SG10201803980XA - Polishing apparatus and polishing method - Google Patents
Polishing apparatus and polishing methodInfo
- Publication number
- SG10201803980XA SG10201803980XA SG10201803980XA SG10201803980XA SG10201803980XA SG 10201803980X A SG10201803980X A SG 10201803980XA SG 10201803980X A SG10201803980X A SG 10201803980XA SG 10201803980X A SG10201803980X A SG 10201803980XA SG 10201803980X A SG10201803980X A SG 10201803980XA
- Authority
- SG
- Singapore
- Prior art keywords
- polishing
- polishing apparatus
- ytzm
- rzytut
- rfeft
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
- B24B37/07—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
- B24B37/10—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping
- B24B37/105—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping the workpieces or work carriers being actively moved by a drive, e.g. in a combined rotary and translatory movement
- B24B37/107—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping the workpieces or work carriers being actively moved by a drive, e.g. in a combined rotary and translatory movement in a rotary movement only, about an axis being stationary during lapping
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
- B24B49/12—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation involving optical means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/005—Control means for lapping machines or devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/005—Control means for lapping machines or devices
- B24B37/013—Devices or means for detecting lapping completion
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
- B24B37/042—Lapping machines or devices; Accessories designed for working plane surfaces operating processes therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/11—Lapping tools
- B24B37/20—Lapping pads for working plane surfaces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/11—Lapping tools
- B24B37/20—Lapping pads for working plane surfaces
- B24B37/205—Lapping pads for working plane surfaces provided with a window for inspecting the surface of the work being lapped
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/27—Work carriers
- B24B37/30—Work carriers for single side lapping of plane surfaces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/34—Accessories
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/20—Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps
- H01L22/26—Acting in response to an ongoing measurement without interruption of processing, e.g. endpoint detection, in-situ thickness measurement
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Compositions Of Oxide Ceramics (AREA)
Abstract
HApc r £ riS-Ct, £ }fe^«J¥$!l^S<£>igfc IEST-T 6 ¥<Dmm<DWkm%j&Bk\z.wmi-z> ^mmm. m&M7F£ti?>0 mmmm^ ytzm-rzytut, Mft%&m^^x/M%Lr&%i-M:X(DEiMyt(D3m&a®-r6<^^ Mm ®I®M£rfeft£<55tci^<5v^-c?^<z) 7-f 53feS^ilitR 0 1 23
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017098254A JP6829653B2 (en) | 2017-05-17 | 2017-05-17 | Polishing equipment and polishing method |
Publications (1)
Publication Number | Publication Date |
---|---|
SG10201803980XA true SG10201803980XA (en) | 2018-12-28 |
Family
ID=64400139
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG10201803980XA SG10201803980XA (en) | 2017-05-17 | 2018-05-11 | Polishing apparatus and polishing method |
Country Status (6)
Country | Link |
---|---|
US (1) | US11045921B2 (en) |
JP (1) | JP6829653B2 (en) |
KR (1) | KR102522882B1 (en) |
CN (1) | CN108942640B (en) |
SG (1) | SG10201803980XA (en) |
