SG10201904997TA - Filament assembly - Google Patents

Filament assembly

Info

Publication number
SG10201904997TA
SG10201904997TA SG10201904997TA SG10201904997TA SG10201904997TA SG 10201904997T A SG10201904997T A SG 10201904997TA SG 10201904997T A SG10201904997T A SG 10201904997TA SG 10201904997T A SG10201904997T A SG 10201904997TA SG 10201904997T A SG10201904997T A SG 10201904997TA
Authority
SG
Singapore
Prior art keywords
filament assembly
filament
assembly
Prior art date
Application number
SG10201904997TA
Inventor
Murray Booth Alastair
Chua Alvin
Ong Dennis
Tyldesley-Worster Richard
Gang Chen Carl
Enchen Guo
Dawber Marcus
Original Assignee
Micromass Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from GBGB1810825.8A external-priority patent/GB201810825D0/en
Application filed by Micromass Ltd filed Critical Micromass Ltd
Publication of SG10201904997TA publication Critical patent/SG10201904997TA/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/14—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers
    • H01J49/147—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers with electrons, e.g. electron impact ionisation, electron attachment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/20—Ion sources; Ion guns using particle beam bombardment, e.g. ionisers
    • H01J27/205—Ion sources; Ion guns using particle beam bombardment, e.g. ionisers with electrons, e.g. electron impact ionisation, electron attachment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/08—Ion sources; Ion guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/06—Electron- or ion-optical arrangements
    • H01J49/067—Ion lenses, apertures, skimmers

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Combustion & Propulsion (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)
SG10201904997TA 2018-06-01 2019-05-31 Filament assembly SG10201904997TA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
SG10201804688V 2018-06-01
GBGB1810825.8A GB201810825D0 (en) 2018-06-01 2018-07-02 Filament assembly

Publications (1)

Publication Number Publication Date
SG10201904997TA true SG10201904997TA (en) 2020-01-30

Family

ID=67385661

Family Applications (1)

Application Number Title Priority Date Filing Date
SG10201904997TA SG10201904997TA (en) 2018-06-01 2019-05-31 Filament assembly

Country Status (6)

Country Link
US (1) US11972937B2 (en)
CN (1) CN112368800B (en)
DE (1) DE112019002788T5 (en)
GB (2) GB2585158B (en)
SG (1) SG10201904997TA (en)
WO (1) WO2019229447A1 (en)

Family Cites Families (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3527937A (en) * 1967-04-11 1970-09-08 Perkin Elmer Corp Electron bombardment type ion source for a mass spectrometer
US5401962A (en) 1993-06-14 1995-03-28 Ferran Scientific Residual gas sensor utilizing a miniature quadrupole array
JPH07153368A (en) 1993-11-30 1995-06-16 Sony Corp Filament support tool
US5543625A (en) * 1994-05-20 1996-08-06 Finnigan Corporation Filament assembly for mass spectrometer ion sources
US5703372A (en) 1996-10-30 1997-12-30 Eaton Corporation Endcap for indirectly heated cathode of ion source
US5763890A (en) 1996-10-30 1998-06-09 Eaton Corporation Cathode mounting for ion source with indirectly heated cathode
US7838842B2 (en) * 1999-12-13 2010-11-23 Semequip, Inc. Dual mode ion source for ion implantation
CN2598132Y (en) * 2003-01-30 2004-01-07 中国科学院近代物理研究所 Detachable metal thermo ionization vacuum bare gauge
US7902529B2 (en) 2007-08-02 2011-03-08 Thermo Finnigan Llc Method and apparatus for selectively providing electrons in an ion source
WO2009060762A1 (en) 2007-11-05 2009-05-14 Hamamatsu Photonics K.K. Electron beam source, electron beam irradiator and x-ray tube employing the electron beam source, x-ray irradiator in which the x-ray tube is arranged, and method for manufacturing electron beam source
JP2009117133A (en) 2007-11-05 2009-05-28 Hamamatsu Photonics Kk Electron beam source
US20100239828A1 (en) 2009-03-19 2010-09-23 Cornaby Sterling W Resistively heated small planar filament
US8247971B1 (en) 2009-03-19 2012-08-21 Moxtek, Inc. Resistively heated small planar filament
US20110018423A1 (en) * 2009-07-27 2011-01-27 Terry Sheng Indirect heated cathode of ion implanter
JP5856964B2 (en) 2009-10-08 2016-02-10 パーキンエルマー・ヘルス・サイエンシーズ・インコーポレイテッドＰｅｒｋｉｎｅｌｍｅｒ Ｈｅａｌｔｈ Ｓｃｉｅｎｃｅｓ， Ｉｎｃ． Coupling device
CN202977356U (en) 2009-10-12 2013-06-05 珀金埃尔默健康科技有限公司 Source module, mass spectrometer and instrument including the mass spectrometer, and end lens and complete equipment including the end lens
US8330101B2 (en) 2010-01-19 2012-12-11 Agilent Technologies, Inc. System and method for replacing an ion source in a mass spectrometer
US8896195B2 (en) * 2010-10-21 2014-11-25 Hermes Microvision, Inc. Filament for electron source
EP2897155B1 (en) 2012-09-12 2018-05-23 Shimadzu Corporation X-ray tube device
EP3063780B1 (en) 2013-10-29 2021-06-02 Varex Imaging Corporation X-ray tube having planar emitter with tunable emission characteristics and magnetic steering and focusing
CN205508767U (en) * 2016-03-23 2016-08-24 中国科学院等离子体物理研究所 Scalable rotation dismantlement type fast ion source device
CN106653556B (en) * 2016-11-17 2019-02-15 中国电子科技集团公司第四十八研究所 A kind of ion source
CN106653528B (en) * 2016-12-29 2019-01-29 清华大学 Cathode assembly and X-ray source and CT equipment with the cathode assembly
CN207250295U (en) * 2017-09-21 2018-04-17 烟台华科检测设备有限公司 A kind of filament transformer of replacement easy to repair

Also Published As

Publication number Publication date
US11972937B2 (en) 2024-04-30
GB2585158A (en) 2020-12-30
GB202013843D0 (en) 2020-10-21
CN112368800B (en) 2024-05-03
GB2575547A (en) 2020-01-15
WO2019229447A1 (en) 2019-12-05
GB2575547B (en) 2020-10-21
US20210210324A1 (en) 2021-07-08
GB201907758D0 (en) 2019-07-17
GB2585158B (en) 2021-07-28
CN112368800A (en) 2021-02-12
DE112019002788T5 (en) 2021-03-04

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