SG10201407577UA - Controls interface solution for energy savings - Google Patents

Controls interface solution for energy savings

Info

Publication number
SG10201407577UA
SG10201407577UA SG10201407577UA SG10201407577UA SG10201407577UA SG 10201407577U A SG10201407577U A SG 10201407577UA SG 10201407577U A SG10201407577U A SG 10201407577UA SG 10201407577U A SG10201407577U A SG 10201407577UA SG 10201407577U A SG10201407577U A SG 10201407577UA
Authority
SG
Singapore
Prior art keywords
systems
fab
energy savings
electronic device
sub
Prior art date
Application number
SG10201407577UA
Inventor
Youssef A Loldj
Maxime Cayer
Tony Tong
Miroslav Gelo
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Publication of SG10201407577UA publication Critical patent/SG10201407577UA/en

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/04—Programme control other than numerical control, i.e. in sequence controllers or logic controllers
    • G05B19/042—Programme control other than numerical control, i.e. in sequence controllers or logic controllers using digital processors
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/04—Programme control other than numerical control, i.e. in sequence controllers or logic controllers
    • G05B19/0405—Programme-control specially adapted for machine tool control and not otherwise provided for
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/20—Pc systems
    • G05B2219/23—Pc programming
    • G05B2219/23316—Standby, inactive, sleep or active, operation mode
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/20—Pc systems
    • G05B2219/25—Pc structure of the system
    • G05B2219/25286—Switch on power, awake controlled machine from standby if command signal
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/34—Director, elements to supervisory
    • G05B2219/34306—Power down, energy saving
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/45—Nc applications
    • G05B2219/45031—Manufacturing semiconductor wafers
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P80/00—Climate change mitigation technologies for sector-wide applications
    • Y02P80/10—Efficient use of energy, e.g. using compressed air or pressurized fluid as energy carrier

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • General Factory Administration (AREA)
  • Testing And Monitoring For Control Systems (AREA)

Abstract

CONTROLS INTERFACE SOLUTION FOR ENERGY SAVINGS Methods and apparatus for enhanced control over electronic device manufacturing systems are provided herein, in some embodiments, the integrated sub-fab system may employ Ethernet and/or RS232 Serial communications through an open platform of apparatus to achieve a reduced carbon footprint during electronic device manufacturing. For this example, the system could include process a tool set and controller linked by sensors or software interconnect with one or more sub-fab or local factory auxiliary systems that can be operated in one or more states of energy consumption. These one or more auxiliary systems can be switched between different levels of energy consumption, as required by the process, via the controller. For many auxiliary components or systems the integrated sub-fab system utilizes existing signal outputs, for others they may employ secondary sensors or monitors. Figure 5 17
SG10201407577UA 2009-11-16 2010-11-16 Controls interface solution for energy savings SG10201407577UA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US26171609P 2009-11-16 2009-11-16
US12/946,423 US9740184B2 (en) 2009-11-16 2010-11-15 Controls interface solution for energy savings

Publications (1)

Publication Number Publication Date
SG10201407577UA true SG10201407577UA (en) 2015-01-29

Family

ID=43992467

Family Applications (1)

Application Number Title Priority Date Filing Date
SG10201407577UA SG10201407577UA (en) 2009-11-16 2010-11-16 Controls interface solution for energy savings

Country Status (6)

Country Link
US (1) US9740184B2 (en)
KR (1) KR101785261B1 (en)
CN (1) CN102667644B (en)
SG (1) SG10201407577UA (en)
TW (1) TWI529506B (en)
WO (1) WO2011060415A2 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9740184B2 (en) * 2009-11-16 2017-08-22 Applied Materials, Inc. Controls interface solution for energy savings
CN102540874A (en) * 2012-02-03 2012-07-04 台达电子企业管理（上海）有限公司 Equipment control system and redundant control method thereof
US9740182B2 (en) * 2012-06-08 2017-08-22 Applied Materials, Inc. Integrated controller solution for monitoring and controlling manufacturing equipment
US20160063659A1 (en) * 2014-09-02 2016-03-03 Apple Inc. Electronic Device Display With Electrostatic Discharge Recovery Capabilities
GB201718752D0 (en) * 2017-11-13 2017-12-27 Edwards Ltd Vacuum and abatement systems

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JPH03263541A (en) 1990-03-13 1991-11-25 Hitachi Plant Eng & Constr Co Ltd Clean-air room
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US6181677B1 (en) * 1998-02-18 2001-01-30 Milgo Solutions, Inc. Method and apparatus for detection and protection against data loss in a fractional T1/E1 communications environment
JP2001332463A (en) * 2000-05-24 2001-11-30 Tokyo Electron Ltd Apparatus and method for management of apparatus for semiconductor manufacture
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JP2004190972A (en) 2002-12-12 2004-07-08 Dainippon Screen Mfg Co Ltd Air conditioning system for clean room and method of air conditioning clean room
JP4451076B2 (en) * 2003-04-16 2010-04-14 東京エレクトロン株式会社 Vacuum processing equipment
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JP4496980B2 (en) * 2005-02-10 2010-07-07 セイコーエプソン株式会社 Method and system for controlling semiconductor manufacturing apparatus
JP4753172B2 (en) * 2005-02-18 2011-08-24 東京エレクトロン株式会社 Operation control apparatus, operation control method, and storage medium for a plurality of power usage systems
JP4232788B2 (en) * 2006-04-03 2009-03-04 セイコーエプソン株式会社 Method and system for controlling semiconductor manufacturing apparatus
US9568206B2 (en) * 2006-08-15 2017-02-14 Schneider Electric It Corporation Method and apparatus for cooling
US20080167772A1 (en) * 2007-01-04 2008-07-10 Sterling Du Method and system for processing and transmitting automotive emission data
JP4337890B2 (en) * 2007-02-27 2009-09-30 セイコーエプソン株式会社 Semiconductor manufacturing system, control apparatus, semiconductor manufacturing system control method, and processing liquid recovery method
US20090088874A1 (en) * 2007-10-02 2009-04-02 Emmanuel Arceo Valve manifold assemblies and method of operating valve manifold assemblies
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CN101939713B (en) * 2008-02-05 2013-05-22 应用材料公司 Methods and apparatus for operating an electronic device manufacturing system
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US9740184B2 (en) * 2009-11-16 2017-08-22 Applied Materials, Inc. Controls interface solution for energy savings

Also Published As

Publication number Publication date
KR20120096513A (en) 2012-08-30
CN102667644A (en) 2012-09-12
WO2011060415A3 (en) 2011-08-25
WO2011060415A2 (en) 2011-05-19
TW201131327A (en) 2011-09-16
KR101785261B1 (en) 2017-10-16
US9740184B2 (en) 2017-08-22
US20110118893A1 (en) 2011-05-19
TWI529506B (en) 2016-04-11
CN102667644B (en) 2016-03-30

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