TW (1) | TWI758478B (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2023071317A (en) | 2021-11-11 | 2023-05-23 | 株式会社荏原製作所 | Polishing device and polishing method |
Family Cites Families (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1993006459A1 (en) * | 1991-09-18 | 1993-04-01 | Iowa State University Research Foundation, Inc. | Dual-wavelength photometer and fiber optic sensor probe |
JP3717340B2 (en) * | 1999-07-27 | 2005-11-16 | シャープ株式会社 | Electronic component manufacturing equipment |
US7304744B1 (en) | 1998-12-24 | 2007-12-04 | Sharp Kabushiki Kaisha | Apparatus and method for measuring the thickness of a thin film via the intensity of reflected light |
US6511363B2 (en) | 2000-12-27 | 2003-01-28 | Tokyo Seimitsu Co., Ltd. | Polishing end point detecting device for wafer polishing apparatus |
JP2003249472A (en) * | 2002-02-26 | 2003-09-05 | Hitachi Ltd | Method and device for film thickness measurement and manufacturing method of thin film device |
WO2005004218A1 (en) | 2003-07-02 | 2005-01-13 | Ebara Corporation | Polishing apparatus and polishing method |
JP5302133B2 (en) | 2009-08-07 | 2013-10-02 | 株式会社堀場製作所 | Interference film thickness meter |
JP5050024B2 (en) | 2009-09-28 | 2012-10-17 | 株式会社荏原製作所 | Substrate polishing apparatus and substrate polishing method |
JP5728239B2 (en) | 2010-03-02 | 2015-06-03 | 株式会社荏原製作所 | Polishing monitoring method, polishing method, polishing monitoring apparatus, and polishing apparatus |
US8694144B2 (en) | 2010-08-30 | 2014-04-08 | Applied Materials, Inc. | Endpoint control of multiple substrates of varying thickness on the same platen in chemical mechanical polishing |
JP5980476B2 (en) * | 2010-12-27 | 2016-08-31 | 株式会社荏原製作所 | Polishing apparatus and polishing method |
US8535115B2 (en) | 2011-01-28 | 2013-09-17 | Applied Materials, Inc. | Gathering spectra from multiple optical heads |
JP2013222856A (en) * | 2012-04-17 | 2013-10-28 | Ebara Corp | Polishing device and polishing method |
FR2994734B1 (en) | 2012-08-21 | 2017-08-25 | Fogale Nanotech | DEVICE AND METHOD FOR MAKING DIMENSION MEASUREMENTS ON MULTI-LAYER OBJECTS SUCH AS WAFERS. |
TWI635929B (en) | 2013-07-11 | 2018-09-21 | 日商荏原製作所股份有限公司 | Polishing apparatus and polished-state monitoring method |
ITBO20130403A1 (en) | 2013-07-26 | 2015-01-27 | Marposs Spa | METHOD AND EQUIPMENT FOR OPTICAL CONTROL BY INTERFEROMETRY OF THE THICKNESS OF A PROCESSED OBJECT |
WO2015163164A1 (en) * | 2014-04-22 | 2015-10-29 | 株式会社 荏原製作所 | Polishing method and polishing apparatus |
JP6307428B2 (en) | 2014-12-26 | 2018-04-04 | 株式会社荏原製作所 | Polishing apparatus and control method thereof |
US9921149B2 (en) | 2015-04-24 | 2018-03-20 | Otsuka Electronics Co., Ltd. | Optical measurement apparatus and optical measurement method |
JP6473050B2 (en) * | 2015-06-05 | 2019-02-20 | 株式会社荏原製作所 | Polishing equipment |
-
2017
- 2017-05-17 JP JP2017098254A patent/JP6829653B2/en active Active
-
2018
- 2018-05-11 SG SG10201803980XA patent/SG10201803980XA/en unknown
- 2018-05-11 TW TW107116209A patent/TWI758478B/en active
- 2018-05-14 KR KR1020180054753A patent/KR102522882B1/en active IP Right Grant
- 2018-05-14 US US15/979,180 patent/US11045921B2/en active Active
- 2018-05-15 CN CN201810461546.5A patent/CN108942640B/en active Active
Also Published As
Publication number | Publication date |
---|---|
KR102522882B1 (en) | 2023-04-18 |
US20180339392A1 (en) | 2018-11-29 |
CN108942640B (en) | 2021-09-03 |
KR20180126374A (en) | 2018-11-27 |
TWI758478B (en) | 2022-03-21 |
TW201900334A (en) | 2019-01-01 |
JP6829653B2 (en) | 2021-02-10 |
CN108942640A (en) | 2018-12-07 |
JP2018194427A (en) | 2018-12-06 |
US11045921B2 (en) | 2021-06-29 |
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