SG10201912731QA - Determining critical parameters using a high-dimensional variable selection model - Google Patents

Determining critical parameters using a high-dimensional variable selection model

Info

Publication number
SG10201912731QA
SG10201912731QA SG10201912731QA SG10201912731QA SG10201912731QA SG 10201912731Q A SG10201912731Q A SG 10201912731QA SG 10201912731Q A SG10201912731Q A SG 10201912731QA SG 10201912731Q A SG10201912731Q A SG 10201912731QA SG 10201912731Q A SG10201912731Q A SG 10201912731QA
Authority
SG
Singapore
Prior art keywords
selection model
critical parameters
variable selection
dimensional variable
determining critical
Prior art date
Application number
SG10201912731QA
Inventor
Wei Chang
Joseph Gutierrez
Krishna Rao
Original Assignee
Kla Tencor Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kla Tencor Corp filed Critical Kla Tencor Corp
Publication of SG10201912731QA publication Critical patent/SG10201912731QA/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67253—Process monitoring, e.g. flow or thickness monitoring
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS], computer integrated manufacturing [CIM]
    • G05B19/41875—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS], computer integrated manufacturing [CIM] characterised by quality surveillance of production
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
    • G06N7/00—Computing arrangements based on specific mathematical models
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/80—Management or planning
SG10201912731QA 2014-12-03 2015-12-02 Determining critical parameters using a high-dimensional variable selection model SG10201912731QA (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201462087187P 2014-12-03 2014-12-03
US201562183101P 2015-06-22 2015-06-22
US14/955,752 US10361105B2 (en) 2014-12-03 2015-12-01 Determining critical parameters using a high-dimensional variable selection model

Publications (1)

Publication Number Publication Date
SG10201912731QA true SG10201912731QA (en) 2020-02-27

Family

ID=56092399

Family Applications (2)

Application Number Title Priority Date Filing Date
SG11201704383QA SG11201704383QA (en) 2014-12-03 2015-12-02 Determining critical parameters using a high-dimensional variable selection model
SG10201912731QA SG10201912731QA (en) 2014-12-03 2015-12-02 Determining critical parameters using a high-dimensional variable selection model

Family Applications Before (1)

Application Number Title Priority Date Filing Date
SG11201704383QA SG11201704383QA (en) 2014-12-03 2015-12-02 Determining critical parameters using a high-dimensional variable selection model

Country Status (7)

Country Link
US (2) US10361105B2 (en)
JP (2) JP6641372B2 (en)
KR (1) KR20170093878A (en)
CN (1) CN107408522B (en)
IL (2) IL280008B (en)
SG (2) SG11201704383QA (en)
WO (1) WO2016090013A1 (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10438699B2 (en) * 2016-05-10 2019-10-08 Macau University Of Science And Technology Method and system for determining an association of biological features with a medical condition
TWI662424B (en) * 2017-12-25 2019-06-11 帆宣系統科技股份有限公司 Selection method of leading auxiliary parameters and method for pre-diagnosis of equipment maintenance by combining key parameters and leading auxiliary parameters
CN109901058B (en) * 2019-03-29 2021-04-02 上海华力集成电路制造有限公司 Analysis method of semiconductor device
JP2020181959A (en) * 2019-04-26 2020-11-05 東京エレクトロン株式会社 Learning method, management device and management program
CN110377941B (en) * 2019-06-10 2020-04-24 中国人民解放军军事科学院国防科技创新研究院 Method for establishing penalty blind likelihood kriging proxy model of satellite temperature field
KR102404982B1 (en) 2020-04-28 2022-06-02 이진행 Device and method for variable selection using elastic net regression
KR20220039118A (en) 2020-09-21 2022-03-29 이진행 Device and method for variable selection using weighted information value

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JPH06168863A (en) 1991-03-01 1994-06-14 Texas Instr Inc <Ti> Apparatus and method for execution of monitoring and control of semiconductor manufacturing apparatus
US6519498B1 (en) 2000-03-10 2003-02-11 Applied Materials, Inc. Method and apparatus for managing scheduling in a multiple cluster tool
WO2006046650A1 (en) 2004-10-29 2006-05-04 Jsr Corporation Probe member for wafer inspection, probe card for wafer inspection and wafer inspection equipment
JP4741936B2 (en) * 2004-11-19 2011-08-10 株式会社日立ハイテクノロジーズ Data processing apparatus, inspection work support system, and data processing method
US7454312B2 (en) 2006-03-15 2008-11-18 Applied Materials, Inc. Tool health information monitoring and tool performance analysis in semiconductor processing
US7716023B2 (en) 2007-02-13 2010-05-11 Oracle America, Inc. Multidimensional process corner derivation using surrogate based simultaneous yield analysis
US7372583B1 (en) 2007-04-12 2008-05-13 Tokyo Electron Limited Controlling a fabrication tool using support vector machine
US8285414B2 (en) 2009-03-31 2012-10-09 International Business Machines Corporation Method and system for evaluating a machine tool operating characteristics
US8255346B2 (en) 2009-11-11 2012-08-28 International Business Machines Corporation Methods and systems for variable group selection and temporal causal modeling
US8346688B2 (en) 2009-11-25 2013-01-01 International Business Machines Corporation Predicting states of subjects
US8723869B2 (en) * 2011-03-21 2014-05-13 Tokyo Electron Limited Biologically based chamber matching
US8868371B2 (en) * 2011-09-09 2014-10-21 Infineon Technologies Ag Method and device for determining test sets of operating parameter values for an electronic component
US10096478B2 (en) * 2012-04-12 2018-10-09 Kla-Tencor Corporation System and method for rejuvenating an imaging sensor degraded by exposure to extreme ultraviolet or deep ultraviolet light
US9746849B2 (en) 2012-11-09 2017-08-29 Tokyo Electron Limited Method and apparatus for autonomous tool parameter impact identification system for semiconductor manufacturing
TWI549007B (en) * 2013-02-07 2016-09-11 先知科技股份有限公司 Method for searching and analyzing process parameters and computer program product thereof
WO2014172750A1 (en) * 2013-04-26 2014-10-30 Minelab Electronics Pty Limited Discrimination method of a metal detector
CN103488135B (en) 2013-08-14 2015-11-04 沈阳中科博微自动化技术有限公司 A kind of statistical process control method for semiconductor production machining process monitoring

Also Published As

Publication number Publication date
KR20170093878A (en) 2017-08-16
CN107408522B (en) 2020-12-29
IL280008B (en) 2022-09-01
JP6641372B2 (en) 2020-02-05
IL252146B (en) 2021-01-31
IL280008A (en) 2021-03-01
WO2016090013A1 (en) 2016-06-09
JP2020061575A (en) 2020-04-16
JP2018504772A (en) 2018-02-15
US20160163574A1 (en) 2016-06-09
CN107408522A (en) 2017-11-28
US10361105B2 (en) 2019-07-23
IL252146A0 (en) 2017-07-31
US20190311928A1 (en) 2019-10-10
JP6893549B2 (en) 2021-06-23
US11456194B2 (en) 2022-09-27
SG11201704383QA (en) 2017-06-29

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