SG10201709524QA - Chemical sensor package for highly pressured environment - Google Patents

Chemical sensor package for highly pressured environment

Info

Publication number
SG10201709524QA
SG10201709524QA SG10201709524QA SG10201709524QA SG10201709524QA SG 10201709524Q A SG10201709524Q A SG 10201709524QA SG 10201709524Q A SG10201709524Q A SG 10201709524QA SG 10201709524Q A SG10201709524Q A SG 10201709524QA SG 10201709524Q A SG10201709524Q A SG 10201709524QA
Authority
SG
Singapore
Prior art keywords
sensor package
chemical sensor
highly pressured
pressured environment
environment
Prior art date
Application number
SG10201709524QA
Inventor
Rhee Min Woo Daniel
How Yuan Hwang
Vivek Chidambaram
Yuen Sing Chan
Wai Leong Ching Eva
Jong Bum Lee
Original Assignee
Agency Science Tech & Res
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency Science Tech & Res filed Critical Agency Science Tech & Res
Publication of SG10201709524QA publication Critical patent/SG10201709524QA/en

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403Cells and electrode assemblies
    • G01N27/414Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/50Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
    • H01L21/56Encapsulations, e.g. encapsulation layers, coatings
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/50Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
    • H01L21/56Encapsulations, e.g. encapsulation layers, coatings
    • H01L21/565Moulds
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/768Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
    • H01L21/76838Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
    • H01L21/76895Local interconnects; Local pads, as exemplified by patent document EP0896365
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/28Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
    • H01L23/31Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
    • H01L23/3107Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed
    • H01L23/3114Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed the device being a chip scale package, e.g. CSP
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/28Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
    • H01L23/31Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
    • H01L23/3107Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed
    • H01L23/3135Double encapsulation or coating and encapsulation
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/28Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
    • H01L23/31Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
    • H01L23/3107Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed
    • H01L23/315Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed the encapsulation having a cavity
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/48Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/481Internal lead connections, e.g. via connections, feedthrough structures
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof  ; Multistep manufacturing processes therefor
    • H01L29/66Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/66007Multistep manufacturing processes
    • H01L29/66075Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
    • H01L29/66227Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
    • H01L29/66409Unipolar field-effect transistors
    • H01L29/66477Unipolar field-effect transistors with an insulated gate, i.e. MISFET
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof  ; Multistep manufacturing processes therefor
    • H01L29/66Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76Unipolar devices, e.g. field effect transistors
    • H01L29/772Field effect transistors
    • H01L29/78Field effect transistors with field effect produced by an insulated gate
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
SG10201709524QA 2013-12-26 2014-12-26 Chemical sensor package for highly pressured environment SG10201709524QA (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SG2013096045 2013-12-26

Publications (1)

Publication Number Publication Date
SG10201709524QA true SG10201709524QA (en) 2018-01-30

Family

ID=53545461

Family Applications (2)

Application Number Title Priority Date Filing Date
SG10201408698SA SG10201408698SA (en) 2013-12-26 2014-12-26 Chemical Sensor Package For Highly Pressured Environment
SG10201709524QA SG10201709524QA (en) 2013-12-26 2014-12-26 Chemical sensor package for highly pressured environment

Family Applications Before (1)

Application Number Title Priority Date Filing Date
SG10201408698SA SG10201408698SA (en) 2013-12-26 2014-12-26 Chemical Sensor Package For Highly Pressured Environment

Country Status (2)

Country Link
US (2) US9431315B2 (en)
SG (2) SG10201408698SA (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SG10201408698SA (en) 2013-12-26 2015-07-30 Agency Science Tech & Res Chemical Sensor Package For Highly Pressured Environment
KR102497583B1 (en) 2015-10-27 2023-02-10 삼성전자주식회사 Semiconductor devices having flexible interconnection and methods for fabricating the same
KR102632563B1 (en) 2016-08-05 2024-02-02 삼성전자주식회사 Semiconductor Package

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5632854A (en) * 1995-08-21 1997-05-27 Motorola, Inc. Pressure sensor method of fabrication
US6790599B1 (en) * 1999-07-15 2004-09-14 Microbionics, Inc. Microfluidic devices and manufacture thereof
US6548895B1 (en) * 2001-02-21 2003-04-15 Sandia Corporation Packaging of electro-microfluidic devices
ATE369626T1 (en) * 2001-08-24 2007-08-15 Schott Ag METHOD FOR PRODUCING ELECTRONIC COMPONENTS
CN101714516A (en) * 2001-08-24 2010-05-26 肖特股份公司 Process for making contact with and housing integrated circuits
DE102005052713A1 (en) * 2005-11-04 2007-05-16 Clondiag Chip Tech Gmbh Apparatus and method for detecting molecular interactions
US7538401B2 (en) * 2005-05-03 2009-05-26 Rosemount Aerospace Inc. Transducer for use in harsh environments
US7875942B2 (en) * 2007-01-04 2011-01-25 Stmicroelectronics, S.R.L. Electronic device including MEMS devices and holed substrates, in particular of the LGA or BGA type
ITMI20070099A1 (en) * 2007-01-24 2008-07-25 St Microelectronics Srl ELECTRONIC DEVICE INCLUDING DIFFERENTIAL SENSOR DEVICES MEMS AND SUBSTRATES LAUNDRY
US8945066B2 (en) * 2009-11-06 2015-02-03 Crisi Medical Systems, Inc. Medication injection site and data collection system
US20110192121A1 (en) * 2010-02-08 2011-08-11 Sealed Air Corporation (Us) Inflatable Mailer, Apparatus, and Method for Making the Same
US9389158B2 (en) * 2010-02-12 2016-07-12 Dan Angelescu Passive micro-vessel and sensor
US8981789B2 (en) * 2012-04-16 2015-03-17 Sharp Kabushiki Kaisha Active matrix device and method of driving the same
US9010190B2 (en) * 2012-04-20 2015-04-21 Rosemount Aerospace Inc. Stress isolated MEMS structures and methods of manufacture
US9447895B2 (en) * 2012-05-25 2016-09-20 The Board Of Trustees Of The University Of Illinois Microfluidic pressure amplifier circuits and electrostatic gates for pneumatic microsystems
SG10201408698SA (en) 2013-12-26 2015-07-30 Agency Science Tech & Res Chemical Sensor Package For Highly Pressured Environment

Also Published As

Publication number Publication date
US9841399B2 (en) 2017-12-12
SG10201408698SA (en) 2015-07-30
US20170003247A1 (en) 2017-01-05
US20150206816A1 (en) 2015-07-23
US9431315B2 (en) 2016-08-30

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