyo Ohka Kogyo Co Ltd Resist developer composition
US20020140889A1 (en) * 2001-03-30 2002-10-03 Hirohiko Nishiki Method of manufacturing a liquid crystal display device with a mult-layer interlayer insulator

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0605095A1 (en) * 1992-12-28 1994-07-06 Sumitomo Chemical Company, Limited Apparatus and method for preparing a developer solution
JPH08160634A (en) * 1994-12-08 1996-06-21 Tokyo Ohka Kogyo Co Ltd Resist developer composition
US20020140889A1 (en) * 2001-03-30 2002-10-03 Hirohiko Nishiki Method of manufacturing a liquid crystal display device with a mult-layer interlayer insulator

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