SG10201601088PA - Slit nozzle - Google Patents

Slit nozzle

Info

Publication number
SG10201601088PA
SG10201601088PA SG10201601088PA SG10201601088PA SG10201601088PA SG 10201601088P A SG10201601088P A SG 10201601088PA SG 10201601088P A SG10201601088P A SG 10201601088PA SG 10201601088P A SG10201601088P A SG 10201601088PA SG 10201601088P A SG10201601088P A SG 10201601088PA
Authority
SG
Singapore
Prior art keywords
slit nozzle
slit
nozzle
Prior art date
Application number
SG10201601088PA
Inventor
Detterbeck Stefan
Passegger Thomas
Bandarapu Bhaskar
Findenig Richard
Original Assignee
Lam Res Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lam Res Ag filed Critical Lam Res Ag
Publication of SG10201601088PA publication Critical patent/SG10201601088PA/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • B05C5/0254—Coating heads with slot-shaped outlet
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
    • B05B1/02—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means designed to produce a jet, spray, or other discharge of particular shape or nature, e.g. in single drops, or having an outlet of particular shape
    • B05B1/04—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means designed to produce a jet, spray, or other discharge of particular shape or nature, e.g. in single drops, or having an outlet of particular shape in flat form, e.g. fan-like, sheet-like
    • B05B1/044—Slits, i.e. narrow openings defined by two straight and parallel lips; Elongated outlets for producing very wide discharges, e.g. fluid curtains
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
    • B05B1/02—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means designed to produce a jet, spray, or other discharge of particular shape or nature, e.g. in single drops, or having an outlet of particular shape
    • B05B1/04—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means designed to produce a jet, spray, or other discharge of particular shape or nature, e.g. in single drops, or having an outlet of particular shape in flat form, e.g. fan-like, sheet-like
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
    • B05B1/28—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means with integral means for shielding the discharged liquid or other fluent material, e.g. to limit area of spray; with integral means for catching drips or collecting surplus liquid or other fluent material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B15/00—Details of spraying plant or spraying apparatus not otherwise provided for; Accessories
    • B05B15/40—Filters located upstream of the spraying outlets
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
    • H01L21/67051—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly spraying means, e.g. nozzles

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Nozzles (AREA)
  • Coating Apparatus (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Automatic Analysis And Handling Materials Therefor (AREA)
SG10201601088PA 2015-02-18 2016-02-15 Slit nozzle SG10201601088PA (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US14/625,353 US9597703B2 (en) 2015-02-18 2015-02-18 Slit nozzle

Publications (1)

Publication Number Publication Date
SG10201601088PA true SG10201601088PA (en) 2016-09-29

Family

ID=56621786

Family Applications (1)

Application Number Title Priority Date Filing Date
SG10201601088PA SG10201601088PA (en) 2015-02-18 2016-02-15 Slit nozzle

Country Status (6)

Country Link
US (1) US9597703B2 (en)
JP (1) JP6710533B2 (en)
KR (1) KR102495481B1 (en)
CN (1) CN105880050B (en)
SG (1) SG10201601088PA (en)
TW (1) TWI674925B (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102044333B1 (en) * 2017-12-26 2019-11-13 주식회사 포스코 Apparatus for thermal spray coating
KR101952703B1 (en) * 2019-01-11 2019-02-27 이영식 In-shower Knife for Display Glass Surface Spread
KR20200133877A (en) 2019-05-20 2020-12-01 삼성전자주식회사 Apparatus of removing photoresist and Apparatus of manufacturing semiconductor device

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54127940A (en) * 1978-03-29 1979-10-04 Fujitsu Ltd Coating blade
US4962891A (en) * 1988-12-06 1990-10-16 The Boc Group, Inc. Apparatus for removing small particles from a substrate
JPH05104053A (en) * 1991-10-11 1993-04-27 Konica Corp Coating apparatus
JP2572325B2 (en) * 1991-11-26 1997-01-16 富士写真フイルム株式会社 Coating method and device
JP2572325Y2 (en) * 1993-08-19 1998-05-20 株式会社ゼクセル Ventilation mode switching device for vehicle air conditioner
JPH08274014A (en) * 1995-03-29 1996-10-18 Tokyo Ohka Kogyo Co Ltd Coating nozzle, coating method using the same and applying device with the coating nozzle assembled thereinto
FI107278B (en) * 1996-02-28 2001-06-29 Metso Paper Inc Device for preventing clogging of a coating nozzle
JP3231660B2 (en) * 1997-05-26 2001-11-26 有限会社福田エンジニアリング Curtain-like flow-off device for flowing material
JP2000201837A (en) * 1999-01-20 2000-07-25 Sanyo Electric Co Ltd Automatic cooking machine
US6602382B1 (en) 1999-10-26 2003-08-05 Tokyo Electron Limited Solution processing apparatus
US6394369B2 (en) * 1999-12-22 2002-05-28 Visteon Global Tech., Inc. Nozzle
JP3647735B2 (en) * 2000-09-26 2005-05-18 株式会社ミツバ Nozzle structure in washer liquid injection device
JP3808792B2 (en) 2002-03-28 2006-08-16 大日本スクリーン製造株式会社 Substrate processing apparatus and slit nozzle
JP2004148167A (en) * 2002-10-29 2004-05-27 Nordson Corp Method and apparatus for applying viscous fluid material
JP4369325B2 (en) 2003-12-26 2009-11-18 東京エレクトロン株式会社 Development device and development processing method
JP2011134797A (en) 2009-12-22 2011-07-07 Sumco Corp Sheet-type etching device and sheet-type etching method
DE102011118053A1 (en) * 2011-11-09 2013-05-23 Andritz Küsters Gmbh Curtain applicator
KR101229347B1 (en) * 2012-09-05 2013-02-05 일성기계공업 주식회사 Hotwind spray nozzle of tenter machine and hotwind spray device of tenter machine using thereof

Also Published As

Publication number Publication date
JP2016175065A (en) 2016-10-06
JP6710533B2 (en) 2020-06-17
TW201701956A (en) 2017-01-16
CN105880050A (en) 2016-08-24
KR20160101877A (en) 2016-08-26
CN105880050B (en) 2018-07-20
TWI674925B (en) 2019-10-21
US20160236227A1 (en) 2016-08-18
KR102495481B1 (en) 2023-02-02
US9597703B2 (en) 2017-03-21

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