SG107600A1 - Multilayer substrate metallization for ic interconnection - Google Patents

Multilayer substrate metallization for ic interconnection

Info

Publication number
SG107600A1
SG107600A1 SG200203893A SG200203893A SG107600A1 SG 107600 A1 SG107600 A1 SG 107600A1 SG 200203893 A SG200203893 A SG 200203893A SG 200203893 A SG200203893 A SG 200203893A SG 107600 A1 SG107600 A1 SG 107600A1
Authority
SG
Singapore
Prior art keywords
layer
substrate
interconnection
metallization
multilayer substrate
Prior art date
Application number
SG200203893A
Inventor
Fan Zhang
Li Ming
Original Assignee
Agency Science Tech & Res
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency Science Tech & Res filed Critical Agency Science Tech & Res
Priority to SG200203893A priority Critical patent/SG107600A1/en
Priority to PCT/SG2003/000154 priority patent/WO2004004003A1/en
Priority to AU2003251281A priority patent/AU2003251281A1/en
Publication of SG107600A1 publication Critical patent/SG107600A1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
    • H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
    • H01L23/49811—Additional leads joined to the metallisation on the insulating substrate, e.g. pins, bumps, wires, flat leads
    • H01L23/49816—Spherical bumps on the substrate for external connection, e.g. ball grid arrays [BGA]
    • H—ELECTRICITY
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    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/02—Bonding areas ; Manufacturing methods related thereto
    • H01L24/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
    • H01L24/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
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    • H01L2224/02—Bonding areas; Manufacturing methods related thereto
    • H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
    • H01L2224/0401—Bonding areas specifically adapted for bump connectors, e.g. under bump metallisation [UBM]
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    • H01L2224/02—Bonding areas; Manufacturing methods related thereto
    • H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
    • H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
    • H01L2224/05001—Internal layers
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    • H01L2224/02—Bonding areas; Manufacturing methods related thereto
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    • H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
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    • H01L2224/0502—Disposition
    • H01L2224/05026—Disposition the internal layer being disposed in a recess of the surface
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    • H01L2224/10—Bump connectors; Manufacturing methods related thereto
    • H01L2224/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
    • H01L2224/13—Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
    • H01L2224/13001—Core members of the bump connector
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    • H01L24/10—Bump connectors ; Manufacturing methods related thereto
    • H01L24/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
    • H01L24/13—Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
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    • H01L2924/1025—Semiconducting materials
    • H01L2924/10251—Elemental semiconductors, i.e. Group IV
    • H01L2924/10253—Silicon [Si]
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    • H01L2924/10—Details of semiconductor or other solid state devices to be connected
    • H01L2924/11—Device type
    • H01L2924/14—Integrated circuits

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Parts Printed On Printed Circuit Boards (AREA)
  • Wire Bonding (AREA)

Abstract

A substrate metallization for soldering, with a Pb-free solder or a eutectic SnPb solder (4), to a thin film under-bump-metallization (UBM) of a Si die, comprising: a substrate (1), a layer of Cu (20) formed on a portion of the substrate (1), a layer of Ni (21) formed on the Cu layer (20), an oxidation protection layer (22), and a Ni-barrier layer (23), between the Ni layer (21)and the oxidation protection layer (22), adapted to inhibit diffusion of Ni from the Ni layer (21) to the solder (4) during a reflow process or during high temperature storage.
SG200203893A 2002-06-27 2002-06-27 Multilayer substrate metallization for ic interconnection SG107600A1 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
SG200203893A SG107600A1 (en) 2002-06-27 2002-06-27 Multilayer substrate metallization for ic interconnection
PCT/SG2003/000154 WO2004004003A1 (en) 2002-06-27 2003-06-26 Multilayer substrate metallization for ic interconnection
AU2003251281A AU2003251281A1 (en) 2002-06-27 2003-06-26 Multilayer substrate metallization for ic interconnection

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SG200203893A SG107600A1 (en) 2002-06-27 2002-06-27 Multilayer substrate metallization for ic interconnection

Publications (1)

Publication Number Publication Date
SG107600A1 true SG107600A1 (en) 2004-12-29

Family

ID=29997744

Family Applications (1)

Application Number Title Priority Date Filing Date
SG200203893A SG107600A1 (en) 2002-06-27 2002-06-27 Multilayer substrate metallization for ic interconnection

Country Status (3)

Country Link
AU (1) AU2003251281A1 (en)
SG (1) SG107600A1 (en)
WO (1) WO2004004003A1 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8659155B2 (en) 2009-11-05 2014-02-25 Taiwan Semiconductor Manufacturing Company, Ltd. Mechanisms for forming copper pillar bumps
US9227257B2 (en) 2012-04-24 2016-01-05 Seagate Technology Llc Laser subassembly metallization for heat assisted magnetic recording
US10692830B2 (en) 2017-10-05 2020-06-23 Texas Instruments Incorporated Multilayers of nickel alloys as diffusion barrier layers
US11127704B2 (en) * 2017-11-28 2021-09-21 Taiwan Semiconductor Manufacturing Co., Ltd. Semiconductor device with bump structure and method of making semiconductor device

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5449955A (en) * 1994-04-01 1995-09-12 At&T Corp. Film circuit metal system for use with bumped IC packages
US6352634B1 (en) * 1998-06-10 2002-03-05 W. C. Heraeus Gmbh & Co. Kg Method for producing a lead-free substrate
US6445069B1 (en) * 2001-01-22 2002-09-03 Flip Chip Technologies, L.L.C. Electroless Ni/Pd/Au metallization structure for copper interconnect substrate and method therefor

Also Published As

Publication number Publication date
AU2003251281A1 (en) 2004-01-19
WO2004004003A8 (en) 2004-04-15
WO2004004003A1 (en) 2004-01-08

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