SG10201811843QA - Surface inspection system, apparatus, and method - Google Patents

Surface inspection system, apparatus, and method

Info

Publication number
SG10201811843QA
SG10201811843QA SG10201811843QA SG10201811843QA SG 10201811843Q A SG10201811843Q A SG 10201811843QA SG 10201811843Q A SG10201811843Q A SG 10201811843QA SG 10201811843Q A SG10201811843Q A SG 10201811843QA
Authority
SG
Singapore
Prior art keywords
detector
inspection system
surface inspection
terahertz emitter
computing device
Prior art date
Application number
Inventor
Gary E Georgeson
Keith L Mciver
Paul S Rutherford
Original Assignee
Boeing Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Boeing Co filed Critical Boeing Co
Publication of SG10201811843QA publication Critical patent/SG10201811843QA/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3563—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing solids; Preparation of samples therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3581—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light using far infrared light; using Terahertz radiation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/061—Sources

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Toxicology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

SURFACE INSPECTION SYSTEM, APPARATUS, AND METHOD An apparatus for surface inspection comprises a terahertz emitter, a detector, and a computing device. The terahertz emitter is oriented to emit energy toward a surface having a surface layer disposed on the surface in a proximity of a surface feature. The detector is 5 positioned to receive the energy from the terahertz emitter that is reflected by the surface. The computing device is in signal communication with the detector and is configured to detect the surface feature using a signal from the detector. Figure 1 10
SG10201811843Q 2018-03-21 2018-12-31 Surface inspection system, apparatus, and method SG10201811843QA (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US15/927,591 US10976244B2 (en) 2018-03-21 2018-03-21 Surface inspection system, apparatus, and method

Publications (1)

Publication Number Publication Date
SG10201811843QA true SG10201811843QA (en) 2019-10-30

Family

ID=65904258

Family Applications (1)

Application Number Title Priority Date Filing Date
SG10201811843Q SG10201811843QA (en) 2018-03-21 2018-12-31 Surface inspection system, apparatus, and method

Country Status (5)

Country Link
US (1) US10976244B2 (en)
EP (1) EP3543683B1 (en)
JP (1) JP7432991B2 (en)
CN (1) CN110296954B (en)
SG (1) SG10201811843QA (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10643324B2 (en) * 2018-08-30 2020-05-05 Saudi Arabian Oil Company Machine learning system and data fusion for optimization of deployment conditions for detection of corrosion under insulation
US10871444B2 (en) * 2018-08-30 2020-12-22 Saudi Arabian Oil Company Inspection and failure detection of corrosion under fireproofing insulation using a hybrid sensory system
US10533937B1 (en) 2018-08-30 2020-01-14 Saudi Arabian Oil Company Cloud-based machine learning system and data fusion for the prediction and detection of corrosion under insulation
DE102019109339B4 (en) * 2019-04-09 2021-04-08 CiTEX Holding GmbH Method for calibrating a THz measuring device, THz measuring method and corresponding THz measuring device
CN114486022B (en) * 2022-01-14 2024-06-21 浙江树人学院（浙江树人大学） Topological insulator micro-pressure detection device

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2405466B (en) 2003-08-27 2006-01-25 Teraview Ltd Method and apparatus for investigating a non-planner sample
US7145148B2 (en) * 2003-09-25 2006-12-05 Alfano Robert R Systems and methods for non-destructively detecting material abnormalities beneath a coated surface
US9909986B2 (en) 2003-10-15 2018-03-06 Applied Research And Photonics, Inc. Thickness determination and layer characterization using terahertz scanning reflectometry
US7626400B2 (en) * 2005-02-15 2009-12-01 Walleye Technologies, Inc. Electromagnetic scanning imager
KR101545419B1 (en) * 2011-02-10 2015-08-18 가부시키가이샤 히다치 하이테크놀로지즈 Device for detecting foreign matter and method for detecting foreign matter
JP2013213687A (en) 2012-03-30 2013-10-17 Mitsubishi Heavy Ind Ltd Sealant inspection method, sealant inspection apparatus and aircraft member
JP6074908B2 (en) * 2012-04-26 2017-02-08 Ｊｆｅスチール株式会社 Surface inspection apparatus and defect measurement method
US9414026B2 (en) * 2013-01-25 2016-08-09 The Boeing Company System and method for automated crack inspection and repair
GB201303324D0 (en) * 2013-02-25 2013-04-10 Subterandt Ltd Passive detection of deformation under coatings
JP6459249B2 (en) 2014-07-01 2019-01-30 大日本印刷株式会社 LAMINATE INSPECTING METHOD, LAMINATE MANUFACTURING METHOD, AND LAMINATE INSPECTING DEVICE
DE102014012095A1 (en) 2014-08-13 2016-02-18 Steinbichler Optotechnik Gmbh Method and device for testing a tire
JP2016075618A (en) * 2014-10-08 2016-05-12 パイオニア株式会社 Irregularity detection device and irregularity detection method, computer program and recording medium
US10168287B2 (en) * 2015-06-12 2019-01-01 The Boeing Company Automated detection of fatigue cracks around fasteners using millimeter waveguide probe
CN105333841B (en) * 2015-12-01 2017-12-29 中国矿业大学 Metal Surface Roughness detection method based on reflection-type terahertz time-domain spectroscopy
CN106226836A (en) * 2016-08-29 2016-12-14 北京农业信息技术研究中心 Chip acquisition device and method in poultry body based on Terahertz Technology
CN106769995A (en) 2017-01-25 2017-05-31 长春理工大学 Prototype off-line programing robot terahertz time-domain spectroscopy imaging device and method

Also Published As

Publication number Publication date
US20190293552A1 (en) 2019-09-26
JP7432991B2 (en) 2024-02-19
EP3543683A1 (en) 2019-09-25
CN110296954B (en) 2024-08-20
CN110296954A (en) 2019-10-01
EP3543683B1 (en) 2024-05-01
US10976244B2 (en) 2021-04-13
JP2019194570A (en) 2019-11-07

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