SG10202010128QA - Euv reticle pod - Google Patents
Euv reticle podInfo
- Publication number
- SG10202010128QA SG10202010128QA SG10202010128QA SG10202010128QA SG10202010128QA SG 10202010128Q A SG10202010128Q A SG 10202010128QA SG 10202010128Q A SG10202010128Q A SG 10202010128QA SG 10202010128Q A SG10202010128Q A SG 10202010128QA SG 10202010128Q A SG10202010128Q A SG 10202010128QA
- Authority
- SG
- Singapore
- Prior art keywords
- reticle pod
- euv reticle
- euv
- pod
- reticle
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/66—Containers specially adapted for masks, mask blanks or pellicles; Preparation thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67359—Closed carriers specially adapted for containing masks, reticles or pellicles
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/22—Masks or mask blanks for imaging by radiation of 100nm or shorter wavelength, e.g. X-ray masks, extreme ultraviolet [EUV] masks; Preparation thereof
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Investigating Or Analysing Biological Materials (AREA)
- Sampling And Sample Adjustment (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US16/857,197 US11249392B2 (en) | 2017-01-25 | 2020-04-24 | EUV reticle pod |
Publications (1)
Publication Number | Publication Date |
---|---|
SG10202010128QA true SG10202010128QA (en) | 2021-11-29 |
Family
ID=78130024
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG10202010128QA SG10202010128QA (en) | 2020-04-24 | 2020-10-13 | Euv reticle pod |
Country Status (5)
Country | Link |
---|---|
JP (1) | JP7176165B2 (en) |
KR (1) | KR102569146B1 (en) |
CN (1) | CN113555302A (en) |
SG (1) | SG10202010128QA (en) |
TW (1) | TWI782348B (en) |
Family Cites Families (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5042655A (en) * | 1989-09-27 | 1991-08-27 | E. I. Du Pont De Nemours & Co. | Pellicle packaging and handling system |
US5305878A (en) * | 1993-04-01 | 1994-04-26 | Yen Yung Tsai | Packaged optical pellicle |
JP2002287332A (en) * | 2001-03-26 | 2002-10-03 | Mitsubishi Electric Corp | Mask case |
TWI319123B (en) * | 2002-02-22 | 2010-01-01 | Asml Holding Nv | System and method for using a two part cover for protecting a reticle |
TWI247974B (en) * | 2004-03-11 | 2006-01-21 | Gudeng Prec Ind Co Ltd | Optical mask positioning device |
JP2006103795A (en) * | 2004-09-10 | 2006-04-20 | Nippon Valqua Ind Ltd | Glass substrate storage case, glass substrate replacement device, glass substrate control device, glass substrate distribution method, sealing member and sealing structure using this sealing member |
US8540289B2 (en) * | 2005-05-31 | 2013-09-24 | Vantec Co., Ltd. | Opening/closing structure for container for conveying thin plate |
JP2007025183A (en) * | 2005-07-15 | 2007-02-01 | Shin Etsu Polymer Co Ltd | Storage container for pellicle |
JP2007153402A (en) * | 2005-12-06 | 2007-06-21 | Takiron Co Ltd | Storage case |
TWI308550B (en) * | 2006-12-29 | 2009-04-11 | Ind Tech Res Inst | A clean container with elastic fixing structure |
TWI485796B (en) * | 2008-11-21 | 2015-05-21 | Gudeng Prec Industral Co Ltd | A thin-plate container |
TWI378887B (en) * | 2009-12-29 | 2012-12-11 | Gudeng Prec Industral Co Ltd | Reticle pod and supporting components therebetween |
TWI414464B (en) * | 2011-01-11 | 2013-11-11 | Gudeng Prec Ind Co Ltd | Euv pod with fixed apparatus |
KR20130003055A (en) * | 2011-04-14 | 2013-01-09 | 삼성전자주식회사 | Raticle pod |
JP5684752B2 (en) * | 2012-03-29 | 2015-03-18 | 信越化学工業株式会社 | Pellicle storage container |
WO2018044678A1 (en) * | 2016-08-27 | 2018-03-08 | Entegris, Inc. | Reticle pod having side containment of reticle |
CN108375872B (en) * | 2017-01-25 | 2022-04-15 | 家登精密工业股份有限公司 | Extreme ultraviolet light mask container |
TWI623810B (en) * | 2017-01-26 | 2018-05-11 | 家登精密工業股份有限公司 | Reticle pod |
KR101880401B1 (en) * | 2017-09-15 | 2018-07-20 | 주식회사 미래솔루텍 | Mask assembly case |
TWI690771B (en) * | 2018-01-11 | 2020-04-11 | 家登精密工業股份有限公司 | Reticle pressing unit and euv reticle pod using same |
TWI687760B (en) * | 2019-04-16 | 2020-03-11 | 家登精密工業股份有限公司 | Mask box with spoiler structure |
-
2020
- 2020-09-14 JP JP2020153672A patent/JP7176165B2/en active Active
- 2020-10-13 SG SG10202010128QA patent/SG10202010128QA/en unknown
- 2020-11-02 CN CN202011205778.8A patent/CN113555302A/en active Pending
- 2020-11-02 TW TW109138132A patent/TWI782348B/en active
- 2020-12-10 KR KR1020200172411A patent/KR102569146B1/en active IP Right Grant
Also Published As
Publication number | Publication date |
---|---|
JP7176165B2 (en) | 2022-11-22 |
JP2021173986A (en) | 2021-11-01 |
KR102569146B1 (en) | 2023-08-21 |
TWI782348B (en) | 2022-11-01 |
KR20210132577A (en) | 2021-11-04 |
TW202141173A (en) | 2021-11-01 |
CN113555302A (en) | 2021-10-26 |
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